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Phase gratings of a combination pattern-refraction modification type

Assignee: Toshiba Corp
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Filing: 1986-10-21
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Granted: 1988-07-26
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Expires: 2006-10-21
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Abstract

Abstract A combination pattern-refraction modification type phase grating comprises dual grating elements which are regularly arranged and each includes convex and concave portions which have respectively different thickness and are formed of material respectively different in refractive index so as to combine respective characteristics of a pattern and a refraction modification type phase grating.

Inventors

  • 👤 Nobuhiko Kawatsuki
  • 👤 Masao Uetsuki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 15:58
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/18; G02B5/1866; G02B5/1871; G02B5/1847; G02B5/1857

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 54 words
A phase grating of a combination pattern-refraction modification type comprises: dual grating elements including convex and concave portions of thin layers, said portions having different thicknesses, being regularly arranged and being formed of materials different in refractive index so as to provide a difference in refractive index between the convex and the concave portions.
Claim 2
Dependent Claim 54 words
A phase grating of a combination pattern-refraction modification type comprises: dual grating elements including convex and concave portions of thin layers, said portions having different thicknesses, being regularly arranged and being formed of materials different in refractive index so as to provide a difference in refractive index between the convex and the concave portions.
Claim 3
Dependent Claim 35 words
A phase grating according to claim 1, in which the refractive index of material forming the convex portion of the dual grating elements is higher than the refractive index of material forming the concave portion.
Claim 4
Dependent Claim 29 words
A phase grating according to claim 1 or 2, in which the convex portion of the dual grating elements is formed in the shape of a square in section.
Claim 5
Dependent Claim 36 words
A phase grating according to claim 1 or 2, in which the convex portion of the dual gratings is formed in the shape of one of a triangle, a trapezoid and a sinusoidal wave in section.
Claim 6
Dependent Claim 27 words
A phase grating according to claim 1 or 2, in which the difference in level between the convex and the concave portions is 0.001 μm or more.
Claim 7
Dependent Claim 27 words
A phase grating according to claim 1 or 2, in which the difference in refractive index between the convex and the concave portions is 0.005 or more.
Claim 8
Dependent Claim 24 words
A phase grating according to claim 6, in which the difference in level between the convex and concave portions is 0.001 um or more.

References Cited (Backward Citations)

US3911479A Cited
US4598977A Cited
US4568147A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-07-26 1992-01-25 1992-07-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-07-26 1996-01-25 1996-07-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-07-26 2000-01-25 2000-07-26 $7700.00 Window Closed / Lapsed

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