Patent US4758723A successfully refreshed from Google Patents.
US4758723A
Expired / Lapsed
US
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Electron spectrometer
Assignee: VG Instruments Group Ltd
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Filing: 1987-05-18
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Granted: 1988-07-19
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Expires: 2007-05-18
Abstract
Abstract There is provided an electron spectrometer operable to produce an image of an electron emitting surface, said spectrometer comprising in sequence: (a) means for causing electrons to be emitted from said surface; (b) a first electrostatic lens system arranged to project at least some of said electrons onto a first diffraction plane as a Fourier transform of an electron image of at least a part of said surface; (c) a torroidal capacitor type electrostatic energy analyzer having an object plane and conjugate thereto a first image plane, said analyzer being disposed with said object plane coincident with said first diffraction plane and being arranged to project electrons of said Fourier transform as an energy dispersed Fourier transform in said first image plane; (d) energy selection means for transmitting electrons of said energy dispersed Fourier transform having energies only within a selected range; and (e) a second electrostatic lens system arranged to receive electrons transmitted by said energy selection means and therewith to project an electron image of at least a part of said surface onto a second image plane. By projecting a Fourier transform onto the object plane of the energy analyzer it is possible using the spectrometer of the invention to detect in the image plane of the analyzer an energy spectrum uncorrupted by spatial detail and, selecting electrons having energies only within a selected range from the energy dispersed Fourier transform at the image plane of the energy analyzer, it is possible to project onto the second image plane an image of the surface deriving from electrons emitted from the surface with energies within a corresponding range.
Inventors
- 👤 Ian R. M. Wardell
- 👤 Peter A. Coxon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:06
CPC Classifications
G; G01; G01J; G01J1/00; H; H01; H01J; H01J49/00; H01J49/44; H01J49/46; H01J37/00; H01J37/252
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
176 words
An electron spectrometer operable to produce an image of an electron emitting surface, said spectrometer comprising in sequence: (a) means for causing electrons to be emitted from said surface; (b) a first electrostatic lens system arranged to project at least some of said electrons onto a first diffraction plane as a Fourier transform of an electron image of at least a part of said surface; (c) a torroidal capacitor type electrostatic energy analyzer having an object plane and conjugate thereto a first image plane, said analyzer being disposed with said object plane coincident with said first diffraction plane and being arranged to project electrons of said Fourier transform as an energy dispersed Fourier transform in said first image plane; (d) energy selection means for transmitting electrons of said energy dispsersed Fourier transform having energies only within a selected range; and (e) a second electrostatic lens system arranged to receive electrons transmitted by said energy selection means and therewith to project an electron image of at least a part of said surface onto a second image plane.
Claim 2
Dependent Claim
176 words
An electron spectrometer operable to produce an image of an electron emitting surface, said spectrometer comprising in sequence: (a) means for causing electrons to be emitted from said surface; (b) a first electrostatic lens system arranged to project at least some of said electrons onto a first diffraction plane as a Fourier transform of an electron image of at least a part of said surface; (c) a torroidal capacitor type electrostatic energy analyzer having an object plane and conjugate thereto a first image plane, said analyzer being disposed with said object plane coincident with said first diffraction plane and being arranged to project electrons of said Fourier transform as an energy dispersed Fourier transform in said first image plane; (d) energy selection means for transmitting electrons of said energy dispsersed Fourier transform having energies only within a selected range; and (e) a second electrostatic lens system arranged to receive electrons transmitted by said energy selection means and therewith to project an electron image of at least a part of said surface onto a second image plane.
Claim 3
Dependent Claim
40 words
A spectrometer as claimed in claim 1 further comprising a transfer electrostatic lens system disposed between said surface and said first electrostatic lens system and arranged to receive electrons emitted from said surface and therewith to project an electron image.
Claim 4
Dependent Claim
21 words
A spectrometer as claimed in claim 2 wherein said transfer electrostatic lens system has a magnification of at least 16 times.
Claim 5
Dependent Claim
26 words
A spectrometer as claimed in claim 3 wherein said transfer electrostatic lens system has a magnification adjustable in a range between 16 times and 64 times.
Claim 6
Dependent Claim
40 words
A spectrometer as claimed in claim 1 further comprising means, disposed between said surface and said energy analyzer, for allowing into said analyzer only electrons which have left said surface in directions which make a selected range of angles thereto.
Claim 7
Dependent Claim
19 words
A spectrometer as claimed in claim 1 having a first electron detector means arranged in said second image plane.
Claim 8
Dependent Claim
24 words
A spectrometer as claimed in claim 6 further comprising a retractably mounted second electron detector means arranged for disposition in said first image plane.
Claim 9
Dependent Claim
21 words
A spectrometer as claimed in claim 6 further comprising an apertured second electron detector means disposed in said first image plane.
Claim 10
Dependent Claim
19 words
A spectrometer as claimed in claim 1 wherein said energy analyzer is a part-spherical capacitor type electrostatic energy analyzer.
Claim 11
Dependent Claim
28 words
A spectrometer as claimed in claim 9 wherein the angle between said first image plane and said object plane is in the range of from 150° to 190°.
Claim 12
Dependent Claim
28 words
A spectrometer as claimed in claim 1 wherein said energy analyzer is arranged to maintain the central trajectory thereof at a potential different from that of said surface.
Claim 13
Dependent Claim
25 words
A spectrometer as claimed in claim 11 wherein said energy analyzer is arranged for operation at a pass energy of at least 50 electron volts.
Claim 14
Independent Claim
167 words
A method of forming an image of an electron emitting surface, said method comprising: (a) causing electrons to be emitted from a surface; (b) passing at least some of said electrons through a first electrostatic field arranged to produce in a first diffraction plane a Fourier transform of an electron image of at least a part of said surface; (c) passing at least some of the electrons of said Fourier transform which travel through said first diffraction plane through a second electrostatic field generated by a torroidal capacitor type electrostatic analyzer having an object plane and a first image plane, said object plane being coincident with said first diffraction plane, thereby to produce an energy dispersed Fourier transform in said first image plane; (d) selecting electrons which have energies within a selected range; and (e) passing said selected electrons through a third electrostatic field arranged to focus them to form in a second image plane a second electron image comprising electrons having energies within said selected range.
Claim 15
Independent Claim
167 words
A method of forming an image of an electron emitting surface, said method comprising: (a) causing electrons to be emitted from a surface; (b) passing at least some of said electrons through a first electrostatic field arranged to produce in a first diffraction plane a Fourier transform of an electron image of at least a part of said surface; (c) passing at least some of the electrons of said Fourier transform which travel through said first diffraction plane through a second electrostatic field generated by a torroidal capacitor type electrostatic analyzer having an object plane and a first image plane, said object plane being coincident with said first diffraction plane, thereby to produce an energy dispersed Fourier transform in said first image plane; (d) selecting electrons which have energies within a selected range; and (e) passing said selected electrons through a third electrostatic field arranged to focus them to form in a second image plane a second electron image comprising electrons having energies within said selected range.
Claim 16
Dependent Claim
126 words
An electron energy spectrometer comprising in sequence: (a) means for causing electrons to be emitted from said surface; (b) a first electrostatic lens system arranged to project at least some of said electrons onto a first diffraction plane as a Fourier transform of an electron image of at least a part of said surface; (c) a torroidal capacitor type electrostatic energy analyzer having an object plane and conjugate thereto a first image plane, said analyzer being disposed with said object plane coincident with said first diffraction plane and being arranged to project electrons of said Fourier transform as an energy dispsered Fourier transform in said first image plane; and (d) an electron detector means disposed for the detection of electrons in said energy dispersed Fourier transform.
Claim 17
Dependent Claim
126 words
An electron energy spectrometer comprising in sequence: (a) means for causing electrons to be emitted from said surface; (b) a first electrostatic lens system arranged to project at least some of said electrons onto a first diffraction plane as a Fourier transform of an electron image of at least a part of said surface; (c) a torroidal capacitor type electrostatic energy analyzer having an object plane and conjugate thereto a first image plane, said analyzer being disposed with said object plane coincident with said first diffraction plane and being arranged to project electrons of said Fourier transform as an energy dispsered Fourier transform in said first image plane; and (d) an electron detector means disposed for the detection of electrons in said energy dispersed Fourier transform.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-07-19 | 1992-01-18 | 1992-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-07-19 | 1996-01-18 | 1996-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-07-19 | 2000-01-18 | 2000-07-19 | $7700.00 | Window Closed / Lapsed |