Process for the production of self-adjusted bipolar transistor structures having a reduced extrinsic base resistance

Claim 1

A process for the production of bipolar transistors having buried collector zones and deeply extending collector terminals, comprising the sequence of the following process steps: (a) producing buried n + -doped zones in a p-doped substrate by implantation of n-doping ions, (b) depositing an n - -doped epitaxial layer in a layer thickness of 0.5 to 2.0 microns, (c) implanting boron ions to produce channel-stop zones, (d) applying a double layer consisting of silicon oxide and silicon nitride and structuring of the silicon nitride layer for the succeeding local oxidation, (e) producing a field oxide to separate the active transistor zones in the substrate by local oxidation using the silicon nitride structure as an oxidation mask, (f) removing the nitride/oxide mask, (g) producing the collector zones by implantation of phosphorus atoms, (h) applying a first high-temperature treatment, (i) depositing a p + -conducting first layer of polysilicon onto the entire surface, (j) depositing an insulating layer onto the entire surface, (k) structuring the two last-named layers with vertical sidewalls until the substrate is exposed, using a dry etching procedure in order to define a base zone, (l) providing an active base zone by boron ion implantation, (m) depositing a second insulating layer and etching back this layer in order to produce sidewall insulations at the p + -polysilicon edges, (n) depositing a second polysilicon layer onto the entire surface, (o) structuring of said second polysilicon layer so that the emitter and collector terminals are formed on the substrate, (p) applying an anisotropic etching process wherein the insulating layer which covers the p + -conducting first polysilicon layer surface is removed until the p + -conducting first polysilicon layer surface is exposed, (q) depositing a further insulating layer on the entire surface to provide a good edge cover of the structures of the p + -conducting first polysilicon layer and the structures of the second polysilicon layer, (r) anisotropically etching of said further insulating layer whereby insulating strips are formed at the sidewalls of the first polysilicon layer and the second polysilicon layer and whereby silicon surfaces of the first polysilicon layer and the second polysilicon layer are exposed, (s) implanting arsenic ions in the emitter and collector zones of said second polysilicon layer, (t) selectively depositing and forming a metal layer or a silicide layer on the exposed silicon surfaces, (u) applying a second high-temperature step such that the surfaces coated with metal or silicide are converted into a stable silicide layer and the dopants diffuse out of said first polysilicon layer structure and the second polysilicon layer structure into the silicon substrate, and (v) producing an intermediate layer which serves as an insulating oxide, and opening contact holes to the active transistor terminals consisting of the doped polysilicon structures.