US4751200A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Passivation of gallium arsenide surfaces with sodium sulfide
Assignee: Iconectiv LLC
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Filing: 1987-03-04
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Granted: 1988-06-14
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Expires: 2007-03-04
Abstract
Abstract A method of passivating the surface of a gallium arsenide substrate by cleaning the gallium arsenide substrate in an etching solution and depositing a sulfide film on the substrate. The step of depositing the sulfide film is preferably performed by spin-on of a sodium sulfide solution, followed by drying or annealing. The resulting passivated surface exhibits superior surface recombination velocity characteristics compared to prior art passivation techniques, thereby making possible superior solid state device operating characteristics.
Inventors
- 👤 Thomas J. Gmitter
- 👤 Claude J. Sandroff
- 👤 Eli Yablonovitch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 12:08
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10W; H10W74/00; H10W74/10; H10W74/131; H10W74/137; Y; Y10; Y10S; Y10S438/00; Y10S438/974
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
74 words
A method of passivating the surface of a gallium arsenide substrate comprising the steps of: providing a gallium arsenide substrate; cleaning said substrate; depositing a sodium sulfide film on the surface of said substract to be passivated by application thereto of an aqueous solution of sodium sulfide; and annealing said substrate to form a passivation layer of sodium sulfide on the surface of said substrate, thereby minimizing the surface recombination velocity of said surface.
Claim 2
Independent Claim
74 words
A method of passivating the surface of a gallium arsenide substrate comprising the steps of: providing a gallium arsenide substrate; cleaning said substrate; depositing a sodium sulfide film on the surface of said substract to be passivated by application thereto of an aqueous solution of sodium sulfide; and annealing said substrate to form a passivation layer of sodium sulfide on the surface of said substrate, thereby minimizing the surface recombination velocity of said surface.
Claim 3
Dependent Claim
29 words
A method as defined in claim 1 wherein said steps of depositing a sulfide film is performed by spinning on said film at approximately 5000 rpm for 60 seconds.
Claim 4
Dependent Claim
26 words
A method as defined in claim 1 wherein said step of depositing a sulfide film is performed by dip coating said substrate in a sulfide solution.
Claim 5
Dependent Claim
16 words
A method as defined in claim 1 wherein said sulfide film is applied by roller coating.
Claim 6
Dependent Claim
15 words
An article of manufacture prepared by a process comprising the steps defined in claim 1.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-06-14 | 1991-12-14 | 1992-06-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-06-14 | 1995-12-14 | 1996-06-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-06-14 | 1999-12-14 | 2000-06-14 | $7700.00 | Window Closed / Lapsed |