Patent US4750822A successfully refreshed from Google Patents.
US4750822A
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Method and apparatus for optically detecting surface states in materials
Assignee: Therma Wave Inc
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Filing: 1986-03-28
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Granted: 1988-06-14
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Expires: 2006-03-28
Abstract
Abstract A method and apparatus is disclosed for detecting defect surface states in any material and in particular semiconductors. In the subject device, a periodic localized excitation is generated at the surface of the sample with an intensity modulated pump laser beam. A probe laser beam is directed to the surface of the sample and changes in the probe beam which are in phase with the modulated pump frequency are detected. In the preferred embodiment, periodic changes in the optical reflectivity of the surface of the sample induced by an intensity modulated excitation beam are detected by measuring the corresponding modulations in the reflected power of the probe beam. Any time dependence of the probe beam modulated reflectance signal is monitored. An evaluation of defect surface states is then made by investigating the time dependence of the magnitude and/or phase of this probe beam modulated reflectance signal.
Inventors
- 👤 Allan Rosencwaig
- 👤 Jon Opsal
- 👤 Walter L. Smith
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:45
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/17; G01N2021/1738; G01N2021/1744; G01N2021/178; G01N2021/1789; G01N21/21; G01N21/47; G01N21/4738
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
95 words
A method of obtaining information useful for evaluating surface states in a sample comprising the steps of: a. generating a localized periodic excitation at the surface of the sample; b. directing a probe beam of radiation within the periodically excited region of the sample; c. thereafter, detecting periodic changes in the probe beam that are synchronous with the periodic excitation and generating a signal corresponding thereto; and d. monitoring the variation in said signal as a function of time to provide information which can be used to evaluate the defect surface states of the sample.
Claim 2
Independent Claim
95 words
A method of obtaining information useful for evaluating surface states in a sample comprising the steps of: a. generating a localized periodic excitation at the surface of the sample; b. directing a probe beam of radiation within the periodically excited region of the sample; c. thereafter, detecting periodic changes in the probe beam that are synchronous with the periodic excitation and generating a signal corresponding thereto; and d. monitoring the variation in said signal as a function of time to provide information which can be used to evaluate the defect surface states of the sample.
Claim 3
Dependent Claim
20 words
A method as recited in claim 1 wherein the variation over time of the magnitude of the signal is monitored.
Claim 4
Dependent Claim
30 words
A method as recited in claim 1 wherein the variation over time of the relative phase of the signal with respect to the phase of the periodic excitation is monitored.
Claim 5
Dependent Claim
19 words
A method as recited in claim 1 wherein the rate of variation over time of the signal is monitored.
Claim 6
Dependent Claim
19 words
A method as recited in claim 1 wherein the direction of variation over time of the signal is monitored.
Claim 7
Dependent Claim
26 words
A method as recited in claim 1 wherein the periodic changes that are detected in step c are changes in the power of the probe beam.
Claim 8
Dependent Claim
20 words
A method as recited in claim 6 wherein changes in the power of a specularly reflected probe beam are monitored.
Claim 9
Dependent Claim
22 words
A method as recited in claim 6 wherein the proportional changes in the power in a diffusely scattered probe beam are monitored.
Claim 10
Dependent Claim
19 words
A method as recited in claim 6 wherein the changes in the transmittance of the probe beam are monitored.
Claim 11
Dependent Claim
37 words
A method as recited in claim 1 wherein the changes detected in the probe beam in step c are periodic changes in the position of the probe beam induced by periodic angular changes at the sample surface.
Claim 12
Dependent Claim
38 words
A method as recited in claim 1 wherein said step of generating a localized periodic excitation is performed by focusing an intensity modulated pump beam from a laser at a localized spot at the surface of the sample.
Claim 13
Dependent Claim
33 words
A method as recited in claim 11 wherein the probe beam is directed coaxially with the intensity modulated pump beam and the periodic changes in the power of the probe beam are detected.
Claim 14
Independent Claim
119 words
An apparatus for obtaining information useful for evaluating surface states in a sample comprising: means for inducing a periodic, localized excitation at the surface of the sample; probe means for emitting a beam of radiation; means for directing the beam from the probe means within the periodically excited region on the sample surface; means for detecting the periodic changes in the probe beam after it has interacted with the sample; means for processing the detected changes that are synchronous with the periodic excitation and generating a signal corresponding thereto; and means for monitoring the variation of said signal as a function of time to provide information which can be used to evaluate the defect surface states of the sample.
Claim 15
Independent Claim
119 words
An apparatus for obtaining information useful for evaluating surface states in a sample comprising: means for inducing a periodic, localized excitation at the surface of the sample; probe means for emitting a beam of radiation; means for directing the beam from the probe means within the periodically excited region on the sample surface; means for detecting the periodic changes in the probe beam after it has interacted with the sample; means for processing the detected changes that are synchronous with the periodic excitation and generating a signal corresponding thereto; and means for monitoring the variation of said signal as a function of time to provide information which can be used to evaluate the defect surface states of the sample.
Claim 16
Dependent Claim
22 words
An apparatus as recited in claim 13 wherein said monitor means monitors the variation of the magnitude of the signal over time.
Claim 17
Dependent Claim
32 words
An apparatus as recited in claim 13 wherein said monitor means monitors the variation over time of the relative phase of the signal with respect to the phase of the periodic excitation.
Claim 18
Dependent Claim
21 words
An apparatus as recited in claim 13 wherein said monitor means monitors the rate of variation over time of the signal.
Claim 19
Dependent Claim
22 words
An apparatus as recited in claim 13 wherein said monitor means monitors the direction of the variation of the signal over time.
Claim 20
Dependent Claim
31 words
An apparatus as recited in claim 13 wherein said means for detecting the periodic changes in the probe beam functions to detect the periodic changes in power of the probe beam.
Claim 21
Dependent Claim
21 words
An apparatus as recited in claim 18 wherein the periodic changes in power are detected from a specularly reflected probe beam.
Claim 22
Dependent Claim
24 words
An apparatus as recited in claim 18 wherein said detecting means measures the proportional changes in the power of a diffusely scattered probe beam.
Claim 23
Dependent Claim
18 words
An apparatus as recited in claim 18 wherein the detecting means measures a transmittance of the probe beam.
Claim 24
Dependent Claim
34 words
An apparatus as recited in claim 13 wherein said means for inducing a periodic localized heating at the surface of the sample is provided by an intensity modulated beam from a pump laser source.
Claim 25
Dependent Claim
22 words
An apparatus as recited in claim 22 wherein said probe beam is directed coaxially with the beam from the pump laser source.
Claim 26
Independent Claim
150 words
An apparatus for obtaining information useful for evaluating surface states in a sample comprising: a pump laser for emitting a beam of radiation; means for intensity modulating the pump beam; probe means for emitting a beam of radiation; means for focusing the intensity modulated pump beam and the probe beam to a localized spot on the surface of the sample such that the pump beam periodically excites the sample surface and the probe beam is specularly reflected; means for detecting the periodic changes in the power of the reflected probe beam; means for processing the detected changes in the power of the probe beam that are synchronous with the frequency of the modulating means and generating a signal corresponding thereto; and means for monitoring the variation of said signal as a function of time to provide information which can be used to evaluate the defect surface states of the sample.
Claim 27
Independent Claim
150 words
An apparatus for obtaining information useful for evaluating surface states in a sample comprising: a pump laser for emitting a beam of radiation; means for intensity modulating the pump beam; probe means for emitting a beam of radiation; means for focusing the intensity modulated pump beam and the probe beam to a localized spot on the surface of the sample such that the pump beam periodically excites the sample surface and the probe beam is specularly reflected; means for detecting the periodic changes in the power of the reflected probe beam; means for processing the detected changes in the power of the probe beam that are synchronous with the frequency of the modulating means and generating a signal corresponding thereto; and means for monitoring the variation of said signal as a function of time to provide information which can be used to evaluate the defect surface states of the sample.
Claim 28
Dependent Claim
22 words
An apparatus as recited in claim 24 wherein said monitor means monitors the variation of the magnitude of the signal over time.
Claim 29
Dependent Claim
32 words
An apparatus as recited in claim 24 wherein said monitor means monitors the variation over time of the relative phase of the signal with respect to the phase of the modulating means.
Claim 30
Dependent Claim
21 words
An apparatus as recited in claim 24 wherein said monitor means monitors the rate of variation over time of the signal.
Claim 31
Dependent Claim
22 words
An apparatus as recited in claim 24 wherein said monitor means monitors the direction of the variation of the signal over time.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-06-14 | 1991-12-14 | 1992-06-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-06-14 | 1995-12-14 | 1996-06-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-06-14 | 1999-12-14 | 2000-06-14 | $7700.00 | Window Closed / Lapsed |