Static pressure bearing

Claim 2

A static pressure bearing device for relatively supporting an object for relative movement, comprising: a housing; a fluid supplying portion for supplying a fluid into said housing and to at least a portion of a surface of the object; suction means for drawing the fluid supplied to said portion of the surface of the object by said fluid supplying portion; and wall means for substantially sealing a space between said housing and the object; wherein said suction means includes a plurality of exhaust ports formed in said housing and a suction pump communicated with said exhaust ports, for drawing the fluid out of said housing, wherein said wall means includes a plurality of walls provided on said housing, and wherein said exhaust ports and said walls are disposed alternately.

Claim 3

A device according to claim 1, wherein the object comprises a rod-like member and wherein said fluid supplying portion includes fluid discharging means adapted to guide relative rectilinear movement of the rod-like member.

Claim 4

A device according to claim 1, wherein at least one of said exhaust ports is open to atmosphere, such that a portion of the fluid supplied by said fluid supplying portion to said portion of the surface of the object is exhaust to atmosphere by said at least one port.

Claim 5

A device according to claim 1, wherein a fluid pressure is defined at each exhaust port, and wherein a value of the fluid pressure at each exhaust port decreases as a distance of the exhaust port from the fluid supplying portion increases.

Claim 6

A static pressure bearing device for relatively supporting an object for relative movement, said device comprising: a housing; a fluid supplying portion for allowing a fluid to be supplied into said housing and to at least a portion of a surface of the object; and sealing means for substantially sealing a space between said housing and the object, said sealing means including suction means having a plurality of exhaust ports formed in said housing, for drawing the fluid supplied to said portion of the surface of the object, said sealing means further including wall means having a plurality of walls provided on said housing and disposed in an alternate fashion with said exhaust ports, said walls cooperating with said exhaust ports to substantially seal the space between said housing and the object.

Claim 7

A static pressure bearing device for relatively supporting an object for relative movement, said device comprising: a housing; a fluid supplying portion for allowing a fluid to be supplied into said housing and to at least a portion of a surface of the object; and sealing means for substantially sealing a space between said housing and the object, said sealing means including suction means having a plurality of exhaust ports formed in said housing, for drawing the fluid supplied to said portion of the surface of the object, said sealing means further including wall means having a plurality of walls provided on said housing and disposed in an alternate fashion with said exhaust ports, said walls cooperating with said exhaust ports to substantially seal the space between said housing and the object.

Claim 8

A device according to claim 5, wherein at least one of said exhaust ports is open to atmosphere, such that a portion of the fluid supplied by said fluid supplying portion to said portion of the surface of the object is exhausted to atmosphere by said at least one port.

Claim 9

A device according to claim 5, wherein a fluid pressure is defined at each exhaust port, and wherein a value of the fluid pressure at each exhaust port decreases as a distance of the exhaust port from the fluid supplying portion increases.