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US4748491A
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US
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Redundant circuit of semiconductor device and method of producing same
Assignee: Mitsubishi Electric Corp
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Filing: 1986-10-08
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Granted: 1988-05-31
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Expires: 2006-10-08
Abstract
Abstract A redundant circuit of a semiconductor device comprises a fuse (73) for laser trimming to connect between aluminum interconnections (6). The fuse (73) has a two-layer structure comprising a first film (3a) of polysilicon and a second film (7a) formed on the film (3a) of metal silicide, the line width l 0 of the first film (3a) being shorter than the line width l 1 of the second layer (7a). In addition, a PSG film (4) is formed to cover the fuse (73), and the laser beam is irradiated on the PSG film (4) in disconnecting the fuse (73). Accordingly, the first film (3a) having a short line width is uniformly fused and expanded, the fuse (73) is uniformly disconnected, and an opening (10) formed after explosion and splash thereof becomes smaller.
Inventors
- 👤 Hiroshi Takagi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:09
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/493; H10W20/494
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
93 words
A redundant circuit of a semiconductor device comprising; a first metal interconnection layer, a second metal interconnection layer spaced apart from said first metal interconnection layer, a fuse for electrically connecting said first and second metal interconnection layers, said fuse having a two-layer structure comprising a first linear film of a first material and a second linear film layer of a second material formed on said first film, and a line width of said first film being narrower than that of said second film, and a glass film formed to cover said fuse.
Claim 2
Dependent Claim
93 words
A redundant circuit of a semiconductor device comprising; a first metal interconnection layer, a second metal interconnection layer spaced apart from said first metal interconnection layer, a fuse for electrically connecting said first and second metal interconnection layers, said fuse having a two-layer structure comprising a first linear film of a first material and a second linear film layer of a second material formed on said first film, and a line width of said first film being narrower than that of said second film, and a glass film formed to cover said fuse.
Claim 3
Dependent Claim
25 words
A redundant circuit of a semiconductor device in accordance with claim 1, wherein said first material is polysilicon and said second material is metal silicide.
Claim 4
Dependent Claim
31 words
A redundant circuit of a semiconductor device in accordance with claim 2, wherein said second material is selected from a group including molybdenum silicide, tungsten silicide, titanium silicide, and tantalum silicide.
Claim 5
Dependent Claim
20 words
A redundant circuit of a semiconductor device in accordance with claim 1, wherein said glass film is a PSG film.
Claim 6
Dependent Claim
36 words
A redundant circuit of a semiconductor device in accordance with claim 1, wherein said spaced apart first and second metal interconnection layers are connected to said fuse through a contact hole formed on siad glass film.
References Cited (Backward Citations)
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Cited
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Cited
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Cited
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Cited
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Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-31 | 1991-11-30 | 1992-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-31 | 1995-11-30 | 1996-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-31 | 1999-11-30 | 2000-05-31 | $7700.00 | Window Closed / Lapsed |