Patent US4747421A successfully refreshed from Google Patents.
US4747421A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for removing covering film
Assignee: Japan Science and Technology Agency
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Filing: 1986-07-02
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Granted: 1988-05-31
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Expires: 2006-07-02
Abstract
Abstract An apparatus for removing a photo-resist covering from a substrate employs fine solid CO 2 particles that are impacted on the substrate at high velocity to cause abrading of the photo-resist covering in the absence of damage or contamination of the substrate.
Inventors
- 👤 Chikara Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 07:36
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; B; B01; B01F; B01F23/00; B01F23/04; B01F23/042; B01F23/09; B01F23/10; B01F23/12; B01F23/30; B01F23/39
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
88 words
An apparatus for removing a photo resist covering film by blowing fine solid CO 2 particles against a covering film applied to a surface of a substrate, including a jet nozzle directly connected through a connecting pipe to a bomb containing liquefied carbonic acid gas and arranged to be directed toward a substrate having thereon a photo resist covering film to be removed, said jet nozzle providing for the conversion of said liquified carbonic acid gas into a high velocity stream of said fine solid CO 2 particles.
Claim 2
Independent Claim
88 words
An apparatus for removing a photo resist covering film by blowing fine solid CO 2 particles against a covering film applied to a surface of a substrate, including a jet nozzle directly connected through a connecting pipe to a bomb containing liquefied carbonic acid gas and arranged to be directed toward a substrate having thereon a photo resist covering film to be removed, said jet nozzle providing for the conversion of said liquified carbonic acid gas into a high velocity stream of said fine solid CO 2 particles.
Claim 3
Dependent Claim
72 words
An apparatus according to claim 1, wherein an air-tight sealed precooling chamber for forming solid CO 2 particles is provided, on a rear side wall of the sealed chamber, with a CO 2 gas-introducing pipe and an N 2 gas-introducing pipe, and is provided, on a front wall of the sealed chamber, with a jet nozzle extending into a vacuum treatment chamber containing a substrate with a covering film to be treated.
Claim 4
Dependent Claim
32 words
An apparatus as claimed in claim 2, wherein an N 2 gas-introducing pipe for accelerating the flow speed of CO 2 particles is connected to a side surface of the jet nozzle.
Claim 5
Dependent Claim
18 words
An apparatus as claimed in claim 2, wherein the treatment chamber is connected to a vacuum evacuation system.
Claim 6
Independent Claim
102 words
An apparatus for removing a photo resist covering film by blowing fine solid CO 2 particles mixed with fine ice particles against a covering film applied to a surface of a substrate, including a jet nozzle which is directly connected through a connecting pipe to a bomb containing liquefied carbonic acid gas and arranged to be directed toward a substrate having thereon a photo resist covering film to be removed, said jet nozzle providing for the conversion of said liquefied carbonic acid gas into a high velocity stream of said fine CO 2 particles for subsequent admixture with said fine ice particles.
Claim 7
Independent Claim
102 words
An apparatus for removing a photo resist covering film by blowing fine solid CO 2 particles mixed with fine ice particles against a covering film applied to a surface of a substrate, including a jet nozzle which is directly connected through a connecting pipe to a bomb containing liquefied carbonic acid gas and arranged to be directed toward a substrate having thereon a photo resist covering film to be removed, said jet nozzle providing for the conversion of said liquefied carbonic acid gas into a high velocity stream of said fine CO 2 particles for subsequent admixture with said fine ice particles.
Claim 8
Dependent Claim
69 words
An apparatus according to claim 5, wherein an air-tight sealed chamber for forming CO 2 particles is provided on a rear side wall of the sealed chamber, with a CO 2 gas-introducing pipe and an N 2 gas-introducing pipe, and is provided, on a front wall of the sealed chamber, with a jet nozzle extending into a treatment chamber containing a substrate with a covering film to be treated.
Claim 9
Dependent Claim
32 words
An apparatus as claimed in claim 6, wherein an N 2 gas-introducing pipe for accelerating the flow speed of CO 2 particles is connected to a side surface of the jet nozzle.
Claim 10
Dependent Claim
18 words
An apparatus as claimed in claim 6, wherein the treatment chamber is connected to a vacuum evacuation system.
References Cited (Backward Citations)
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US3545996A
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US3611639A
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US3676963A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-31 | 1991-11-30 | 1992-05-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-31 | 1995-11-30 | 1996-05-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-31 | 1999-11-30 | 2000-05-31 | $7700.00 | Window Closed / Lapsed |