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US4745447A Expired / Lapsed US ⏱️ 0.0 years remaining

Gallium arsenide on gallium indium arsenide Schottky barrier device

Assignee: Nokia Bell Labs
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Filing: 1985-06-14
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Granted: 1988-05-17
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Expires: 2005-06-14
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Abstract

Abstract Useful field effect transistors can be made with gallium indium arsenide as the electron conducting layer (channel layer) by incorporating a layer of gallium arsenide for the Schottky barrier. Relatively thick gallium arsenide layers are used to achieve low reverse leakage currents.

Inventors

  • 👤 Chung Y. Chen
  • 👤 Alfred Y. Cho
  • 👤 Sung-Nee G. Chu

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 00:53
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/85; H10D62/852; H10D30/00; H10D30/60; H10D30/67; H10D30/6729; H10D30/6737; H10D30/6738; H10D30/674; H10D30/675; H10D30/80; H10D30/801; H10D64/00; H10D64/60; H10D64/602; H10D64/64

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 71 words
A semiconductor device comprising at least one semiconductor element, said element comprising a. first epitaxial region comprising InP or III-V semiconductor compound approximately lattice-matched to InP, b. gate electrode, c. a second epitaxial region contacting both first epitaxial region and gate electrode, said second epitaxial region consisting essentially of gallium arsenide with thickness greater than 700 Å, and d. substrate comprising semi-insulating indium phosphide said substrate contacting said first epitaxial layer.
Claim 2
Dependent Claim 71 words
A semiconductor device comprising at least one semiconductor element, said element comprising a. first epitaxial region comprising InP or III-V semiconductor compound approximately lattice-matched to InP, b. gate electrode, c. a second epitaxial region contacting both first epitaxial region and gate electrode, said second epitaxial region consisting essentially of gallium arsenide with thickness greater than 700 Å, and d. substrate comprising semi-insulating indium phosphide said substrate contacting said first epitaxial layer.
Claim 3
Dependent Claim 16 words
The device of claim 1 in which the gallium arsenide thickness is greater than 800 Å.
Claim 4
Dependent Claim 17 words
The device of claim 2 in which the gallium arsenide thickness is between 1000 and 4000 Å.
Claim 5
Dependent Claim 15 words
The device of claim 3 in which the gallium arsenide thickness is approximately 1300 Å.
Claim 6
Dependent Claim 41 words
The device of claim 1 in which the semiconductor element is part of a field effect transistor comprising source electrode and drain electrode contacting either the first or second epitaxial region and the first and second epitaxial region exhibits n-type conductivity.
Claim 7
Dependent Claim 41 words
The device of claim 5 in which the first epitaxial region consists of at least one III-V semiconducting compound selected from the group consisting of InP, In 0 .53 Ga 0 .47 As and In 0 .52 Al 0 .48 As.
Claim 8
Dependent Claim 21 words
The device of claim 6 in which the first epitaxial region consists of n-type In 0 .53 Ga 0 .47 As.
Claim 9
Dependent Claim 18 words
The device of claim 7 in which the source electrode and drain electrode contacts the second epitaxial region.
Claim 10
Dependent Claim 13 words
The device of claim 1 in which the device includes a semiconductor laser.
Claim 11
Dependent Claim 12 words
The device of claim 1 in which the device includes a photodetector.

References Cited (Backward Citations)

US3218205A Cited
US4173764A Cited
US4455564A Cited
US4360246A Cited
JPS58147166A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-05-17 1991-11-16 1992-05-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-05-17 1995-11-16 1996-05-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-05-17 1999-11-16 2000-05-17 $7700.00 Window Closed / Lapsed

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