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Magnetostatic wave tunable resonator

Assignee: Hitachi Ltd
•
Filing: 1987-04-17
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Granted: 1988-05-10
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Expires: 2007-04-17
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Abstract

Abstract A magnetostatic wave tunable resonator which has fine stripe electrodes and bonding electrode films formed on the surface of a YIG thin film supported by a GGG substrate. The stripe electrodes, bonding electrode films and edges of the YIG film are formed by a chemical etching method based on photolithography. The resonator so formed has suppressed spurious resonance of high order modes and enables the use of a magnet of greatly reduced size.

Inventors

  • 👤 Yasuaki Kinoshita
  • 👤 Satoshi Sugawara

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 22:13
CPC Classifications
H; H03; H03H; H03H2/00; H03H2/001

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 111 words
A magnetostatic wave tunable resonator comprising: a conductive plane; a GGG (gadolinium/gallium/garnet) single crystalline substrate mounted on said conductive plane; a YIG (yttrium/iron/garnet) single crystalline film formed on said GGG substrate; bonding electrode films formed on said YIG film; a plurality of fine stripe electrodes formed on said YIG film, and connected to said bonding electrode films, wherein said stripe electrodes and said bonding electrode films are formed by a chemical etching method based on photolithography; whereby magnetostatic waves excited in said YIG film propagate therethrough, are reflected by straight edges of said YIG film, and are resonated, and wherein an applied magnetic field is changed to vary a resonance frequency.
Claim 2
Dependent Claim 111 words
A magnetostatic wave tunable resonator comprising: a conductive plane; a GGG (gadolinium/gallium/garnet) single crystalline substrate mounted on said conductive plane; a YIG (yttrium/iron/garnet) single crystalline film formed on said GGG substrate; bonding electrode films formed on said YIG film; a plurality of fine stripe electrodes formed on said YIG film, and connected to said bonding electrode films, wherein said stripe electrodes and said bonding electrode films are formed by a chemical etching method based on photolithography; whereby magnetostatic waves excited in said YIG film propagate therethrough, are reflected by straight edges of said YIG film, and are resonated, and wherein an applied magnetic field is changed to vary a resonance frequency.
Claim 3
Dependent Claim 33 words
A magnetostatic wave tunable resonator according to claim 1, wherein said stripe electrodes are symmetrically arranged with respect to a center line of the YIG film in the direction of the stripe electrodes.
Claim 4
Dependent Claim 33 words
A magnetostatic wave tunable resonator according to claim 1, wherein the distance between adjacent stripe electrodes is twice the distance between the outermost stripe electrodes and said straight edges of said YIG film.
Claim 5
Dependent Claim 26 words
A magnetostatic wave tunable resonator according to claim 1, wherein said stripe electrodes serve as input terminals to excite said magnetostatic waves in said YIG film.

References Cited (Backward Citations)

US4199737A Cited
US4528529A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-05-10 1991-11-09 1992-05-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-05-10 1995-11-09 1996-05-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-05-10 1999-11-09 2000-05-10 $7700.00 Window Closed / Lapsed

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