Patent US4193098A successfully refreshed from Google Patents.
Patent US4741926A successfully refreshed from Google Patents.
US4741926A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spin-coating procedure
Assignee: Intersil Corp
•
Filing: 1985-10-29
•
Granted: 1988-05-03
•
Expires: 2005-10-29
Abstract
Abstract Nonuniform topographical features on a substrate are effectively coated for lithographic processing by spin-coating with a suitable resin material in a dual spin cycle. The coating material is initially spin-coated onto the substrate at not less than 4000 rpm, preferably from 6000 to 8000 rpm, until build-up of the coating is detectable on a side wall of a topographical feature facing the centrifugal center of the spinning substrate. The spin speed is immediately reduced to less than 4000 rpm, preferably from about 1000 to 3500 rpm, and spinning is continued for a time sufficient to dry the coating. The subject process is particularly suitable for coating a substrate having nonuniform topographical features with a planarizing material.
Inventors
- 👤 Lawrence K. White
- 👤 Nancy A. Miszkowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/162; B; B05; B05D; B05D1/00; B05D1/002; B05D1/005
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
108 words
In a process of coating a substrate having nonuniform topographical features comprising dispensing a composition comprising a suitable resin and a solvent onto the substrate thus forming a coating and spinning the substrate to dry the coating, the improvement wherein the substrate is spun to dry the coating in two stages consisting of initially spinning at not less than about 4000 rpm until a detectable build-up of the coating material occurs on a side wall of a topographical feature facing the centrifugal center of the spinning substrate and thereafter spinning the substrate at less than about 4000 rpm for a period of time sufficient to dry the coating.
Claim 2
Dependent Claim
108 words
In a process of coating a substrate having nonuniform topographical features comprising dispensing a composition comprising a suitable resin and a solvent onto the substrate thus forming a coating and spinning the substrate to dry the coating, the improvement wherein the substrate is spun to dry the coating in two stages consisting of initially spinning at not less than about 4000 rpm until a detectable build-up of the coating material occurs on a side wall of a topographical feature facing the centrifugal center of the spinning substrate and thereafter spinning the substrate at less than about 4000 rpm for a period of time sufficient to dry the coating.
Claim 3
Dependent Claim
22 words
A process in accordance with claim 1, wherein the substrate is initially spun at from about 6000 rpm to about 8000 rpm.
Claim 4
Dependent Claim
21 words
A process in accordance with claim 1, wherein the substrate is initially spun for from about 2 to about 8 seconds.
Claim 5
Dependent Claim
23 words
A process in accordance with claim 1, wherein the speed of the substrate is reduced to from about 1000 to about 3500 rpm.
Claim 6
Dependent Claim
20 words
A process in accordance with claim 1, wherein the total time of both spin coating steps is about 30 seconds.
Claim 7
Dependent Claim
32 words
A process in accordance with claim 5, wherein the substrate is initially spun at about 6000 rpm for from about 2 to about 4 seconds and then spun at about 2000 rpm.
References Cited (Backward Citations)
US3795534A
Cited
US4281057A
Cited
US4280689A
Cited
US4385083A
Cited
JPS5750573A
Cited
US4451507A
Cited
US4510176A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-05-03 | 1991-11-02 | 1992-05-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-05-03 | 1995-11-02 | 1996-05-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-05-03 | 1999-11-02 | 2000-05-03 | $7700.00 | Window Closed / Lapsed |