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US4741044A
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Process for fault detection on defined structures
Assignee: Telefunken Electronic GmbH
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Filing: 1985-07-25
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Granted: 1988-04-26
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Expires: 2005-07-25
Abstract
Abstract The invention relates to a process for fault detection on structures on surfaces of electrical components or the auxiliary means required to manufacture these components, wherein the actual structure provided in each respective case is scanned with a test beam. In accordance with the invention, provision is made for structure faults or structure deviations to be directly ascertained from sequences of picture points within the scope of an ordinate scanning.
Inventors
- 👤 Horst Polomsky
- 👤 Rolf Jager
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 10:52
CPC Classifications
G; G06; G06T; G06T7/00; G06T7/0002; G06T7/0004; G06T7/0006; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/956; G06T2207/00; G06T2207/30; G06T2207/30108; G06T2207/30141
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
198 words
Process for fault detection on defined structures on surfaces of electrical components or the auxiliary means required to manufacture these components, comprising scanning the actual structure with a test beam which traces a succession of scanning lines to produce successive picture elements associated with each scanning line, and directly determining structural faults or structural deviations from the sequences of picture elements, wherein said step of directly determining comprises: continuously writing representations of successive picture elements into a shift register capable of storing only a selected number of picture elements; providing fixed representations of a number of successive picture elements in a comparison register; logically processing selected representations in the shift register for detecting structural edges or structural transitions present in the actual structure; comparing, upon each such detection, the contents of the shift register and the comparison register contents to determine the number of coincidences between those; indicating the presence or absence of a structural fault or structural deviation as a function of the number of coincidences between the representations contained in the shift register and comparison register; and storing only representations of indicated structural faults or structural deviations in the form of data or of reproducible images.
Claim 2
Dependent Claim
198 words
Process for fault detection on defined structures on surfaces of electrical components or the auxiliary means required to manufacture these components, comprising scanning the actual structure with a test beam which traces a succession of scanning lines to produce successive picture elements associated with each scanning line, and directly determining structural faults or structural deviations from the sequences of picture elements, wherein said step of directly determining comprises: continuously writing representations of successive picture elements into a shift register capable of storing only a selected number of picture elements; providing fixed representations of a number of successive picture elements in a comparison register; logically processing selected representations in the shift register for detecting structural edges or structural transitions present in the actual structure; comparing, upon each such detection, the contents of the shift register and the comparison register contents to determine the number of coincidences between those; indicating the presence or absence of a structural fault or structural deviation as a function of the number of coincidences between the representations contained in the shift register and comparison register; and storing only representations of indicated structural faults or structural deviations in the form of data or of reproducible images.
Claim 3
Dependent Claim
31 words
Process according to claim 1, wherein the structures are scanned with a laser beam, electron beam or light beam, to produce a scanning signal which is decomposed into the picture elements.
Claim 4
Dependent Claim
17 words
Process according to claim 1, wherein the scanning is carried out in transmitted light or incident light.
Claim 5
Dependent Claim
35 words
Process according to claim 2, wherein said step of scanning is carried out with a video system for producing a scanning signal which is subjected to color decomposition for selective recognition of materials and/or colors.
Claim 6
Dependent Claim
17 words
Process according to claim 4, wherein fluorescence effects or color filters are used for selective recognition processes.
Claim 7
Dependent Claim
23 words
Process according to claim 1, wherein the structures are scanned axially parallel to the edge surfaces of the components or the auxiliary means.
Claim 8
Dependent Claim
57 words
Process according to claim 1, wherein a defined and limited number of successive picture elements is detected during said step of determining, and wherein means are provided to subject at a structure transition or a structure edge the previously detected picture element representation to an evaluation from which any existing structure faults or structure deviations become apparent.
Claim 9
Dependent Claim
35 words
Process according to claim 7, wherein different evaluating means or evaluating units whose association with the picture elements detected in each respective case is synchronized with the scanning procedure, are provided for a structure scanning.
Claim 10
Dependent Claim
28 words
Process according to claim 7, wherein the number of picture elements detected and subjected to an evaluation corresponds to the desired width or desired length of a structure.
Claim 11
Dependent Claim
66 words
Process according to claim 1, wherein the shift register contents are compared in a correlator with the comparison register contents, and said step of indicating includes comparing the number of coincidences with a preset comparison number, and in the event that the latter is not reached, a signal is provided such that at the structure edge of the structure transition, a structure fault indication is produced.
Claim 12
Dependent Claim
37 words
Process according to claim 10, wherein the number of coincidences in the correlator is converted in acoder (C) into a binary number which is fed to a binary comparator (BV 1 ) containing the preset comparison number.
Claim 13
Dependent Claim
48 words
Process according to claim 1, wherein upon registration of a structure fault at a structure edge or a structure transition, a secondary signal (B) is generated and, in the case of progressive structure scanning, is not terminated until the number of coincidences falls short of a preset value.
Claim 14
Dependent Claim
39 words
Process according to claim 12, wherein the secondary signal (B) is generated by setting a flip-flop (FF 1 ) which is set back again to terminate the signal when there is a drop below the preset number of coincidences.
Claim 15
Dependent Claim
26 words
Process according to claim 12, wherein the secondary signal (B) is terminated when the number of coincidences between shift register and comparison register contents is zero.
Claim 16
Dependent Claim
79 words
Process according to claim 8, wherein to indicate the extent of a missing structure upon occurrence of a structure edge or a structure transition, the number of coincidences is subtracted from a desired value of the number of coincidences, and wherein a counter (Z1) is preset with the resulting binary number and triggers a secondary signal (B) which terminates when the counter (Z1) with the picture element frequency has counted down from the preset number to the value zero.
Claim 17
Dependent Claim
34 words
Process according to claim 15, wherein upon appearance of the preset number, the counter (Z1) sets a flip-flop (FF 1 ) which is set back by the counter when the value zero is reached.
Claim 18
Dependent Claim
37 words
Process according to claim 15, wherein an adder (AD) to which the correlator output signals are fed in inverted form, is used for subtracting the number of coincidences from the desired value of the number of coincidences.
Claim 19
Dependent Claim
29 words
Process according to claim 8, wherein the structures are scanned horizontally and vertically and evaluations of picture element sequences of defined length are carried out in each respective case.
Claim 20
Dependent Claim
45 words
Process according to claim 8, wherein structure edges or structure transitions are defined by color changes of the scanned picture elements, and wherein means are provided to carry out evaluations of the shift register contents in the event of color transitions of both possible kinds.
Claim 21
Dependent Claim
28 words
Process according to claim 1, wherein means (EN) are provided by which certain picture elements in the shift register are not taken into consideration in said indicating step.
Claim 22
Dependent Claim
54 words
Process according to claim 20, wherein said step of comparing is carried out in a correlator having gate circuits which effect the comparison between register contents and which may be externally forcibly set, so that picture elements which are read out via forcibly set gates are not taken into consideration in said comparing step.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-26 | 1991-10-26 | 1992-04-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-26 | 1995-10-26 | 1996-04-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-26 | 1999-10-26 | 2000-04-26 | $7700.00 | Window Closed / Lapsed |