US4740268A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Magnetically enhanced plasma system
Assignee: Motorola Solutions Inc
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Filing: 1987-05-04
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Granted: 1988-04-26
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Expires: 2007-05-04
Abstract
Abstract A magnetically enhanced plasma etch reactor utilizing electromagnets for rotation and translational scans of a linear magnetic field in a reaction chamber to produce a dense and uniform plasma for the etch of a workpiece.
Inventors
- 👤 Yefim Bukhman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:30
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; H01J37/3266
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
54 words
A magnetically enhanced plasma reactor comprising: a reaction chamber; a plurality of electromagnets located outside said reaction chamber and forming a linear magnetic field inside said reaction chamber; and means for applying a current to said plurality of electromagnets and controlling the current, for movement of said linear magnetic field within said reaction chamber.
Claim 2
Dependent Claim
54 words
A magnetically enhanced plasma reactor comprising: a reaction chamber; a plurality of electromagnets located outside said reaction chamber and forming a linear magnetic field inside said reaction chamber; and means for applying a current to said plurality of electromagnets and controlling the current, for movement of said linear magnetic field within said reaction chamber.
Claim 3
Dependent Claim
34 words
The magnetically enhanced plasma reactor as claimed in claim 1 wherein said means for applying a current includes means for changing the current to said plurality of electromagnets for controlling a magnetic field intensity.
Claim 4
Dependent Claim
102 words
A magnetically enhanced plasma reactor comprising: a reaction chamber; a plurality of paired electrically conductive coils, wherein each coil in each pair of said plurality of paired electrically conductive coils acts as an opposite magnetic pole; a power source energizing each pair of said plurality of paired electrically conductive coils in a consecutive sequence thereby electrically moving a linear magnetic field; and each coil of each pair of said plurality of paired electrically conductive coils being placed so that said linear magnetic field between each coil of a pair of said plurality of paired electrically conductive coils passes through the reaction chamber.
Claim 5
Dependent Claim
102 words
A magnetically enhanced plasma reactor comprising: a reaction chamber; a plurality of paired electrically conductive coils, wherein each coil in each pair of said plurality of paired electrically conductive coils acts as an opposite magnetic pole; a power source energizing each pair of said plurality of paired electrically conductive coils in a consecutive sequence thereby electrically moving a linear magnetic field; and each coil of each pair of said plurality of paired electrically conductive coils being placed so that said linear magnetic field between each coil of a pair of said plurality of paired electrically conductive coils passes through the reaction chamber.
Claim 6
Dependent Claim
24 words
The magnetically enhanced plasma reactor as claimed in claim 3 wherein each pair of said plurality of paired electrically conductive coils is oppositely wound.
Claim 7
Dependent Claim
21 words
The magnetically enhanced plasma reactor as claimed in claim 3 wherein the moving linear magnetic field rotates inside the reaction chamber.
Claim 8
Independent Claim
51 words
A method employing magnetically enhanced plasma for processing a workpiece comprising the steps of: providing a reaction chamber; providing a plurality of paired coils outside said reaction chamber; placing said workpiece in said reaction chamber; and creating a moving linear magnetic field by energizing said paired coils in a consecutive sequence.
Claim 9
Independent Claim
51 words
A method employing magnetically enhanced plasma for processing a workpiece comprising the steps of: providing a reaction chamber; providing a plurality of paired coils outside said reaction chamber; placing said workpiece in said reaction chamber; and creating a moving linear magnetic field by energizing said paired coils in a consecutive sequence.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-26 | 1991-10-26 | 1992-04-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-26 | 1995-10-26 | 1996-04-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-26 | 1999-10-26 | 2000-04-26 | $7700.00 | Window Closed / Lapsed |