Patent US4739545A successfully refreshed from Google Patents.
US4739545A
Expired / Lapsed
US
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Composite movement table apparatus
Assignee: NSK Ltd
•
Filing: 1987-02-26
•
Granted: 1988-04-26
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Expires: 2007-02-26
Abstract
Abstract By operating a Z direction position adjustment mechanism by a driving motor, a Z table movable in the X and Y directions can be moved in a Z direction while maintaining its horizontal condition. Vibrations caused in the Z table when the Z table is moved at a high speed in the X and Y directions are damped by vibration damping means provided between the Z table and a base bed fixed to a coarse adjustment table which is mounted on a base and driven in the X and Y directions. Improvement in the accuracy of positioning in the X and Y directions is achieved, as well as a vibration damping effect. A chuck holding member is formed on the table to hold a chuck by suction which in turn holds a mounted member by suction, thereby making the exchange of the chuck easy and preserving the parallelism of the upper surface of the chuck.
Inventors
- 👤 Hideaki Oyanagi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 03:08
CPC Classifications
B; B23; B23Q; B23Q11/00; B23Q11/0032; B23Q1/00; B23Q1/25; B23Q1/26; B23Q1/34; B23Q1/36; B23Q1/44; B23Q1/56; B23Q1/60; B23Q1/62; B23Q1/621; B23Q1/626; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/51; Y10T29/5178; Y10T409/00; Y10T409/30; Y10T409/30868; Y10T409/309128
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
160 words
A composite movement table apparatus capable of moving at least in a Z axis direction, comprising: a coarse adjustment table mounted on a base and driven in an X axis and a Y axis direction; a base bed mounted on said coarse adjustment table; a Z table movable in the X axis and Y axis directions as well as in the Z axis direction; a Z direction position adjusting mechanism fixed to said base bed for adjusting the position of said Z table in the Z axis direction relative to said base bed, said Z direction position adjusting mechanism supporting said Z table; vibration damping means provided between said Z table and said base bed for damping vibrations caused in said Z table during movement thereof in the X axis and Y axis directions; and a driving mechanism for actuating the Z direction position adjusting mechanism in the Z axis direction including a driving motor fixed to said base bed.
Claim 2
Dependent Claim
160 words
A composite movement table apparatus capable of moving at least in a Z axis direction, comprising: a coarse adjustment table mounted on a base and driven in an X axis and a Y axis direction; a base bed mounted on said coarse adjustment table; a Z table movable in the X axis and Y axis directions as well as in the Z axis direction; a Z direction position adjusting mechanism fixed to said base bed for adjusting the position of said Z table in the Z axis direction relative to said base bed, said Z direction position adjusting mechanism supporting said Z table; vibration damping means provided between said Z table and said base bed for damping vibrations caused in said Z table during movement thereof in the X axis and Y axis directions; and a driving mechanism for actuating the Z direction position adjusting mechanism in the Z axis direction including a driving motor fixed to said base bed.
Claim 3
Dependent Claim
59 words
The apparatus of claim 1 wherein said Z direction position adjusting mechanism includes a slant guide section formed on said base bed, an oblique slider movable by being guided by said slant guide section and having a horizontal upper surface, and a driving mechanism for driving said oblique slider to advance and to retract along said slant guide section.
Claim 4
Dependent Claim
49 words
The apparatus of claim 2 wherein said slant guide section includes a cross roller guide, and said driving mechanism is provided with a screw type feeding device including a screw shaft having an axis parallel to said slant guide section and being driven into rotation by the driving motor.
Claim 5
Dependent Claim
44 words
An apparatus according to claim 1 wherein said Z table is mounted on said Z direction position adjusting mechanism by means of a rolling element with retainer so that said Z table is movable horizontally with respect to said Z direction position adjusting mechanism.
Claim 6
Dependent Claim
125 words
The apparatus of claim 1 wherein said Z table is resiliently coupled with a fine adjustment XY movement table supported by the base bed, and said vibration damping means includes a vibration damping section having a vibration damping surface parallel to a movement surface formed on said XY movement table, a receiving surface formed on said base bed and opposed to and in close proximity to said vibration damping section, and a viscous fluid interposed between said receiving surface and said opposed vibration damping surface, said viscous fluid filling a space between said receiving surface and said vibration damping surface with a depth of said viscous fluid equal to or less than the space therebetween, thereby providing a damping effect to said vibration damping surface.
Claim 7
Dependent Claim
27 words
The apparatus of claim 5 wherein said vibration damping surface and said receiving surface are formed at each of both side portions of said XY movement table.
Claim 8
Dependent Claim
17 words
The apparatus of claim 5 wherein said viscous fluid is a silicone oil having a high viscosity.
Claim 9
Dependent Claim
35 words
The apparatus of claim 5 wherein a leaf spring is provided between said Z table and said XY movement table to urge said Z table in the X axis direction towards said oblique surface slider.
Claim 10
Dependent Claim
65 words
The apparatus of claim 1 wherein a chuck holding member is disposed on said Z table, a suction chuck for holding an exposed member of an exposure device is removably held on said chuck holding member, a recess forming a tightly enclosed space is formed at an abutting portion between said chuck and said chuck holding member, and said recess communicates with gas suction means.
Claim 11
Dependent Claim
17 words
The apparatus of claim 6 wherein said viscous fluid is a silicone oil having a high viscosity.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-26 | 1991-10-26 | 1992-04-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-26 | 1995-10-26 | 1996-04-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-26 | 1999-10-26 | 2000-04-26 | $7700.00 | Window Closed / Lapsed |