US4736304A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for operating one or more deposition systems
Assignee: Energy Conversion Devices Inc
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Filing: 1986-04-07
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Granted: 1988-04-05
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Expires: 2006-04-07
Abstract
Abstract There are disclosed a method and apparatus for improved operation of one or more deposition systems. A minimum expenditure malfunction recovery system provides for a variable recovery related to the current hardware and actual states of the system. A simplified input and output (I/O) device is provided to control the data flow in the system without addressing and decoding complexity. A flexible operation system is also provided for a plurality of deposition systems whose operation easily can be varied without reprogramming of the operating sequence.
Inventors
- 👤 Joachim Doehler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:05
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/52; G; G05; G05B; G05B19/00; G05B19/02; G05B19/04; G05B19/042; G05B19/0423; G05B19/0428; G05B2219/00; G05B2219/20; G05B2219/24; G05B2219/24115; G05B2219/24199
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
104 words
A method of providing a flexible multiple deposition operating system, said method comprising: providing at least two deposition system programs; providing a plurality of service system programs, each said service system program adapted to carry out at least one fabrication task of the deposition system program; providing a separate recipe file program, said recipe file program adapted to coordinate interaction between said deposition and service system programs; providing a control program which coordinates the interaction between the recipe file program and the deposition and service system program; and revising only said recipe file program to effect changes in said deposition and service system programs.
Claim 2
Independent Claim
104 words
A method of providing a flexible multiple deposition operating system, said method comprising: providing at least two deposition system programs; providing a plurality of service system programs, each said service system program adapted to carry out at least one fabrication task of the deposition system program; providing a separate recipe file program, said recipe file program adapted to coordinate interaction between said deposition and service system programs; providing a control program which coordinates the interaction between the recipe file program and the deposition and service system program; and revising only said recipe file program to effect changes in said deposition and service system programs.
Claim 3
Dependent Claim
18 words
The method as defined in claim 1 including operating said two deposition systems entirely separately from one another.
Claim 4
Dependent Claim
45 words
The method as defined in claim 1 including independently controlling each of said deposition system programs and said service system programs by individual, respective operation programs, adapted to operate said system programs in a manner consistant with the deposition parameters of the recipe file program.
Claim 5
Dependent Claim
22 words
The method as definad in claim 1 including providing a priority for service system operations to maximize the system efficiency and flexibility.
Claim 6
Independent Claim
107 words
An apparatus for providing a flexible, multiple deposition operating system, said apparatus comprising: at least two deposition system programs; said deposition system programs including a plurality of service system programs, each said service system programs adapted to carry out at least one fabrication task; each of said deposition and service system programs including a separate recipe file program adapted to coordinate interaction between said deposition and service system programs; control program means adapted to coordinate interaction between the recipe file program and the deposition and service system programs; and means for revising only said recipe file programs to effect changes in said deposition and service system programs.
Claim 7
Independent Claim
107 words
An apparatus for providing a flexible, multiple deposition operating system, said apparatus comprising: at least two deposition system programs; said deposition system programs including a plurality of service system programs, each said service system programs adapted to carry out at least one fabrication task; each of said deposition and service system programs including a separate recipe file program adapted to coordinate interaction between said deposition and service system programs; control program means adapted to coordinate interaction between the recipe file program and the deposition and service system programs; and means for revising only said recipe file programs to effect changes in said deposition and service system programs.
Claim 8
Dependent Claim
20 words
The apparatus as defined in claim 5 including means for operating said two deposition systems entirely separately from one another.
Claim 9
Dependent Claim
47 words
The apparatus as defined in claim 5 including means for independently controlling each of said deposition system programs and said service system programs by individual, respective operation programs adapted to operate said system programs in a manner consistent with the deposition parameters of the recipe file program.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-05 | 1991-10-05 | 1992-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-05 | 1995-10-05 | 1996-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-05 | 1999-10-05 | 2000-04-05 | $7700.00 | Window Closed / Lapsed |