Patent US4735820A successfully refreshed from Google Patents.
US4735820A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Removal of residual catalyst from a dielectric substrate
Assignee: International Business Machines Corp
•
Filing: 1987-05-18
•
Granted: 1988-04-05
•
Expires: 2007-05-18
Abstract
Abstract Residual catalyst is removed from a dielectric substrate by exposing the substrate to a plasma formed from an inert gas.
Inventors
- 👤 Peter A. Agostino
- 👤 Suryadevara V. Babu
- 👤 Joseph G. Hoffarth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 17:38
CPC Classifications
C; C08; C08J; C08J7/00; C08J7/12; C08J7/123; C04; C04B; C04B41/00; C04B41/53; C04B41/5338; C04B41/5346; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/427; H; H05; H05K; H05K3/00; H05K3/22; H05K3/26; H05K2201/00; H05K2201/07; H05K2201/0753; H05K2201/0761; H05K2203/00; H05K2203/09; H05K2203/095; H05K3/10; H05K3/108; H05K3/18; H05K3/181; H05K3/182; H05K3/184
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
25 words
A process for the removal of residual catalyst from a dielectric substrate which comprises exposing said substrate to a plasma formed from an inert gas.
Claim 2
Dependent Claim
25 words
A process for the removal of residual catalyst from a dielectric substrate which comprises exposing said substrate to a plasma formed from an inert gas.
Claim 3
Dependent Claim
20 words
The process of claim 1 wherein said inert gas is selected from the group of argon, krypton, and mixtures thereof.
Claim 4
Dependent Claim
11 words
The process of claim 1 wherein said inert gas includes argon.
Claim 5
Dependent Claim
10 words
The process of claim 1 wherein said catalyst includes palladium/tin.
Claim 6
Dependent Claim
12 words
The process of claim 4 wherein said substrate is an epoxy substrate.
Claim 7
Dependent Claim
12 words
The process of claim 1 wherein said substrate is an epoxy substrate.
Claim 8
Dependent Claim
13 words
The process of claim 1 wherein said substrate includes metal circuit lines thereon.
Claim 9
Dependent Claim
10 words
The process of claim 7 wherein said metal is copper.
Claim 10
Dependent Claim
18 words
The process of claim 1 wherein said substrate is an epoxy substrate that includes metal circuit lines thereon.
Claim 11
Dependent Claim
10 words
The process of claim 9 wherein said metal is copper.
Claim 12
Dependent Claim
10 words
The process of claim 9 wherein said catalyst is palladium/tin.
Claim 13
Dependent Claim
11 words
The process of claim 11 wherein said inert gas includes argon.
References Cited (Backward Citations)
US4214966A
Cited
US4357369A
Cited
US4585668A
Cited
US4545851A
Cited
US4610910A
Cited
US4568562A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-05 | 1991-10-05 | 1992-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-05 | 1995-10-05 | 1996-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-05 | 1999-10-05 | 2000-04-05 | $7700.00 | Window Closed / Lapsed |