US4735820A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Removal of residual catalyst from a dielectric substrate
Assignee: International Business Machines Corp
•
Filing: 1987-05-18
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Granted: 1988-04-05
•
Expires: 2007-05-18
Abstract
Abstract Residual catalyst is removed from a dielectric substrate by exposing the substrate to a plasma formed from an inert gas.
Inventors
- 👤 Peter A. Agostino
- 👤 Suryadevara V. Babu
- 👤 Joseph G. Hoffarth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 01:39
CPC Classifications
C; C08; C08J; C08J7/00; C08J7/12; C08J7/123; C04; C04B; C04B41/00; C04B41/53; C04B41/5338; C04B41/5346; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/427; H; H05; H05K; H05K3/00; H05K3/22; H05K3/26; H05K2201/00; H05K2201/07; H05K2201/0753; H05K2201/0761; H05K2203/00; H05K2203/09; H05K2203/095; H05K3/10; H05K3/108; H05K3/18; H05K3/181; H05K3/182; H05K3/184
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
25 words
A process for the removal of residual catalyst from a dielectric substrate which comprises exposing said substrate to a plasma formed from an inert gas.
Claim 2
Dependent Claim
25 words
A process for the removal of residual catalyst from a dielectric substrate which comprises exposing said substrate to a plasma formed from an inert gas.
Claim 3
Dependent Claim
20 words
The process of claim 1 wherein said inert gas is selected from the group of argon, krypton, and mixtures thereof.
Claim 4
Dependent Claim
11 words
The process of claim 1 wherein said inert gas includes argon.
Claim 5
Dependent Claim
10 words
The process of claim 1 wherein said catalyst includes palladium/tin.
Claim 6
Dependent Claim
12 words
The process of claim 4 wherein said substrate is an epoxy substrate.
Claim 7
Dependent Claim
12 words
The process of claim 1 wherein said substrate is an epoxy substrate.
Claim 8
Dependent Claim
13 words
The process of claim 1 wherein said substrate includes metal circuit lines thereon.
Claim 9
Dependent Claim
10 words
The process of claim 7 wherein said metal is copper.
Claim 10
Dependent Claim
18 words
The process of claim 1 wherein said substrate is an epoxy substrate that includes metal circuit lines thereon.
Claim 11
Dependent Claim
10 words
The process of claim 9 wherein said metal is copper.
Claim 12
Dependent Claim
10 words
The process of claim 9 wherein said catalyst is palladium/tin.
Claim 13
Dependent Claim
11 words
The process of claim 11 wherein said inert gas includes argon.
References Cited (Backward Citations)
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Cited
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US4585668A
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US4545851A
Cited
US4610910A
Cited
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Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-04-05 | 1991-10-05 | 1992-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-04-05 | 1995-10-05 | 1996-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-04-05 | 1999-10-05 | 2000-04-05 | $7700.00 | Window Closed / Lapsed |