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US4734829A Expired / Lapsed US ⏱️ 0.0 years remaining

Short arc lamp image transformer

Assignee: ASML Holding NV
•
Filing: 1985-11-12
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Granted: 1988-03-29
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Expires: 2005-11-12
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Abstract

Abstract A light transformer for converting light from a short arc lamp into an arcuate shape of uniform intensity. Mirror means associated with the short arc lamp projects light from the short arc lamp as a plurality of separate images conforming to the desired arcuate shape onto a plurality of reflecting facets also formed in the desired arcuate shape. Light pipe means formed in the desired arcuate shape is disposed at one end to receive light images via the facets and to emit light at the other end in the desired arcuate shape.

Inventors

  • 👤 Frederick Y. Wu
  • 👤 David A. Markle

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 09:07
CPC Classifications
G; G02; G02F; G02F7/00; G02B; G02B27/00; G02B27/09; G02B27/0927; G02B19/00; G02B19/0004; G02B19/0019; G02B19/0023; G02B19/0033; G02B19/0047; G02B27/0938; G02B27/0994; G02B6/00; G02B6/0001; G02B6/0005; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70216; G03F7/70233; G03F7/70358

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 117 words
A light transformer, comprising: a point source of light; mirror means associated with said point source of light for projecting said light as a plurality of separate images conforming as a group to a desired shape; a like plurality of reflecting facets formed as a group to said desired shape, each of said facets disposed to receive respective ones of said images and oriented to reflect said images such that the chief ray of each image is parallel to the chief rays of adjacent images; light pipe means formed in said desired shape for receiving at one end said images whereby light emitted at the other end of said light pipe means conforms to said desired shape.
Claim 2
Dependent Claim 117 words
A light transformer, comprising: a point source of light; mirror means associated with said point source of light for projecting said light as a plurality of separate images conforming as a group to a desired shape; a like plurality of reflecting facets formed as a group to said desired shape, each of said facets disposed to receive respective ones of said images and oriented to reflect said images such that the chief ray of each image is parallel to the chief rays of adjacent images; light pipe means formed in said desired shape for receiving at one end said images whereby light emitted at the other end of said light pipe means conforms to said desired shape.
Claim 3
Dependent Claim 13 words
A light transformer according to claim 1 wherein: said facets are externally reflecting.
Claim 4
Dependent Claim 29 words
A light transformer according to claim 2 further including: spherical mirror means for reflecting said images reflected from said facets onto said one end of said light pipe means.
Claim 5
Dependent Claim 50 words
A light transformer according to claim 3 wherein said mirror means comprises: an ellipsoidal mirror having said point source of light disposed at the inner focus, said ellipsoidal mirror comprising a like plurality of segments oriented to reflect said images as a group in said desired shape onto said facets.
Claim 6
Dependent Claim 49 words
A light transformer according to claim 3 wherein said mirror means comprises: an ellipsoidal mirror having said point source of light disposed at the inner focus; a like plurality of mirror flats disposed and oriented to reflect said images as a group in said desired shape onto said facets.
Claim 7
Dependent Claim 13 words
A light transformer according to claim 4 wherein said desired shape is arcuate.
Claim 8
Dependent Claim 13 words
A light transformer according to claim 5 wherein said desired shape is arcuate.
Claim 9
Dependent Claim 25 words
A light transformer according to claim 1 wherein: said facets are internally reflecting and are formed at said one end of said light pipe means.
Claim 10
Dependent Claim 50 words
A light transformer according to claim 8 wherein said mirror means comprises: an ellipsoidal mirror having said point source of light disposed at the inner focus; said ellipsoidal mirror comprising a like plurality of segments oriented to reflect said images as a group in said desired shape onto said facets.
Claim 11
Dependent Claim 45 words
A light transformer according to claim 8 wherein said mirror means comprises: an ellipsoidal mirror having said point source of light disposed at the inner focus; a like plurality of mirror flats disposed and oriented to reflect said images as a group onto said facets.
Claim 12
Dependent Claim 18 words
A light transformer according to claim 9 wherein said point source of light is a short arc lamp.
Claim 13
Dependent Claim 18 words
A light transformer according to claim 10 wherein said point source of light is a short arc lamp.
Claim 14
Dependent Claim 13 words
A light transformer according to claim 11 wherein said desired shape is arcuate.
Claim 15
Dependent Claim 13 words
A light transformer according to claim 12 wherein said desired shape is arcuate.
Claim 16
Dependent Claim 28 words
A light transformer according to claim 7 further including fiber bundle of circular optical fibers disposed between said facets and said one end of said light pipe means.
Claim 17
Dependent Claim 27 words
A light transformer according to claim 15 wherein one end of said fiber bundle is in close proximity to said one end of said light pipe means.
Claim 18
Dependent Claim 25 words
A light transformer according to claim 16 wherein one end of said fiber bundle is cemented to said one end of said light pipe means.
Claim 19
Dependent Claim 25 words
A light transformer according to claim 17 wherein the shape of said fiber bundle is arcuate to match the shape of said light pipe means.

References Cited (Backward Citations)

US3455622A Cited
US3772506A Cited
US4389701A Cited
US4523257A Cited
US4561043A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-03-29 1991-09-28 1992-03-29 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-03-29 1995-09-28 1996-03-29 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-03-29 1999-09-28 2000-03-29 $7700.00 Window Closed / Lapsed

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