US4733823A
Expired / Lapsed
US
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Silicon nozzle structures and method of manufacture
Assignee: Hewlett Packard Development Co LP
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Filing: 1986-10-24
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Granted: 1988-03-29
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Expires: 2006-10-24
Abstract
Abstract A nozzle structure in a crystallographically oriented, monocrystalline silicon includes a pyramidal opening anisotropically etched from the entrance side of the nozzle and truncated in a membrane having a smaller cross-section than the initial cross-section of the entrance opening. The membrane has extending therethrough a pyramidal opening etched anisotropically from the exit side. The vertical axes of both openings are substantially concentric.
Inventors
- 👤 Herbert A. Waggener
- 👤 Joseph C. Zuercher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 07:06
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/1621; B41J2/1626; B41J2/1629; B41J2/162; B41J2/1631; B41J2/1632; B41J2/164; B41J2/1642
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
155 words
A nozzle comprising: a unitary nozzle body formed of a p type monocrystalline silicon having a substantially square entrance aperture of a first cross-sectional area which tapers to a second substantially square cross-sectional area which is smaller than the first cross-sectional area of said entrance aperture; and a membrane of n type monocrystalline silicon having a thickness of 10 microns or less formed within said second cross-sectional area, said membrane having a singular substantially square exit aperture therein, said exit aperture having a first cross-sectional area which is smaller than said second cross-sectional area of said entrance aperture and which tapers from said second cross-sectional area of said entrance aperture to a second cross-sectional area of said exit apeture, said exit aperture first cross-sectional area being smaller than said second cross-sectional area thereof, said cross-sections being substantially parallel to the (100) planes of the monocrystalline silicon and said entrance and exit apertures being substantially concentric.
Claim 2
Dependent Claim
155 words
A nozzle comprising: a unitary nozzle body formed of a p type monocrystalline silicon having a substantially square entrance aperture of a first cross-sectional area which tapers to a second substantially square cross-sectional area which is smaller than the first cross-sectional area of said entrance aperture; and a membrane of n type monocrystalline silicon having a thickness of 10 microns or less formed within said second cross-sectional area, said membrane having a singular substantially square exit aperture therein, said exit aperture having a first cross-sectional area which is smaller than said second cross-sectional area of said entrance aperture and which tapers from said second cross-sectional area of said entrance aperture to a second cross-sectional area of said exit apeture, said exit aperture first cross-sectional area being smaller than said second cross-sectional area thereof, said cross-sections being substantially parallel to the (100) planes of the monocrystalline silicon and said entrance and exit apertures being substantially concentric.
Claim 3
Dependent Claim
149 words
A nozzle comprising: a nozzle body formed of cyrstallographically oriented, p type monocrystalline silicon section having first and second major surfaces; an n type layer formed on the first major surface of said section; said section having a pyramidal cavity anisotropically etched from the second major surface of said section to said n layer, said cavity having a rectangular entrance of a first cross-sectional area which tapers to a second rectangular cross-sectional area which is smaller than the first cross-sectional area; and said n layer having an exit aperture anisotropically etched from the first major surface of said section wherein the exit aperture has a first cross-sectional area which is smaller than the second cross-sectional area of the pyramidal cavity and wherein said first cross-sectional area of the exit aperture tapers to a second cross-sectional area which is larger than the first cross-sectional area of the said exit aperture.
Claim 4
Dependent Claim
149 words
A nozzle comprising: a nozzle body formed of cyrstallographically oriented, p type monocrystalline silicon section having first and second major surfaces; an n type layer formed on the first major surface of said section; said section having a pyramidal cavity anisotropically etched from the second major surface of said section to said n layer, said cavity having a rectangular entrance of a first cross-sectional area which tapers to a second rectangular cross-sectional area which is smaller than the first cross-sectional area; and said n layer having an exit aperture anisotropically etched from the first major surface of said section wherein the exit aperture has a first cross-sectional area which is smaller than the second cross-sectional area of the pyramidal cavity and wherein said first cross-sectional area of the exit aperture tapers to a second cross-sectional area which is larger than the first cross-sectional area of the said exit aperture.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-29 | 1991-09-28 | 1992-03-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-29 | 1995-09-28 | 1996-03-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-29 | 1999-09-28 | 2000-03-29 | $7700.00 | Window Closed / Lapsed |