US3958255A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ink jet nozzle structure
Assignee: International Business Machines Corp
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Filing: 1974-12-31
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Granted: 1976-05-18
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Expires: 1994-12-31
Abstract
Abstract A nozzle array structure for pressurized fluid jets includes a uniform deposited membrane having an array of uniform small orifices therein overlaying a planar substrate having an array of larger aperture openings therethrough with approximately the same central axes as the orifice array. The method of making includes forming a substrate of a planar single crystal material oriented with the (100) planes parallel to the surface. A membrane comprising a uniform coating of an inorganic material is applied to the planar surface of the substrate. The substrate is preferentially etched from the rear surface to form an array of openings therein extending therethrough to the membrane. The membrane is then selectively eroded to form an array of uniform small orifices therein.
Inventors
- 👤 Charles Chiou
- 👤 Guido Galli
- 👤 Karl H. Loeffler
- 👤 Max R. Lorenz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 08:39
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/1621; B41J2/1626; B41J2/1629; B26; B26F; B26F1/00; B26F1/26; B41J2/162; B41J2/1628; B41J2/164; B41J2/1642; B41J2/1646; G; G01; G01D; G01D15/00; G01D15/16; G01D15/18
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
97 words
In a multi-orifice fluid jet head including a source of pressurized fluid, and manifold means communicating with said source, the improvement comprising: a multi-orifice nozzle plate communicating with said manifold means and comprising a planar monocrystalline substrate having a uniform array of aperture openings therethrough for said fluid; and a deposited membrane of uniform thickness less than 1 mil coating and overlaying said substrate and having an array of uniform orifices therein for said fluid, said orifices having approximately the same central axes as said aperture openings, and having smaller areal cross sections than said aperture openings.
Claim 2
Dependent Claim
97 words
In a multi-orifice fluid jet head including a source of pressurized fluid, and manifold means communicating with said source, the improvement comprising: a multi-orifice nozzle plate communicating with said manifold means and comprising a planar monocrystalline substrate having a uniform array of aperture openings therethrough for said fluid; and a deposited membrane of uniform thickness less than 1 mil coating and overlaying said substrate and having an array of uniform orifices therein for said fluid, said orifices having approximately the same central axes as said aperture openings, and having smaller areal cross sections than said aperture openings.
Claim 3
Dependent Claim
17 words
The fluid jet head improvement of claim 1 wherein said deposited membrane is additionally an inorganic material.
Claim 4
Dependent Claim
31 words
The fluid jet head improvement of claim 2 wherein said aperture opening and orifice arrays additionally comprise at least one straight linear array of approximately equally spaced common openings and orifices.
Claim 5
Dependent Claim
22 words
The fluid jet head improvement of claim 3 wherein said spacing of said common openings and orifices is 0.02 inches or less.
Claim 6
Dependent Claim
20 words
The fluid jet head improvement of claim 4 wherein said orifices additionally have a diameter of 0.002 inches or less.
Claim 7
Dependent Claim
18 words
The fluid jet head improvement of claim 5 wherein said deposited membrane is additionally a compound of silicon.
Claim 8
Dependent Claim
14 words
The fluid jet head improvement of claim 6 wherein said monocrystalline substrate is silicon.
Claim 9
Dependent Claim
40 words
The fluid jet head improvement of claim 7 wherein said aperture openings additionally comprise an average areal cross section at the intersection thereof with said membrane of at least approximately four times the average areal cross section of said orifices.
References Cited (Backward Citations)
US3823408A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-05-18 | 1979-11-17 | 1980-05-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-05-18 | 1983-11-17 | 1984-05-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-05-18 | 1987-11-17 | 1988-05-18 | $7700.00 | Window Closed / Lapsed |