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US4732793A
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Method and apparatus for laser-induced CVD
Assignee: Mitsubishi Electric Corp
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Filing: 1987-02-03
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Granted: 1988-03-22
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Expires: 2007-02-03
Abstract
Abstract A laser-induced CVD method in accordance with this invention comprises the steps of: setting a substrate in a reactive gas; applying a laser beam to the reactive gas to decompose it and produce not only free radicals but also ions due to multiphoton absorption; and applying an electric field thereby to efficiently transport the ions toward the substrate and deposit a thin film on the substrate at an increased deposition rate.
Inventors
- 👤 Hiromi Itoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:50
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482; C23C16/483
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
148 words
A laser-induced CVD apparatus comprising; a reaction chamber; a vacuum pump for evacuating said chamber; a gas supplier for supplying said chamber with a reactive gas; a susceptor in said chamber for supporting a substrate on which a thin film is to be deposited; a generally flat electrode provided opposite to said susceptor; a laser source for emitting a laser beam to decompose said reactive gas and produce not only free radicals but also ions due to multiphoton absorption; a DC power supplier connected between said electrode and said susceptor for generating an electric field therebetween, whereby said ions are efficiently transported toward said substrate and thus said film is deposited at an increased deposition rate; and a mercury lamp means for applying ultraviolet to said substrate, whereby electrification of said film during deposition may be cancelled by electrons injected from said substrate due to a photoelectric effect.
Claim 2
Dependent Claim
148 words
A laser-induced CVD apparatus comprising; a reaction chamber; a vacuum pump for evacuating said chamber; a gas supplier for supplying said chamber with a reactive gas; a susceptor in said chamber for supporting a substrate on which a thin film is to be deposited; a generally flat electrode provided opposite to said susceptor; a laser source for emitting a laser beam to decompose said reactive gas and produce not only free radicals but also ions due to multiphoton absorption; a DC power supplier connected between said electrode and said susceptor for generating an electric field therebetween, whereby said ions are efficiently transported toward said substrate and thus said film is deposited at an increased deposition rate; and a mercury lamp means for applying ultraviolet to said substrate, whereby electrification of said film during deposition may be cancelled by electrons injected from said substrate due to a photoelectric effect.
Claim 3
Dependent Claim
14 words
An apparatus in accordance with claim 1, wherein said electrode comprises a mesh plate.
Claim 4
Dependent Claim
18 words
An apparatus in accordance with claim 1, wherein the output voltage of said DC power supplier is adjustable.
Claim 5
Dependent Claim
21 words
An apparatus in accordance with claim 1, wherein said laser beam is set to pass between said susceptor and said electrode.
Claim 6
Dependent Claim
33 words
An apparatus in accordance with claim 4, wherein said laser beam is set substantially parallel to the top surface of said substrate and is spaced above about 0.5 to a few mm therefrom.
Claim 7
Dependent Claim
21 words
An apparatus in accordance with claim 1, wherein said laser beam has an energy density more than several MW/cm 2 .
Claim 8
Dependent Claim
16 words
An apparatus in accordance with claim 1, wherein said laser source is of a gas laser.
Claim 9
Dependent Claim
16 words
An apparatus in accordance with claim 1, wherein said laser source is of an excimer laser.
References Cited (Backward Citations)
US4649059A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1991-03-22 | 1991-09-21 | 1992-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-22 | 1995-09-21 | 1996-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-22 | 1999-09-21 | 2000-03-22 | $7700.00 | Window Closed / Lapsed |