Abstract A homogeneous fine grained metal film (6') on a substrate in accordance with the present invention comprises multiple metal layers and intervening layers (14) between the respective metal layers, the intervening layers being formed of a compound of the metal and a reactive gas and serving to suppress growth of grains (12') in the respective metal layers and to suppress electromigration of grain boundaries (13'). In a method for manufacturing a metal film (6') having homogeneous and fine grains on a substrate in accordance with the present invention, one or more intervening layers (14) are formed by introducing a gas reactive with the metal film one or more times during deposition of the metal film, whereby intervening layers of a metal compound are interposed between the successively deposited metal layers. Thus, a metal film of a multilayered structure including multiple metal layers separated by the intervening layers is formed.
A metal film arrangement (6') on a substrate, comprising: multiple layers of metal, and intervening layers (14) interposed between said respective metal layers, said intervening layers serving to suppress growth of grains (12') in said metal layers and to suppress electromigration of grain boundaries (13), wherein each metal layer of said multiple layers consists essentially of homogeneous fine grains of said metal and the thickness of each metal layer separated by the intervening layers corresponds to the grain size of metal in said metal layers, wherein said intervening layers are formed of a compound of said metal and a reactive gas.
Claim 2
Dependent Claim
101 words
A metal film arrangement (6') on a substrate, comprising: multiple layers of metal, and intervening layers (14) interposed between said respective metal layers, said intervening layers serving to suppress growth of grains (12') in said metal layers and to suppress electromigration of grain boundaries (13), wherein each metal layer of said multiple layers consists essentially of homogeneous fine grains of said metal and the thickness of each metal layer separated by the intervening layers corresponds to the grain size of metal in said metal layers, wherein said intervening layers are formed of a compound of said metal and a reactive gas.
Claim 3
Dependent Claim
19 words
A metal film in accordance with claim 1, wherein said metal is one of aluminum or an aluminum alloy.
Claim 4
Dependent Claim
14 words
A metal film in accordance with claim 2, wherein said reactive gas includes oxygen.
Claim 5
Dependent Claim
14 words
A metal film in accordance with claim 2, wherein said reactive gas includes nitrogen.