Patent US4726877A successfully refreshed from Google Patents.
US4726877A
Expired / Lapsed
US
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Methods of using photosensitive compositions containing microgels
Assignee: EIDP Inc
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Filing: 1986-12-18
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Granted: 1988-02-23
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Expires: 2006-12-18
Abstract
Abstract A solid photopolymerizable composition, contains addition polymerizable ethylenically unsaturated monomer, initiating system, polymer binder and a microgel wherein preferably the binder and microgel form substantially a single phase and have a similar glass transition temperature above 25 DEG C. Although less preferred the solid composition can function without the binder. A preferred use is as a photoresist.
Inventors
- 👤 Michael Fryd
- 👤 Terry R. Suess
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:00
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
165 words
In a process for laminating a photosensitive film to a substrate comprising the steps of (a) laminating to the substrate a supported solid photosensitive film, (b) imagewise exposing the layer to actinic radiation, (c) removing unexposed areas of the layer to form resist areas, (d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, and wherein the improvement comprises the photosensitive film which contains (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, (c) preformed macromolecular polymer binder, and (d) microgel, wherein the photosensitive composition is a solid and wherein at least one of the following is present: (i) the polymer binder and microgel form substantially one phase as viewed by the naked eye, or (ii) the polymer binder and microgel have glass transition temperatures which do not differ by more than 50° C. with the microgel having a glass transition temperature above 25° C.
Claim 2
Dependent Claim
165 words
In a process for laminating a photosensitive film to a substrate comprising the steps of (a) laminating to the substrate a supported solid photosensitive film, (b) imagewise exposing the layer to actinic radiation, (c) removing unexposed areas of the layer to form resist areas, (d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, and wherein the improvement comprises the photosensitive film which contains (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, (c) preformed macromolecular polymer binder, and (d) microgel, wherein the photosensitive composition is a solid and wherein at least one of the following is present: (i) the polymer binder and microgel form substantially one phase as viewed by the naked eye, or (ii) the polymer binder and microgel have glass transition temperatures which do not differ by more than 50° C. with the microgel having a glass transition temperature above 25° C.
Claim 3
Dependent Claim
17 words
The process of claim 1 wherein after step (d) the resist areas are removed from the substrate.
Claim 4
Dependent Claim
12 words
The process of claim 1 wherein properties (i) and (ii) are present.
Claim 5
Dependent Claim
20 words
The process of claim 3 wherein the substantially one phase is present and observable after a magnification of 10 times.
Claim 6
Dependent Claim
20 words
The process of claim 4 wherein the substantially one phase is present and observable after a magnification of 100 times.
Claim 7
Dependent Claim
25 words
The process of claim 3 wherein the glass transition temperature of the polymer binder and the microgel do not differ by more than 25° C.
Claim 8
Dependent Claim
82 words
The process of claim 3 wherein the microgel swells at least 10% in at least one of the following solvents: n-heptane, carbon tetrachloride, toluene, methylene chloride, ethyl acetate, acetone, acetonitrile, acetic acid, dimethylsulfoxide, dimethylformamide, formamide, water, aqueous ammonium hydroxide solution containing up to 10% by weight ammonia, aqueous potassium hydroxide solution containing up to 10% by weight potassium hydroxide, methylene chloride-methanol solution containing by weight 92% methylene chloride and 8% methanol, and aqueous sodium carbonate solution containing by weight 1% sodium carbonate.
Claim 9
Dependent Claim
19 words
The process of claim 7 wherein the microgel swells at least 50% in at least one of the solvents.
Claim 10
Dependent Claim
15 words
The process of claim 3 which has a creep viscosity of at least 20 megapoise.
Claim 11
Dependent Claim
15 words
The process of claim 9 which has a creep viscosity of at least 40 megapoise.
Claim 12
Dependent Claim
116 words
In a process for laminating a photosensitive film to a substrate comprising (a) laminating to the substrate a supported solid photosensitive film, (b) imagewise exposing the layer to actinic radiation, (c) removing unexposed areas of the layer to form resist areas, (d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, and wherein the improvement comprises the photosensitive film which contains (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, and (c) microgel, wherein the photosensitive composition is a solid with the proviso that the photosensitive composition is substantially free of any preformed macromolecular polymer binder.
Claim 13
Dependent Claim
116 words
In a process for laminating a photosensitive film to a substrate comprising (a) laminating to the substrate a supported solid photosensitive film, (b) imagewise exposing the layer to actinic radiation, (c) removing unexposed areas of the layer to form resist areas, (d) permanently modifying areas of the substrate which are unprotected by the resist areas by etching the substrate or by depositing a material onto the substrate, and wherein the improvement comprises the photosensitive film which contains (a) addition polymerizable ethylenically unsaturated monomer, (b) initiating system activated by actinic radiation, and (c) microgel, wherein the photosensitive composition is a solid with the proviso that the photosensitive composition is substantially free of any preformed macromolecular polymer binder.
Claim 14
Dependent Claim
17 words
The process of claim 11 wherein after step (d) the resist areas are removed from the substrate.
Claim 15
Dependent Claim
82 words
The process of claim 11 wherein the microgel swells at least 10% in at least one of the following solvents: n-heptane, carbon tetrachloride, toluene, methylene chloride, ethyl acetate, acetone, acetonitrile, acetic acid, dimethylsulfoxide, dimethylformamide, formamide, water, aqueous ammonium hydroxide solution containing up to 10% by weight ammonia, aqueous potassium hydroxide solution containing up to 10% by weight potassium hydroxide, methylene chloride-methanol solution containing by weight 92% methylene chloride and 8% methanol, and aqueous sodium carbonate solution containing by weight 1% sodium carbonate.
Claim 16
Dependent Claim
19 words
The process of claim 13 wherein the microgel swells at least 50% in at least one of the solvents.
Claim 17
Dependent Claim
15 words
The process of claim 11 which has a creep viscosity of at least 20 megapoise.
Claim 18
Dependent Claim
15 words
The process of claim 15 which has a creep viscosity of at least 40 megapoise.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-02-22 | 1991-08-24 | 1992-02-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-02-22 | 1995-08-24 | 1996-02-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-02-22 | 1999-08-24 | 2000-02-23 | $7700.00 | Window Closed / Lapsed |