Angular velocity sensor having low temperature sensitivity

Claim 1

Angular velocity sensor means, comprising: a nozzle block of a first selected material for enclosing a jet chamber having a reference jet axis and having nozzle means disposed at one end of said chamber for discharging a fluid jet along said reference jet axis; a sensor plug of a second selected material having at least one pair of sensing elements mounted thereon, said plug disposed at an opposite end of said chamber such that said sensing elements are disposed symmetrically about said reference jet axis in a plane perpendicular thereto, each pair of sensing elements being cooled differentially in response to deflection of said fluid jet from said referenced jet axis in the presence of sensor rotation about a rotation axis perpendicular to said reference jet axis, said deflection being in proportion to the angular velocity of said sensor, each of said sensing elements having resistance values which vary according to the amount of cooling received by each; a pump having an anvil of a third selected material for mounting a magnetic steel diaphragm thereon, said anvil being attached to said nozzle block, said pump having a magnetic steel laminated core having a drive coil wound thereon, said core providing a low reluctance path for magnetic drive flux in a magnetic drive circuit including said core, said magnetic steel diaphragm, and a gap between said core and said diaphragm, said pump having a magnetic flux sensing circuit including sensing poles having a sensing coil wound thereon, and means for producing magnetic sensing flux in a low reluctance path including said poles, said diaphragm, and a gap between said poles and said diaphragm and wherein said sensing coils are disposed in quadrature with respect to said drive coil for detecting said magnetic sensing flux and providing a sensing signal indicative of diaphragm displacement amplitude and frequency, said pump for delivering a fluid under pressure to said nozzle means to form said fluid jet; and detector circuit means, responsive to said sensing elements' resistance values for providing signals indicative of said angular velocity.