Method and apparatus for ion beam centroid location

Claim 2

Apparatus for locating a centroid of a line section of a charged particle beam comprising: a plurality of charged particle beam current sensors positioned along a line in the path of the beam at predetermined distances from a reference point, each of said beam current sensors intercepting a component of said beam and providing a beam current component; first means for summing each of said beam current components and for providing a first summation; second means for summing each of said beam current components weighted according to its distance from said reference point and for providing a second summation; and means for dividing said second summation by said first summation, and for providing a quotient proportional to the distance between said reference point and the centroid of said charged particle beam sampled along the line defined by the beam current sensors.

Claim 3

Apparatus as defined in claim 1 wherein said first means for summing comprises a first plurality of resistors, each having one end electrically connected to one of said beam current sensors, having a value of resistance proportional to the distance between the beam current sensor to which it is connected and said reference point, and having its other end electrically connected to a first common point.

Claim 4

Apparatus as defined in claim 2 wherein said second means for summing comprises a second plurality of resistors having values of resistance equal to each other, each having one end electrically connected to one of said beam current sensors, having a value of resistance much greater than the largest of said first plurality of resistors, and having its other end electrically connected to a second common point.

Claim 5

Apparatus as defined in claim 3 wherein said dividing means includes means for dividing the current supplied through said second plurality of resistors to said second common point by the current supplied through said first plurality of resistors to said first common point.

Claim 6

Apparatus as defined in claim 1 wherein said beam current sensors each comprise a Faraday cup beam sensor.

Claim 7

Apparatus as defined in claim 5 wherein said beam current sensors are positioned along a line parallel to the scan axis of said beam.

Claim 8

Apparatus as defined in claim 3 wherein the values of resistance of said second plurality of resistors is at least one thousand times the value of the largest resistance of said first plurality of resisitors.

Claim 11

A method for centroid location as defined in claim 8 wherein the step of weighting said beam current components according to distance from said reference point includes passing each of said beam current components through associated resistors, each having a value of resistance proportional to the distance between the location at which the beam current component is sensed and said reference point, wherein a voltage across each resistor represents the weighted beam current component.

Claim 12

Apparatus for locating a centroid of a line section of an ion beam comprising: a plurality of ion beam current sensors positioned along a line in the path of the beam at predetermined distances from a reference point, each of said beam current sensors intercepting a component of said beam; a first plurality of resistors, each having one end electrically connected to one of said beam current sensors, having a value of resistance proportional to a distance between the beam current sensor to which it is connected and said reference point, and having its other end electrically connected to a first common point; a second plurality of resistors having values of resistance equal to each other, each having one end electrically connected to one of said beam current sensors, having a value of resistance much greater than the largest of said first plurality of resistors, and having its other end electrically connected to a second common point; and means for dividing the current supplied through said second plurality of resistors to said second common point by the current supplied through said first plurality of resistors to said first common point to provide the distance between said reference point and the centroid of said ion beam sampled along the line defined by the beam current sensors.

Claim 13

Apparatus for locating a centroid of a line section of an ion beam comprising: a plurality of ion beam current sensors positioned along a line in the path of the beam at predetermined distances from a reference point, each of said beam current sensors intercepting a component of said beam; a first plurality of resistors, each having one end electrically connected to one of said beam current sensors, having a value of resistance proportional to a distance between the beam current sensor to which it is connected and said reference point, and having its other end electrically connected to a first common point; a second plurality of resistors having values of resistance equal to each other, each having one end electrically connected to one of said beam current sensors, having a value of resistance much greater than the largest of said first plurality of resistors, and having its other end electrically connected to a second common point; and means for dividing the current supplied through said second plurality of resistors to said second common point by the current supplied through said first plurality of resistors to said first common point to provide the distance between said reference point and the centroid of said ion beam sampled along the line defined by the beam current sensors.

Claim 14

Apparatus comprising: a vacuum chamber and means for evacuating said vacuum chamber; means for generating an ion beam located within said vacuum chamber; a plurality of ion beam current sensors positioned along a line in the path of the beam at predetermined distances from a reference point, each of said beam current sensors intercepting a component of said beam and providing a beam current component; a first plurality of resistors, each having one end electrically connected to one of said beam current sensors, having a value of resistance proportional to the distance between the beam current sensor to which it is connected and said reference point, and having its other end electrically connected to a first common point; a second plurality of resistors having values of resistance equal to each other, each having one end electrically connected to one of said beam current sensors, having a value of resistance much greater than the largest of said first plurality of resistors, and having its other end electrically connected to a second common point, said first plurality of resistors, said first common point, said second plurality of resistors and said second common point all being located within said vacuum chamber; means positioned outside said vacuum chamber for dividing the current supplied through said second plurality of resistors to said second common point by the current supplied through said first plurality of resistors to said first common point to provide the distance between said reference and a centroid along a line section of said ion beam defined by the beam current sensors; and first and second vacuum feedthroughs coupling said first and second common points, respectively, through said vacuum chamber to said dividing means.

Claim 15

Apparatus comprising: a vacuum chamber and means for evacuating said vacuum chamber; means for generating an ion beam located within said vacuum chamber; a plurality of ion beam current sensors positioned along a line in the path of the beam at predetermined distances from a reference point, each of said beam current sensors intercepting a component of said beam and providing a beam current component; a first plurality of resistors, each having one end electrically connected to one of said beam current sensors, having a value of resistance proportional to the distance between the beam current sensor to which it is connected and said reference point, and having its other end electrically connected to a first common point; a second plurality of resistors having values of resistance equal to each other, each having one end electrically connected to one of said beam current sensors, having a value of resistance much greater than the largest of said first plurality of resistors, and having its other end electrically connected to a second common point, said first plurality of resistors, said first common point, said second plurality of resistors and said second common point all being located within said vacuum chamber; means positioned outside said vacuum chamber for dividing the current supplied through said second plurality of resistors to said second common point by the current supplied through said first plurality of resistors to said first common point to provide the distance between said reference and a centroid along a line section of said ion beam defined by the beam current sensors; and first and second vacuum feedthroughs coupling said first and second common points, respectively, through said vacuum chamber to said dividing means.