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US4716852A
Expired / Lapsed
US
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Apparatus for thin film formation using photo-induced chemical reaction
Assignee: Hitachi Ltd
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Filing: 1986-04-07
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Granted: 1988-01-05
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Expires: 2006-04-07
Abstract
Abstract An apparatus according to the present invention for thin film formation using a photo-induced chemical reaction comprises a reaction chamber in which a substrate can be set, means to introduce a reactive gas into the reaction chamber for the purpose of causing a surface of the substrate to adsorb the reactive gas, means to evacuate the reaction chamber, means to irradiate the substrate surface having adsorbed the reactive gas with photon energy for the purpose of forming a nucleus required for growing a film on the substrate surface, means to generate metastable excited molecules which can react with the reactive gas to decompose it, and means to introduce the reactive gas and the metastable excited molecules into the reaction chamber for the purpose of growing the film on the substrate formed with the nucleus on the basis of the nucleus.
Inventors
- 👤 Kanji Tsujii
- 👤 Yusuke Yajima
- 👤 Seiichi Murayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:32
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482; C23C16/483
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
149 words
An apparatus for thin film formation using a photo-induced chemical reaction comprising a reaction chamber in which a substrate can be set, means to introduce a reactive gas into said reaction chamber for the purpose of causing a surface of the substrate to adsorb the reactive gas, means to evacuate said reaction chamber, means to irradiate the substrate surface having adsorbed the reactive gas with photon energy for the purpose of forming a nucleus required for growing a film on the substrate surface, means to generate metastable excited molecules which can react with the reactive gas to decompose it, said means to generate metastable excited molecules being located outside said reaction chamber, and means to introduce the reactive gas and the metastable excited molecules into said reaction chamber for the purpose of growing the film on the substrate formed with the nucleus and on the basis of the nucleus.
Claim 2
Independent Claim
149 words
An apparatus for thin film formation using a photo-induced chemical reaction comprising a reaction chamber in which a substrate can be set, means to introduce a reactive gas into said reaction chamber for the purpose of causing a surface of the substrate to adsorb the reactive gas, means to evacuate said reaction chamber, means to irradiate the substrate surface having adsorbed the reactive gas with photon energy for the purpose of forming a nucleus required for growing a film on the substrate surface, means to generate metastable excited molecules which can react with the reactive gas to decompose it, said means to generate metastable excited molecules being located outside said reaction chamber, and means to introduce the reactive gas and the metastable excited molecules into said reaction chamber for the purpose of growing the film on the substrate formed with the nucleus and on the basis of the nucleus.
Claim 3
Dependent Claim
35 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein said reaction chamber includes means to project the photon energy while the metastable excited molecules are being introduced.
Claim 4
Dependent Claim
48 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein said reaction chamber is constructed of a plurality of reaction chambers, and includes means capable of switchingly performing the introduction and discharge of the reactive gas or the metastable excited molecules.
Claim 5
Dependent Claim
50 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein said means to introduce the reactive gas and said means to introduce the metastable excited molecules are circular tube structures each of which has a plurality of openings directed toward a center thereof.
Claim 6
Dependent Claim
54 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein said reaction chamber is separated into a first reaction chamber in which the substrate adsorbs the reactive gas and the photon energy is projected, and a second reaction chamber in which the metastable excited molecules are exerted.
Claim 7
Dependent Claim
70 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein said reaction chamber is separated into a first reaction chamber in which the substrate adsorbs the reactive gas, a second reaction chamber in which the substrate is irradiated with the photon energy, and a third reaction chamber in which the metastable excited molecules are exerted on the substrate irradiated with the photon energy.
Claim 8
Dependent Claim
45 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 6, wherein rooms which are evacuated are respectively disposed between said first reaction chamber and said second reaction chamber and between said second reaction chamber and said third reaction chamber.
Claim 9
Dependent Claim
30 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein the photon energy contains pattern information obtained by passing light through a mask.
Claim 10
Dependent Claim
29 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein the photon energy contains pattern information obtained by employing a laser beam.
Claim 11
Dependent Claim
51 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein said means to introduce a reactive gas into said reaction chamber comprises means to introduce a reactive gas made of a material selected from the group consisting of hydrides, organometallic compounds and metalcarbonyl compounds.
Claim 12
Dependent Claim
44 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein said means to generate metastable excited molecules comprises means for generating metastable excited molecules of a material selected from the group consisting of nitrogen and rare gases.
Claim 13
Dependent Claim
40 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, further comprising means for projecting a photon beam from a light source into said reaction chamber while the metastable excited molecules are being introduced.
Claim 14
Dependent Claim
29 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 12, wherein said photon beam has a wavelength capable of decomposing said reactive gas.
Claim 15
Dependent Claim
39 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 13, wherein said light source is a CO 2 laser, a high-pressure mercury discharge lamp, a high-frequency electrodeless discharge lamp, or an excimer laser.
Claim 16
Dependent Claim
26 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein said thin film is made of a semiconductor material.
Claim 17
Dependent Claim
26 words
An apparatus for thin film formation using a photo-induced chemical reaction as defined in claim 1, wherein said thin film is made of a metal material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-01-04 | 1991-07-06 | 1992-01-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-01-04 | 1995-07-06 | 1996-01-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-01-04 | 1999-07-06 | 2000-01-05 | $7700.00 | Window Closed / Lapsed |