US4710428A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sintered silicon carbide porous body impregnated with metallic silicon
Assignee: Coorstek KK
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Filing: 1986-03-10
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Granted: 1987-12-01
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Expires: 2006-03-10
Abstract
Abstract A susceptor for use in an in-line or continuous deposition of a film on a silicon wafer by a CVD process, which comprises Si-SiC ceramic containing 7% to 25% by weight of metallic silicon having a high purity. The susceptor has enhanced mechanical strength and dimensional stability and can normally be used repeatedly a large number of times. Further, by using such a susceptor a uniform film can be deposited on the silicon wafer by the CVD process, and a silicon wafer can be coated with a film having desired electrical properties by the CVD process without contaminating the silicon wafer.
Inventors
- 👤 Teruyasu Tamamizu
- 👤 Kichihei Sato
- 👤 Takashi Tanaka
- 👤 Shunkichi Sato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:13
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/12; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4581; Y; Y10; Y10T; Y10T428/00; Y10T428/30
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
46 words
A susceptor for use in an in-line deposition of a coating on a silicon wafer by a CVD process, comprising Si-SiC ceramic comprising a sintered body of SiC with pores therein impregnated with from about 7% to 25% by weight of metallic silicon of high purity.
Claim 2
Dependent Claim
46 words
A susceptor for use in an in-line deposition of a coating on a silicon wafer by a CVD process, comprising Si-SiC ceramic comprising a sintered body of SiC with pores therein impregnated with from about 7% to 25% by weight of metallic silicon of high purity.
Claim 3
Dependent Claim
19 words
A susceptor according to claim 1, wherein the purity of the metallic silicon is at least 99% by weight.
Claim 4
Dependent Claim
19 words
A susceptor according to claim 1, wherein the purity of the metallic silicon is at least 99.9% by weight.
Claim 5
Dependent Claim
27 words
A susceptor according to claim 1, wherein the Si-SiC ceramic is formed from a sintered body of SiC having a purity of at least 99% by weight.
Claim 6
Dependent Claim
20 words
A susceptor according to claim 1, wherein the pore size in the sintered body of SiC is about 50 microns.
Claim 7
Dependent Claim
20 words
A susceptor according to claim 1, wherein the pore size in the sintered body of SiC is about 1 mm.
Claim 8
Dependent Claim
11 words
A susceptor according to claim 1, which is impermeable to gas.
Claim 9
Dependent Claim
26 words
A susceptor according to claim 1, having at least one recess for receivingly mounting therein a silicon wafer having a diameter of at least 4 inches.
Claim 10
Dependent Claim
26 words
A susceptor according to claim 1, having at least one recess for receivingly mounting therein a silicon wafer having a diameter of at least 5 inches.
Claim 11
Dependent Claim
26 words
A susceptor according to claim 1, having at least one recess for receivingly mounting therein a silicon wafer having a diameter of at least 6 inches.
References Cited (Backward Citations)
US4503807A
Cited
US4536449A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-11-30 | 1991-06-01 | 1991-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-11-30 | 1995-06-01 | 1995-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-11-30 | 1999-06-01 | 1999-12-01 | $7700.00 | Window Closed / Lapsed |