US4709141A — Non-destructive testing of cooled detector arrays

Claim 1

Independent Claim 123 words

An apparatus for testing an array of infrared detectors, comprising: a plurality of optical switches, each of which is individually addressable with light to change its electrical characteristics, wherein each of said optical switches has a first side and a second side, and wherein said first side of each of said optical switches is adapted to receive a detector of said array to be tested; an electrode coupled to said second side of each of said optical switches; and a detector circuit coupled to said electrode and to a probe adapted to be coupled to said array of detectors, said circuit for detecting changes in the electrical characteristics of an addressed optical switch and the infrared detector associated with said addressed optical switch.

Claim 2

Independent Claim 123 words

An apparatus for testing an array of infrared detectors, comprising: a plurality of optical switches, each of which is individually addressable with light to change its electrical characteristics, wherein each of said optical switches has a first side and a second side, and wherein said first side of each of said optical switches is adapted to receive a detector of said array to be tested; an electrode coupled to said second side of each of said optical switches; and a detector circuit coupled to said electrode and to a probe adapted to be coupled to said array of detectors, said circuit for detecting changes in the electrical characteristics of an addressed optical switch and the infrared detector associated with said addressed optical switch.

Claim 3

Dependent Claim 23 words

The apparatus of claim 1 wherein said electrode is transparent and each of said optical switches is addressable by light through said electrode.

Claim 4

Dependent Claim 132 words

The apparatus of claim 2 additionally comprising a second plurality of optical switches and a plurality of electrodes, wherein: said first and second pluralities of optical switches are arranged together in an array corresponding to the detectors of said array to be tested; each switch of said second plurality of optical switches is individually addressable with light to change its electrical characteristics; each of said optical switches of said plurality has a first side and a second side; said first side of each of said optical switches of said second plurality is adapted to receive a detector of said array to be tested; and said second side of each of the optical switches of said second plurality of optical switches is coupled to one of the electrodes of said plurality of electrodes.

Claim 5

Dependent Claim 57 words

The apparatus of claim 3, wherein: said optical switches of said first plurality of optical switches are arranged in a row; said optical switches of said first and second plurality of optical switches are arranged in a matrix having a plurality of rows; and each of said electrodes is coupled to a row of said optical switches.

Claim 6

Dependent Claim 31 words

The apparatus of claim 2 wherein each of said optical switches of said first and second pluralities comprises a photoconductive element, the electrical conductivity of which increases in response to light.

Claim 7

Dependent Claim 44 words

The apparatus of claim 5 wherein each of said optical switches additionally comprises a metal cap coupled to said first side of said optical switch photoconductive element to provide an opaque electrical contact for a detector of said array of detectors to be tested.

Claim 8

Dependent Claim 44 words

The apparatus of claim 1 additionally comprising: a light-transmissive substrate to which said electrode is coupled; and a light-absorbing layer coupled to one side of said substrate, wherein said light absorber has a plurality of openings, each corresponding to one of said optical switches.

Claim 9

Dependent Claim 40 words

The apparatus of claim 1 wherein said apparatus is for testing an array comprising a plurality of infrared detectors on an epitaxial layer, and wherein said probe is adapted to be coupled to said epitaxial layer of said detector array.

Claim 10

Dependent Claim 121 words

A switch matrix for testing an array of individual detector elements, said switch matrix comprising: a sapphire wafer; an insulating layer comprising a layer of light absorbing electrically insulating material deposited on said sapphire wafer, said insulating layer having a plurality of openings arranged in rows; a plurality of light-transmissive, electrically conductive strips coupled to said sapphire wafer, each aligned with a row of said openings; a plurality of photoconductive columns coupled to each of said electrically conductive strips, wherein each of said columns is aligned with one of said openings; a plurality of opaque electrically conductive contacts, each of which is coupled to one of said photoconductive columns to provide an electrical contact for a detector element to be tested.

Claim 11

Dependent Claim 121 words

A switch matrix for testing an array of individual detector elements, said switch matrix comprising: a sapphire wafer; an insulating layer comprising a layer of light absorbing electrically insulating material deposited on said sapphire wafer, said insulating layer having a plurality of openings arranged in rows; a plurality of light-transmissive, electrically conductive strips coupled to said sapphire wafer, each aligned with a row of said openings; a plurality of photoconductive columns coupled to each of said electrically conductive strips, wherein each of said columns is aligned with one of said openings; a plurality of opaque electrically conductive contacts, each of which is coupled to one of said photoconductive columns to provide an electrical contact for a detector element to be tested.

Claim 12

Dependent Claim 34 words

The switch matrix of claim 9 additionally comprising a detector circuit adapted to be coupled to at least one of said light transmissive, electrically conductive strips, and to said array of individual detector elements.

Claim 13

Dependent Claim 31 words

The switch matrix of claim 9 additionally comprising a light source adapted to individually address each of said photoconductive columns through the corresponding one of said openings in said insulating layer.

Claim 14

Independent Claim 95 words

A method of forming a matrix of solid-state optical switches for testing an array of infrared detectors, the method comprising: depositing on a surface of a sapphire wafer a light-absorbing electrically insulating layer; forming in said light-absorbing layer a plurality of openings, arranged in rows; depositing a plurality of light-transmissive electrically conductive strips, each of which is aligned with a row of said openings; and depositing a plurality of photoconductive elements on each of said strips, wherein each of said photoconductive elements is aligned with a corresponding one of said openings in said light-absorbing layer.

Claim 15

Independent Claim 95 words

A method of forming a matrix of solid-state optical switches for testing an array of infrared detectors, the method comprising: depositing on a surface of a sapphire wafer a light-absorbing electrically insulating layer; forming in said light-absorbing layer a plurality of openings, arranged in rows; depositing a plurality of light-transmissive electrically conductive strips, each of which is aligned with a row of said openings; and depositing a plurality of photoconductive elements on each of said strips, wherein each of said photoconductive elements is aligned with a corresponding one of said openings in said light-absorbing layer.

Claim 16

Dependent Claim 18 words

The method of claim 12, additionally comprising depositing an electrically conductive cap on each of said photoconductive elements.

Claim 17

Dependent Claim 43 words

The method of claim 12 wherein said step of depositing a plurality of photoconductive elements comprises: depositing a photoconductive layer over said conductive strips; and etching away portions of said photoconductive layer to leave a plurality of photoconductive columns forming said photoconductive elements.

Claim 18

Independent Claim 79 words

A method of testing an array of infrared detectors comprising: aligning said array of detectors with a matrix of solid-state optical switches so that each of said detectors is in electrical contact with one of said solid-state optical switches; individually illuminating each of said optical switches with light to cause a change in the electrical characteristics of said illuminated optical switch; and detecting the electrical responsive of the detector that is in electrical contact with said illuminated optical switch.

Claim 19

Independent Claim 79 words

A method of testing an array of infrared detectors comprising: aligning said array of detectors with a matrix of solid-state optical switches so that each of said detectors is in electrical contact with one of said solid-state optical switches; individually illuminating each of said optical switches with light to cause a change in the electrical characteristics of said illuminated optical switch; and detecting the electrical responsive of the detector that is in electrical contact with said illuminated optical switch.

Claim 20

Dependent Claim 57 words

The method of claim 15 wherein said detector array includes an epitaxial layer common to a plurality of said detectors, and a plurality of said optical switches are coupled to a common electrode, wherein said detecting step comprises: connecting a probe to said epitaxial layer of said infrared detector array; and connecting a probe to said electrode.

Claim 21

Dependent Claim 34 words

The method of claim 16 wherein each of said optical switches is positioned between said electrode and an infrared detector and said illuminating step comprises transmitting light through said electrode to said optical switch.

Claim 22

Dependent Claim 46 words

The method of claim 17 wherein said electrode is coupled to a light-transmissive substrate so that said electrode is between said substrate and said optical switches, and wherein said illuminating step further comprises transmitting said light through said substrate and said electrode to said optical switch.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1990-11-23	1991-05-25	1991-11-24	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1994-11-23	1995-05-25	1995-11-24	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1998-11-23	1999-05-25	1999-11-24	$7700.00	Window Closed / Lapsed

Non-destructive testing of cooled detector arrays

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