Device for measuring plasma properties

Claim 2

Apparatus for optically measuring the electron density and conductivity of a plasma, comprising a source of linearly polarized light, said light being incident on said plasma; separation means for separating light emanating from said plasma into two components; detection means for detecting said two light components; analyzer means interposed between said separation means and said detection means for measuring the Faraday angle of said plasma; and processing means coupled to said detection means for measuring the electron density and conductivity of said plasma, said electron density and conductivity being determined, for plasma electrons having a predetermined characteristic frequency, from the Faraday rotation angle of said plasma as measured by said analyzer means.

Claim 3

Apparatus for optically measuring the electron density and conductivity of a plasma as set forth in claim 1, wherein the conductivity and electron density of said plasma are determined by solving in said processing means the equations ##EQU11## where N is the electron density of the plasma, θ the Faraday rotation angle of said plasma measured by said analyzer, ω 0 the characteristic frequency of the plasma electrons, ω the frequency of the incident light, e a quantum of electricity, μ the mobility of electrons in the plasma and ##EQU12## B is the magnetic field intensity of the plasma, d the thickness of the plasma, m the mass of an electron, n the refractive index of the plasma, and c the velocity of light.

Claim 4

Apparatus for optically measuring the temperature of a plasma, comprising a source of linearly polarized light, said linearly polarized light being incident on said plasma; separation means for separating light emanating from said plasma into an S-polarized component and a P-polarized component; detection means for detecting said S-polarized and P-polarized components, said detection means generating first and second output signals corresponding to said S-polarized and P-polarized components respectively, and processing means coupled to said detection means for measuring the electron temperature of said plasma, said electron temperature being determined, for a light source having a predetermined brightness temperature and wavelength, from the first and second output signals of said detection means.

Claim 5

Apparatus for optically measuring the temperature of a plasma, comprising a source of linearly polarized light, said linearly polarized light being incident on said plasma; separation means for separating light emanating from said plasma into an S-polarized component and a P-polarized component; detection means for detecting said S-polarized and P-polarized components, said detection means generating first and second output signals corresponding to said S-polarized and P-polarized components respectively, and processing means coupled to said detection means for measuring the electron temperature of said plasma, said electron temperature being determined, for a light source having a predetermined brightness temperature and wavelength, from the first and second output signals of said detection means.

Claim 6

Apparatus for optically measuring the temperature of a plasma as set forth in claim 3, wherein the electron temperature of said plasma is determined by solving in said processing means the equation ##EQU13## where, Te is the plasma electron temperature, T L the brightness temperature of the light source, λ the wavelength of the light generated by the light source, C 2 a correction factor, ξ the transmission coefficient of a polarizer for linearly polarizing the light, K 1 a correction factor for an optical system between the light source and the plasma, φ p the output from the detection means for detecting the P-polarized component, φ LS the intensity of the light flux after passing through the plasma, and φ S the output from the detection means for detecting the S-polarized component.

Claim 7

Apparatus for optically measuring the electron temperature, electron density and conductivity of a plasma, comprising a first source of linearly polarized light having a first wavelength; a second source of linearly polarized light having a second wavelength different from said first wavelength, the linearly polarized light emitted by said first and second sources being incident on said plasma along a common optical axis; dividing means for dividing light emanating from said plasma in response to light from said first and second sources into first and second light portions; first separation means for separating the light in said first portion into an S-polarized component and a P-polarized component; first detection means for detecting said S-polarized and P-polarized components in said first portion and generating first and second output signals corresponding to said S-polarized and P-polarized components respectively; first processing means coupled to said first detection means for measuring the electron temperature of said plasma, said electron temperature being determined, for a first light source having a predetermined brightness temperature and wavelength, from the first and second output signals of said detection means; second separation means for separating the light in said second portion into two components; second detection means for detecting the two light components in said second light portion; analyzer means interposed between said second separation means and said second detection means for measuring the Faraday angle of said plasma; and second processing means coupled to said second detection means for measuring the electron density and conductivity of said plasma, said electron density and conductivity being determined, for plasma electrons having a predetermined characteristic frequency, from the Faraday rotation angle of said plasma as measured by said analyzer means.

Claim 8

Apparatus for optically measuring the electron temperature, electron density and conductivity of a plasma, comprising a first source of linearly polarized light having a first wavelength; a second source of linearly polarized light having a second wavelength different from said first wavelength, the linearly polarized light emitted by said first and second sources being incident on said plasma along a common optical axis; dividing means for dividing light emanating from said plasma in response to light from said first and second sources into first and second light portions; first separation means for separating the light in said first portion into an S-polarized component and a P-polarized component; first detection means for detecting said S-polarized and P-polarized components in said first portion and generating first and second output signals corresponding to said S-polarized and P-polarized components respectively; first processing means coupled to said first detection means for measuring the electron temperature of said plasma, said electron temperature being determined, for a first light source having a predetermined brightness temperature and wavelength, from the first and second output signals of said detection means; second separation means for separating the light in said second portion into two components; second detection means for detecting the two light components in said second light portion; analyzer means interposed between said second separation means and said second detection means for measuring the Faraday angle of said plasma; and second processing means coupled to said second detection means for measuring the electron density and conductivity of said plasma, said electron density and conductivity being determined, for plasma electrons having a predetermined characteristic frequency, from the Faraday rotation angle of said plasma as measured by said analyzer means.

Claim 9

A device for measuring plasma properties as set forth in claim 5, wherein said first light source projects light having a wavelength in the ultraviolet range, and said second light source projects light having a wavelength in the far infrared range.

Claim 10

Apparatus for optically measuring the electron temperature, electron density and conductivity of a plasma as set forth in claim 5, wherein the electron temperature of said plasma is determined by solving in said first processing means the equation ##EQU14## where, Te is the plasma electron temperature, T L the brightness temperature of the light source, λ the wavelength of the light generated by the light source, C 2 a correction factor, ξ the transmission coefficient of a polarizer for linearly polarizing the light, K 1 a correction factor for an optical system between the light source and the plasma, φ p the output from the detection means for detecting the P-polarized component, φ LS the intensity of the light flux after passing through the plasma, and φ S the output from the detection means for detecting the S-polarized component; and wherein the conductivity and electron density of said plasma are determined by solving in said second processing means the equations ##EQU15## where N is the electron density of the plasma, θ the Faraday rotation angle of said plasma measured by said analyzer, ω 0 the characteristic frequency of the plasma electrons, ω the frequency of the incident light, e a quantum of electricity, μ the mobility of electrons in the plasma and ##EQU16## B is the magnetic field intensity of the plasma, d the thickness of the plasma, m the mass of an electron, n the refractive index of the plasma, and c the velocity of light.

Claim 11

Apparatus for measuring plasma properties as set forth in claim 5 wherein the wavelength of the light generated by said second light source is longer than the wavelength of the light generated by said first light source, the light generated by said second light source being affected to a greater extent by the Faraday effect than the light generated by said first light source.

Claim 12

A device for measuring plasma properties as set forth in claim 5, wherein said first light source projects light having a wavelength in the visible range, and said second light source projects light having a wavelength in the far infrared range.

Claim 15

The method of optically measuring the temperature of a plasma as set forth in claim 10, wherein the electrons temperature of said plasma is determined by solving in said processing means the equation ##EQU17## where, Te is the plasma electron temperature, T L the brightness temperature of the light source, λ the wavelength of the light generated by the light source, C 2 a correction factor, ξ the transmission coefficient of a polarizer for linearly polarizing the light, K 1 a correction factor for an optical system between the light source and the plasma, φ p the output from the detection means for detecting the P-polarized component, φ LS the intensity of the light flux after passing through the plasma, and φ S the output from the detection means for detecting the S-polarized component.

Claim 18

The method of optically measuring the electron temperature, electron density and conductivity of a plasma as set forth in claim 12, wherein the electron temperature of said plasma is determined by solving in said first processing means the equation ##EQU18## where, Te is the plasma electron temperature, T L the brightness temperature of the light source, λ the wavelength of the light generated by the light source, C 2 a correction factor, ξ the transmission coefficient of a polarizer for linearly polarizing the light, K 1 a correction factor for an optical system between the light source and the plasma, φ p the output from the detection means for detecting the P-polarized component, φ LS the intensity of the light flux after passing through the plasma, and φ S the output from the detection means for detecting the S-polarized component; and wherein the conductivity and electron density of said plasma are determined by solving in said second processing means the equations ##EQU19## where N is the electron density of the plasma, θ the Faraday rotation angle of said plasma measured by said analyzer, ω 0 the characteristic frequency of the plasma electrons, ω the frequency of the incident light, e a quantum of electricity, μ the mobility of electrons in the plasma and ##EQU20## B is the magnetic field intensity of the plasma, d the thickness of the plasma, m the mass of an electron, n the refractive index of the plasma, and c the velocity of light.

Claim 21

The method of optically measuring the electron density and conductivity of a plasma as set forth in claim 14, wherein the conductivity and electron density of said plasma are determined by solving in said processing means the equations ##EQU21## where N is the electron density of the plasma, θ the Faraday rotation angle of said plasma measured by said analyzer, ω 0 the characteristic frequency of the plasma electrons, ω the frequency of the incident light, e a quantum of electricity, μ the mobility of electrons in the plasma and ##EQU22## B is the magnetic field intensity of the plasma, d the thickness of the plasma, m the mass of an electron, n the refractive index of the plasma, and c the velocity of light.