Broadband infrared electro-optic modulator having a buried microstrip network

Claim 1

An electro-optic modulator for modulating an infrared laser signal with a microwave signal, in a system having a laser signal source and a microwave signal source, comprising: a thin-film optical waveguide, having first and second major surfaces spaced apart at a waveguide thickness, for providing a laser signal guide region and a microwave launcher region therebetween, said first major surface having optical coupling means disposed thereon at opposite ends of said guide region, said guide region providing guided propagation therethrough of laser signals presented from the laser signal source to said coupling means, said second major surface having a metallization layer disposed along that surface portion thereof which is coincident with said guide region; a microstrip electrode, disposed on said first major surface in register with said guide region, and having launching transformer electrodes at each end thereof, said transformer electrodes being disposed on said first major surface in register with said microwave launcher region, for coupling microwave signals from the microwave signal source to the microstrip electrode; and metal substrate means, having a substrate surface adapted to receive said waveguide second major surface; as characterized by said substrate surface including a channel portion formed therein in register with said microwave launcher region; said modulator further comprising dielectric wafer means, having first and second wafer surfaces spaced apart at a wafer thickness, said second wafer surface having a metallization layer disposed thereon and being bonded along said metallization layer to said substrate channel, said first wafer surface being bonded to said waveguide second major surface in register with said microwave launcher region, whereby said dielectric wafer means provides dissipation of the microwave signal power provided by the microwave signal source to each said launching transformer electrode.