High frequency eddy current probe with planar, spiral-like coil on flexible substrate for detecting flaws in semi-conductive material

Claim 1

Apparatus for detecting a flaw in the surface and/or sub-surface region of a semi-conductive material, the surface including at least in part a non-planar portion, comprising: a substantially planar, spiral-like, unilaminar copper coil having a wire diameter no greater than 2 mils adapted to be connected to an excitation signal source, said excitation signal source providing an excitation signal having a frequency equal to or greater than 7 megahertz, for generating a substantially uniform electromagnetic field extending normal to said coil when said coil is appropriately stimulated by said excitation signal source, the turns of said coil having sufficient spacing to minimize interwire capacitance at said frequency of excitation; a flexible insulative member for supporting said coil, wherein said coil can be conformed to the non-planar portion of the surface of the semi-conductive material by flexture of said member, whereby a constant liftoff distance between the non-planar surface of the semi-conductive material and the coil is obtainable; and terminal means coupled to said coil for connecting said coil to detection means, the detection means for determining changes in impedance in said coil when said coil is operationally disposed in relation to the surface and/or sub-surface region of the semi-conductive material and appropriately stimulated to generate the electromagnetic field.