Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
99 words
A method of making a catalytic-combustion sensor comprising: a rigid support having a flat support face; a metallic resistance-type heater film flatly adhered to the support face; and a catalyst film flatly adhered in heat-transmitting connection to the heater film, the method comprising the steps of: bonding the heater film to the support face of the rigid support; and thereafter reducing the thickness of the rigid support from between 0.3 mm and 1.0 mm to between 0.05 mm and 0.2 mm by exclusively machining the face of the support at an area corresponding to and opposite said heater film.
Claim 2
Independent Claim
99 words
A method of making a catalytic-combustion sensor comprising: a rigid support having a flat support face; a metallic resistance-type heater film flatly adhered to the support face; and a catalyst film flatly adhered in heat-transmitting connection to the heater film, the method comprising the steps of: bonding the heater film to the support face of the rigid support; and thereafter reducing the thickness of the rigid support from between 0.3 mm and 1.0 mm to between 0.05 mm and 0.2 mm by exclusively machining the face of the support at an area corresponding to and opposite said heater film.
Claim 3
Dependent Claim
36 words
The method defined in claim 1, further comprising the step, after bonding the heater film to the support and before machining the opposite face of the support, of bonding the catalyst film over the heater film.
Claim 4
Dependent Claim
38 words
The method defined in claim 2, further comprising the step, after bonding the catalyst film over the heater film and before machining the opposite face of the support, of bonding a diffusion protective layer over the catalyst film.
Claim 5
Dependent Claim
45 words
The method defined in claim 1 wherein the heater film is bonded to the support in a nonstraight preferably meandering path, the thickness of the support being reduced by machining in the opposite face of the support a groove in registration underneath the heater strip.
Claim 6
Dependent Claim
42 words
The method defined in claim 1, further comprising the step of forming the support to each side of the heater film with a row of transversely throughgoing holes thermally separating the support at the heater film from the rest of the support.
Claim 7
Dependent Claim
22 words
The method defined in claim 1, further comprising the step of providing thermal insulating spacers between the heater film and the support.
Claim 8
Dependent Claim
32 words
The method defined in claim 1 wherein the support is of a semiconducting material, the method further comprising the step of providing an insulating layer between the support and the heater film.
Claim 9
Dependent Claim
18 words
The method defined in claim 1, further comprising the step of mounting an integrated circuit on the support.
Claim 10
Dependent Claim
31 words
The method defined in claim 1 wherein the support is of a metal, the method further comprising the step of providing an insulating layer between the support and the heater film.
Claim 11
Dependent Claim
29 words
The method defined in claim 1, further comprising the step of providing an insulating layer of silicon oxide, silicon nitride, or glass between the support and the heater film.
Claim 12
Dependent Claim
27 words
The method defined in claim 1, further comprising the step of providing a temperature sensor on the opposite face of the support directly underneath the heater film.
Claim 13
Dependent Claim
11 words
A catalytic-combustion sensor made according to the method of claim 1.
Claim 14
Dependent Claim
30 words
The sensor defined in claim 12 wherein the heater film is made of platinum or gold and the catalyst film comprises a platinum-group compound including palladium, platinum, rhodium, or iridium.