Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
215 words
Apparatus for measuring characteristics of a circuit element, comprising: an SMU capable of producing an output voltage at a first output terminal connected to the circuit element under test, measuring the current flowing through the first output terminal, and producing a measurement signal at a second output terminal proportional to the measured current, or producing an output current at a first output terminal connected to the circuit element under test, measuring the voltage appearing at the first output terminal, and producing a measurement signal at a second output terminal porportional the the measured voltage; means responsive to the measurement signal and to a reference value, for producing an error signal representing the difference between the measurement signal and the reference value; a comparator responsive to the error signal to operate an integrator in two modes, in the first mode providing a varying output voltage or current to the first output terminal of the SMU until the error signal reaches zero for the first time, and thereafter entering the second mode, integrating the error signal to provide a negative feedback signal to the first output of the SMU to maintain the measurement signal at the reference value; and a control circuit for controlling the SMU, the comparator and the integrator and for setting the reference value.
Claim 2
Dependent Claim
215 words
Apparatus for measuring characteristics of a circuit element, comprising: an SMU capable of producing an output voltage at a first output terminal connected to the circuit element under test, measuring the current flowing through the first output terminal, and producing a measurement signal at a second output terminal proportional to the measured current, or producing an output current at a first output terminal connected to the circuit element under test, measuring the voltage appearing at the first output terminal, and producing a measurement signal at a second output terminal porportional the the measured voltage; means responsive to the measurement signal and to a reference value, for producing an error signal representing the difference between the measurement signal and the reference value; a comparator responsive to the error signal to operate an integrator in two modes, in the first mode providing a varying output voltage or current to the first output terminal of the SMU until the error signal reaches zero for the first time, and thereafter entering the second mode, integrating the error signal to provide a negative feedback signal to the first output of the SMU to maintain the measurement signal at the reference value; and a control circuit for controlling the SMU, the comparator and the integrator and for setting the reference value.
Claim 3
Dependent Claim
70 words
The apparatus of claim 1, wherein the control circuit comprises a memory for storing known parameters of the circuit element under test and means for deriving from the stored parameters the values for the initial output setting for the SMU, the reference value, the function for varying the integrator output in the first operating mode, and the summing weight and integration constant for the integrator in the second operating mode.
Claim 4
Dependent Claim
77 words
The apparatus of claim 1, comprising a plurality of SMUs connected to the terminals of the circuit element under test, having one SMU for producing a voltage or current applied to a first terminal of the circuit element under test; a second SMU for measuring the current flowing through the second terminal or the voltage appearing at the second terminal and producing a second measurement signal proportional to the current or voltage measured at the second terminal.
Claim 5
Dependent Claim
14 words
The apparatus of claim 4, further comprising means for displaying the second measurement signal.