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Multi-layered ferromagnetic film and method of manufacturing the same

Assignee: Hitachi Ltd
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Filing: 1986-10-14
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Granted: 1987-10-06
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Expires: 2006-10-14
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Abstract

Abstract The film is composed of an alternate lamination of unit iron layers and unit layers of ferromagnetic iron compound such as Fe3Al, Fe3Si, Fe3Ge and Fe3Ga. The thickness of the both unit layers is less than 70 ANGSTROM . The film has a high saturation magnetization more than 230 emu/g and a high thermal stability so that the film is particularly applicable to a magnetic head core.

Inventors

  • 👤 Matahiro Komuro
  • 👤 Yuzo Kozono
  • 👤 Takeshi Yasuda
  • 👤 Shinji Narishige
  • 👤 Masanobu Hanazono
  • 👤 Tetsuro Kuroda

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 02:53
CPC Classifications
B; B32; B32B; B32B15/00; B32B15/01; B82; B82Y; B82Y25/00; F; F16; F16L; F16L39/00; G; G11; G11B; G11B5/00; G11B5/62; G11B5/64; G11B5/66; G11B5/672; H; H01; H01F; H01F10/00; H01F10/08; H01F10/10; H01F10/18; H01F10/32; Y; Y10; Y10S; Y10S428/00; Y10S428/922; Y10S428/9265; Y10S428/928; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12632; Y10T428/12771; Y10T428/12861; Y10T428/12951; Y10T428/12958

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 62 words
A multi-layered ferromagnetic film comprising a plurality of unit iron layers and a plurality of unit ferromagnetic iron compound layers which are laminated alternately, said unit ferromagnetic iron compound layer essentially consists of at least one compound selected from the group consisting of Fe 3 Al, Fe 3 Si, Fe 3 Ge, Fe 3 Ga, Fe 3 Pt and Fe 3 Sn.
Claim 2
Dependent Claim 62 words
A multi-layered ferromagnetic film comprising a plurality of unit iron layers and a plurality of unit ferromagnetic iron compound layers which are laminated alternately, said unit ferromagnetic iron compound layer essentially consists of at least one compound selected from the group consisting of Fe 3 Al, Fe 3 Si, Fe 3 Ge, Fe 3 Ga, Fe 3 Pt and Fe 3 Sn.
Claim 3
Dependent Claim 21 words
A multi-layered ferromagnetic film according to claim 1, wherein the thickness of said unit iron layer is less than 70 Å.
Claim 4
Dependent Claim 23 words
A multi-layered ferromagnetic film according to claim 2, wherein the thickness of said unit ferromagnetic iron compound layer is less than 70 Å.
Claim 5
Dependent Claim 25 words
A multi-layered ferromagnetic film according to claim 3, wherein said unit ferromagnetic iron compound layer is Fe 3 Ga containing 20-35 atomic % of Ga.
Claim 6
Independent Claim 173 words
A method of manufacturing a multi-layered ferromagnetic film comprising: a step of depositing a ferromagnetic iron compound on a substrate to form a unit ferromagnetic iron compound layer with a predetermined thickness, said ferromagnetic iron compound essentially consists of at least one compound selected from the group consisting of Fe 3 Al, Fe 3 Si, Fe 3 Ge, Fe 3 Ga, Fe 3 Pt and Fe 3 Sn; a step of depositing an iron layer on said unit ferromagnetic iron compound layer to form a unit iron layer with a predetermined thickness; a step of depositing the ferromagnetic iron compound on said unit iron layer to form another unit ferromagnetic iron compound layer with a predetermined thickness; and a step of repeating said second and third depositing steps so as to form an alternate lamination of said unit ferromagnetic iron compound layers and said unit iron layers whereby the magnetic moment per iron atom in said unit iron layer is enhanced due to an increase of interatomic distance in said unit iron layer.
Claim 7
Independent Claim 173 words
A method of manufacturing a multi-layered ferromagnetic film comprising: a step of depositing a ferromagnetic iron compound on a substrate to form a unit ferromagnetic iron compound layer with a predetermined thickness, said ferromagnetic iron compound essentially consists of at least one compound selected from the group consisting of Fe 3 Al, Fe 3 Si, Fe 3 Ge, Fe 3 Ga, Fe 3 Pt and Fe 3 Sn; a step of depositing an iron layer on said unit ferromagnetic iron compound layer to form a unit iron layer with a predetermined thickness; a step of depositing the ferromagnetic iron compound on said unit iron layer to form another unit ferromagnetic iron compound layer with a predetermined thickness; and a step of repeating said second and third depositing steps so as to form an alternate lamination of said unit ferromagnetic iron compound layers and said unit iron layers whereby the magnetic moment per iron atom in said unit iron layer is enhanced due to an increase of interatomic distance in said unit iron layer.
Claim 8
Dependent Claim 67 words
A method of manufacturing a multi-layered ferromagnetic film according to claim 5, further comprising a step of subjecting said alternate lamination to a first heat treatment at a temperature of 200°-300° C. for a predetermined time in vacuum so as to stabilize the interfaces between said unit iron layers and said unit ferromagnetic iron compound layers, whereby the saturation magnetization of said multi-layered ferromagnetic film is enhanced.
Claim 9
Dependent Claim 66 words
A method of manufacturing a multi-layered ferromagnetic film according to claim 6, further comprising a step of subjecting said first heat treated alternate lamination to a second heat treatment at a temperature of 500°-800° C. for a predetermined time in vacuum so as to stabiize ordered lattices in said unit ferromagnetic iron compound layers whereby the saturation magnetization of said multi-layered ferromagnetic film is further enhanced.
Claim 10
Dependent Claim 60 words
A method of manufacturing multi-layered ferromagnetic film according to claim 5, further comprising a step of subjecting said alternate lamination to a heat treatment at a temperature of 500°-800° C. for a predetermined time in vacuum so as to stabilize ordered lattices in said unit ferromagnetic iron compound layers whereby the saturation magnetization of said multi-layered ferromagnetic film is enhanced.
Claim 11
Dependent Claim 66 words
A method of manufacturing multi-layered ferromagnetic film according to claim 5, further comprising a step of maintaining said substrate at a temperature of 150°-400° C. during said depositing steps of said ferromagnetic iron compound and said iron so as to stabilize the interfaces between said unit iron layers and said unit ferromagnetic iron compound layers, whereby the saturation magnetization of said multi-layered ferromagnetic film is enhanced.
Claim 12
Dependent Claim 48 words
A method of manufacturing a multi-layered ferromagnetic film according to claim 5, wherein said ferromagnetic iron compound is Fe 3 Ga containing 20-35 atomic % of Ga, and the thicknesses of said unit ferromagnetic iron compound layer and said unit iron layer are respectively less than 70 Å.

References Cited (Backward Citations)

US2920381A Cited
US3375091A Cited
US4103315A Cited
US4610935A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-10-05 1991-04-06 1991-10-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-10-05 1995-04-06 1995-10-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-10-05 1999-04-06 1999-10-06 $7700.00 Window Closed / Lapsed

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