Dust free storage container for a membrane assembly such as a pellicle and its method of use

Claim 2

An optical membrane assembly package, comprising: an optical membrane assembly including a circumferential frame having a front side and a back side and an optical membrane mounted to and extending across the entire extent of said frame; a container for storing said optical membrane assembly until the latter is placed into use, said container including a base member defining an upwardly facing circumferential shoulder supporting the front side of said circumferential frame along its entire extent such that the front or critical face of said optical membrane is maintained in spatial relationship with the rest of said base member, said container also including a cover disposed over said base member and the entire optical membrane assembly, and seal means disposed between and extending along the entire extent of the front side of said circumferential frame and said shoulder whereby to serve as a seal between the frame's front side and said shoulder in order to seal closed the front face of said optical membrane within said base member said sealing means being in the form of a continuous strip of adhesive which also serves to bond the optical membrane assembly to another surface such as a photomask when the assembly is placed in use.

Claim 3

A package according to claim 1 wherein the entire inner surface of each of said base members and said cover is colored black.

Claim 4

A package according to claim 1 wherein substantially the entire inner surface of each of said base member and said cover is coated with an antistatic coating.

Claim 5

A package according to claim 1 wherein said optical membrane is formed of a composition which includes an antistatic substance provided integrally throughout the body of said membrane.

Claim 6

A package according to claim 1 wherein said cover includes circumferential rib means for pressing down on the backside of said frame whereby to squeeze said sealing means between said frame's front side and said shoulder in order to enhance the sealing capability of said sealing means.

Claim 7

A package according to claim 1 wherein said optical membrane assembly is a pellicle and wherein the front face of said optical membrane is intended to be placed in direct confronting relationship with a photomask or other such working surface to be protected from ambient dust and other such particles.

Claim 8

A pellicle package assembly, comprising: a pellicle including a circumferential frame having a front side and a back side and an optical membrane mounted to and extending across the entire extent of said frame and including a front or critical face and a back face; a container for storing said pellicle until the latter is placed into use, said container including a base member having an internal surface substantially all of which is colored black and defining an upwardly facing circumferential shoulder supporting the front side of said circumferential frame along its entire extent such that the front face of said optical membrane is maintained in spatial relationship with the rest of the base member, said container also including a cover disposed over said base member and said pellicle and having an internal surface, substantially all of which is colored black, said cover also including circumferential rib means pressing down on the back side of said pellicle, in order to urge the latter against said circumferential shoulder; and seal means located within said container and extending between and along the entire extent of the front side of said circumferential frame and said shoulder whereby to seal closed the front face of said optical membrane, said sealing means being in the form of a continuous strip of adhesive which also serves to bond the pellicle to the photomask or other such working surface when the assembly is placed in use.

Claim 9

A pellicle package assembly, comprising: a pellicle including a circumferential frame having a front side and a back side and an optical membrane mounted to and extending across the entire extent of said frame and including a front or critical face and a back face; a container for storing said pellicle until the latter is placed into use, said container including a base member having an internal surface substantially all of which is colored black and defining an upwardly facing circumferential shoulder supporting the front side of said circumferential frame along its entire extent such that the front face of said optical membrane is maintained in spatial relationship with the rest of the base member, said container also including a cover disposed over said base member and said pellicle and having an internal surface, substantially all of which is colored black, said cover also including circumferential rib means pressing down on the back side of said pellicle, in order to urge the latter against said circumferential shoulder; and seal means located within said container and extending between and along the entire extent of the front side of said circumferential frame and said shoulder whereby to seal closed the front face of said optical membrane, said sealing means being in the form of a continuous strip of adhesive which also serves to bond the pellicle to the photomask or other such working surface when the assembly is placed in use.

Claim 10

A pellicle package according to claim 7 wherein substantially all of the inner surface of each of said base member and said cover member is coated with an anti-static coating and wherein said optical membrane is formed of a composition which includes an anti-static substance provided integrally throughout the body of said membrane.

Claim 11

A container for storing an optical membrane assembly such as a pellicle after the latter has been manufactured and before it is actually placed into use, said optical membrane assembly including a circumferential frame having a front side and a back side and an optical membrane with a front or critical face and a back face and mounted to and extending across the entire extent of said frame, said container comprising; a base member defining an upwardly facing shoulder configured to support the front side of said circumferential frame along its entire extent such that the front face of said optical membrane is maintained in spatial relationship with the rest of said base member; a cover disposed over said base member and its upwardly facing circumferential shoulder and cooperating with said base member so as to provide an internal compartment sufficiently large to receive said optical membrane assembly; and a continuous layer of adhesive sealing material located between and along the entire extent of said shoulder and the front side of the circumferential frame forming part of said optical membrane assembly when the latter is located within said container, whereby to provide a seal for closing the front face of said optical membrane within said base member said continuous layer of adhesive material being permanently affixed to the front side of said circumferential frame, whereby to also serve as a means of bonding the optical membrane assembly to another surface such as a photomask when the assembly is placed in use.

Claim 12

A container for storing an optical membrane assembly such as a pellicle after the latter has been manufactured and before it is actually placed into use, said optical membrane assembly including a circumferential frame having a front side and a back side and an optical membrane with a front or critical face and a back face and mounted to and extending across the entire extent of said frame, said container comprising; a base member defining an upwardly facing shoulder configured to support the front side of said circumferential frame along its entire extent such that the front face of said optical membrane is maintained in spatial relationship with the rest of said base member; a cover disposed over said base member and its upwardly facing circumferential shoulder and cooperating with said base member so as to provide an internal compartment sufficiently large to receive said optical membrane assembly; and a continuous layer of adhesive sealing material located between and along the entire extent of said shoulder and the front side of the circumferential frame forming part of said optical membrane assembly when the latter is located within said container, whereby to provide a seal for closing the front face of said optical membrane within said base member said continuous layer of adhesive material being permanently affixed to the front side of said circumferential frame, whereby to also serve as a means of bonding the optical membrane assembly to another surface such as a photomask when the assembly is placed in use.

Claim 13

A container according to claim 9 wherein the entire inner surface of each of said base member and said cover is colored a dark color, selected from black, dark blue, dark brown or dark red.

Claim 14

A container according to claim 9 wherein substantially the entire inner surface of each of said base member and said cover is coated with an anti-static coating.

Claim 15

A container according to claim 9 wherein said cover includes circumferential rib means for pressing down on and directly against the back side of said circumferential frame when the optical membrane assembly is disposed within said container, whereby to enhance the sealing capability of said sealing material.

Claim 18

A method according to claim 13 including the step of applying force to and along the entire extent of the back side of said circumferential frame in the direction of said circumferential shoulder by means forming part of said cover, whereby to enhance the seal between said circumferential frame and said shoulder.

Claim 19

A method according to claim 13 wherein said optical membrane assembly is a pellicle and wherein the front face of said optical membrane is intended to be placed in direct confronting relationship with a photomask or other such working surface to be protected from ambient dust and other such particles.