US4378953A
Expired / Lapsed
US
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Thin, optical membranes and methods and apparatus for making them
Assignee: Advanced Semiconductor Products Inc
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Filing: 1981-12-02
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Granted: 1983-04-05
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Expires: 2001-12-02
Abstract
Abstract Edge-supported and fully supported membranes having substantially uniform thickness, and substantially parallel surfaces, and having the capacity to transmit at least about 90% of incident light with very little diffraction, dispersion or absorption of incident light are made by forming a polymer/solvent mixture, spin-coating a film of the polymer from the mixture onto a rotatable surface, which may have a release agent thereon, and, where a release agent is present, joining a frame or other support to the membrane and removing the membrane with its attached support from the surface. Apparatus for making such membranes includes a dispenser for dispensing a polymer/solvent mixture onto a rotatable support; a device for spinning the rotatable support at gradually increasing speeds from a first to a second speed; and a device for maintaining the speed of rotation of the support at the second speed until the membrane forms.
Inventors
- 👤 Ray Winn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 06:14
CPC Classifications
B; B29; B29D; B29D11/00; B29D11/00634; B29C; B29C41/00; B29C41/02; B29C41/04
Claims Analysis
Total Claims: 49
Claim 1
Independent Claim
97 words
An optical membrane capable of being edge-supported and having a predetermined thickness in the range of about 0.5 to about 10 micrometers, with a precision of plus or minus about 2%, edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, and a capacity to transmit an average of at least about 91% of incident light with less than about 2% combined absorption and diffraction losses of said incident light over a span of wavelengths of incident light in the range of about 260 to about 1,000 nanometers.
Claim 2
Dependent Claim
97 words
An optical membrane capable of being edge-supported and having a predetermined thickness in the range of about 0.5 to about 10 micrometers, with a precision of plus or minus about 2%, edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, and a capacity to transmit an average of at least about 91% of incident light with less than about 2% combined absorption and diffraction losses of said incident light over a span of wavelengths of incident light in the range of about 260 to about 1,000 nanometers.
Claim 3
Dependent Claim
92 words
An optical membrane capable of being edge-supported and having a precise, predetermined thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, and a capacity to transmit an average of at least about 91% of incident light over a span of wavelengths of incident light where the span of wavelengths of said incident light is in the range of about 260 to 1,000 nanometers.
Claim 4
Dependent Claim
92 words
An optical membrane capable of being edge-supported and having a precise, predetermined thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, and a capacity to transmit an average of at least about 91% of incident light over a span of wavelengths of incident light where the span of wavelengths of said incident light is in the range of about 260 to 1,000 nanometers.
Claim 5
Dependent Claim
83 words
An optical membrane capable of being edge-supported and having a precise, predetermined thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, and a capacity to transmit an average of at least about 91% of incident light with less than about 3% combined absorption, diffraction and dispersion losses of said incident light where the wavelength span for the average transmission of incident light is in the range of about 260 to about 1,000 nanometers.
Claim 6
Dependent Claim
83 words
An optical membrane capable of being edge-supported and having a precise, predetermined thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, and a capacity to transmit an average of at least about 91% of incident light with less than about 3% combined absorption, diffraction and dispersion losses of said incident light where the wavelength span for the average transmission of incident light is in the range of about 260 to about 1,000 nanometers.
Claim 7
Dependent Claim
60 words
An optical membrane capable of being edge-supported and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, and the capacity to transmit an average of at least about 91% of incident light where the wavelengths of incident light range from about 260 to about 546 nanometers.
Claim 8
Dependent Claim
60 words
An optical membrane capable of being edge-supported and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, and the capacity to transmit an average of at least about 91% of incident light where the wavelengths of incident light range from about 260 to about 546 nanometers.
Claim 9
Dependent Claim
79 words
An optical membrane capable of being edge-supported and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, and the capacity to transmit about 99% of incident light at at least one predetermined wavelength of incident light in the range of about 260 to about 1,000 nanometers.
Claim 10
Dependent Claim
79 words
An optical membrane capable of being edge-supported and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, and the capacity to transmit about 99% of incident light at at least one predetermined wavelength of incident light in the range of about 260 to about 1,000 nanometers.
Claim 11
Dependent Claim
80 words
An optical membrane capable of being edge-supported and having a precise, predetermined thickness in the range of about 0.5 to about 10 micrometers with a precision of plus or minus about 2%, edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, and the capacity to transmit about 99% of incident light at at least one predetermined wavelength of incident light in the range of about 260 to about 546 nanometers.
Claim 12
Dependent Claim
80 words
An optical membrane capable of being edge-supported and having a precise, predetermined thickness in the range of about 0.5 to about 10 micrometers with a precision of plus or minus about 2%, edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, and the capacity to transmit about 99% of incident light at at least one predetermined wavelength of incident light in the range of about 260 to about 546 nanometers.
Claim 13
Dependent Claim
30 words
The optical membrane of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 wherein the optical membrane is made of a polymer.
Claim 14
Dependent Claim
31 words
The optical membrane of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 wherein the optical membrane is made of a thermoplastic polymer.
Claim 15
Dependent Claim
29 words
The optical membrane of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 wherein the optical membrane is made of nitrocellulose.
Claim 16
Dependent Claim
25 words
The membrane of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 wherein said membrane is edge-supported.
Claim 17
Dependent Claim
29 words
The membrane of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 wherein said membrane is carried upon a coplanar substrate.
Claim 18
Dependent Claim
29 words
The membrane defined in claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 wherein said membrane is carried upon a support.
Claim 19
Dependent Claim
27 words
The optical membrane of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 wherein said membrane is a pellicle.
Claim 20
Dependent Claim
47 words
The optical membrane of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 made by dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable surface under conditions sufficient to form said membrane from said polymer.
Claim 21
Dependent Claim
57 words
The membrane of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 and made by dispensing a polymer/solvent mixture onto a rotatable supporting surface, spinning said rotatable surface under conditions sufficient to form said membrane from said polymer, and removing said membrane after formation from said rotatable supporting surface.
Claim 22
Dependent Claim
74 words
The membrane of claim 1 or claim 2 or claim 3 or claim 4 or claim 5 or claim 6 made by dispensing a polymer/solvent mixture onto a rotatable supporting surface, spinning said rotatable surface under conditions sufficient to form said membrane from said polymer, bonding said membrane formed on said rotatable supporting surface to support means for said membrane, and removing said membrane from said rotatable supporting surface, joined to said support means.
Claim 23
Dependent Claim
80 words
An optical membrane capable of being edge-supported and having a precise, predetermined thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, with edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, said membrane being made by dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable surface under conditions sufficient to form said membrane from said polymer.
Claim 24
Dependent Claim
80 words
An optical membrane capable of being edge-supported and having a precise, predetermined thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, with edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, said membrane being made by dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable surface under conditions sufficient to form said membrane from said polymer.
Claim 25
Dependent Claim
42 words
The optical membrane of claim 17 wherein the method of making said membrane further comprises bonding the membrane formed on said rotatable supporting surface to support means therefor, and removing said membrane from said rotatable supporting surface, joined to said support means.
Claim 26
Dependent Claim
16 words
The optical membrane of claim 18 wherein said support means provides edge suppport for said membrane.
Claim 27
Dependent Claim
16 words
The optical membrane of claim 18 wherein said support means provides edge support for said membrane.
Claim 28
Dependent Claim
42 words
The optical membrane of claim 17 wherein the method of making said membrane further comprises bonding the membrane formed on said rotatable supporting surface to support means therefor, and removing said membrane from said rotatable supporting surface, joined to said support means.
Claim 29
Dependent Claim
105 words
An optical membrane capable of being edge-supported and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers, with edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, and a capacity to transmit an average of at least about 91% of incident light over a span of wavelengths of incident light in the range of about 260 to about 1,000 nanometers, said membrane being made by dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable surface under conditions sufficient to form said membrane from said polymer.
Claim 30
Dependent Claim
105 words
An optical membrane capable of being edge-supported and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers, with edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, and a capacity to transmit an average of at least about 91% of incident light over a span of wavelengths of incident light in the range of about 260 to about 1,000 nanometers, said membrane being made by dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable surface under conditions sufficient to form said membrane from said polymer.
Claim 31
Dependent Claim
42 words
The optical membrane of claim 22 wherein the method of making said membrane further comprises bonding the membrane formed on said rotatable supporting surface to support means therefor, and removing said membrane from said rotatable supporting surface, joined to said support means.
Claim 32
Dependent Claim
16 words
The optical membrane of claim 22 wherein said support means provides edge support for said membrane.
Claim 33
Dependent Claim
106 words
An optical membrane capable of being edge-supported, and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers with edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, said membrane having the capacity to transmit about 99% of incident light at at least one predetermined wavelength of light in the range of about 260 to about 1,000 nanometers, said membrane being made by a process comprising dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable supporting surface under conditions sufficient to form said membrane from said polymer.
Claim 34
Dependent Claim
106 words
An optical membrane capable of being edge-supported, and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers with edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, said membrane having the capacity to transmit about 99% of incident light at at least one predetermined wavelength of light in the range of about 260 to about 1,000 nanometers, said membrane being made by a process comprising dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable supporting surface under conditions sufficient to form said membrane from said polymer.
Claim 35
Dependent Claim
84 words
An optical membrane capable of being edge-supported, and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, said membrane being a pellicle with a capacity to transmit an average of at least about 91% of incident light where the incident light wavelengths range from about 260 nanometers to about 450 nanometers.
Claim 36
Dependent Claim
84 words
An optical membrane capable of being edge-supported, and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, edge-to-edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters, said membrane being a pellicle with a capacity to transmit an average of at least about 91% of incident light where the incident light wavelengths range from about 260 nanometers to about 450 nanometers.
Claim 37
Dependent Claim
37 words
The membrane of claim 26, said membrane being made by a process comprising dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable surface under conditions sufficient to form said membrane from said polymer.
Claim 38
Dependent Claim
42 words
The membrane of claim 27 wherein the method of making said membrane further comprises bonding said membrane on said rotatable supporting surface to support means for said membrane, and removing said membrane from said rotatable supporting surface, joined to said support means.
Claim 39
Dependent Claim
16 words
The optical membrane of claim 28 wherein said support means provides edge support for said membrane.
Claim 40
Dependent Claim
63 words
An optical membrane capable of being edge-supported and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2% said membrane being made by a process comprising dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable surface under conditions sufficient to form said membrane from said polymer.
Claim 41
Dependent Claim
63 words
An optical membrane capable of being edge-supported and having a predetermined, precise thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2% said membrane being made by a process comprising dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable surface under conditions sufficient to form said membrane from said polymer.
Claim 42
Dependent Claim
43 words
The optical membrane of claim 30 wherein the method of making said membrane further comprises bonding said membrane on said rotatable supporting surface of support means for said membrane, and removing said membrane from said rotatable supporting surface, joined to said support means.
Claim 43
Dependent Claim
16 words
The optical membrane of claim 30 wherein said support means provides edge support for said membrane.
Claim 44
Dependent Claim
95 words
An optical membrane, capable of being edge-supported, and having a precise, predetermined thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, edge to edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters and a capacity to transmit at least one predetermined percentage of incident light in the range of about 96% to about 99% of incident light over a range of wavelengths of incident light in the range of about 260 to about 1,000 nanometers.
Claim 45
Dependent Claim
95 words
An optical membrane, capable of being edge-supported, and having a precise, predetermined thickness in the range of about 0.5 to about 10 micrometers, the precision being plus or minus about 2%, edge to edge variations in said thickness of less than about 2% over a distance of at least about 2.5 centimeters and a capacity to transmit at least one predetermined percentage of incident light in the range of about 96% to about 99% of incident light over a range of wavelengths of incident light in the range of about 260 to about 1,000 nanometers.
Claim 46
Dependent Claim
36 words
The optical membrane of claim 33, said membrane being made by dispensing a polymer/solvent mixture onto a rotatable supporting surface, and spinning said rotatable supporting surface under conditions sufficient to form said membrane from said polymer.
Claim 47
Dependent Claim
44 words
The optical membrane of claim 33 wherein the method of making said membrane further comprises bonding said membrane formed on said rotatable supporting surface to support means for said membrane, and removing said membrane from said rotatable supporting surface, joined to said support means.
Claim 48
Dependent Claim
16 words
The optical membrane of claim 35 wherein said support means provides edge support for said membrane.
Claim 49
Dependent Claim
43 words
The optical membrane of claim 17 or claim 18 or claim 22 or claim 23 or claim 25 or claim 21 or claim 28 or claim 31 or claim 34 or claim 35 wherein said rotatable supporting surface has a release agent thereon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-04-04 | 1986-10-04 | 1987-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-04-04 | 1990-10-04 | 1991-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-04-04 | 1994-10-04 | 1995-04-05 | $7700.00 | Window Closed / Lapsed |