Abstract A source of a beam of ions includes in a housing a cathode filament, an anode spaced from the cathode and housing an ion emission opening therethrough and an intermediate electrode between the cathode and anode and having an opening therethrough in alignment with the opening in the anode. An inlet opening extends through the housing into the space between the anode and the intermediate electrode to admit a flow of the gas to be ionized into the housing. An outlet opening is through the housing adjacent the cathode and a pump is connected to the outlet opening. In the operation of the ion source a flow of pure ionizing gas is provided through the housing and over the cathode. Some of the gas is ionized to generate the desired ions and the rest of the gas is drawn out of the housing to remove impurities generated at the cathode and thereby increase the lifetime of the cathode.
In an ion beam source which includes within a housing a filament cathode, an anode spaced from the cathode and having an opening therethrough, an intermediate electrode between the anode and the cathode and having an opening therethrough in alignment with the opening in the anode, means for providing a magnetic field within said housing, and means for admitting a gas to be ionized into the housing between the anode and the intermediate electrode to create an arc discharge, the improvement comprising an outlet opening through the housing on the side of the cathode away from the anode and means for causing a flow of the ionizing gas over the cathode and out of the housing through said opening so that the gas removes impurities formed at the cathode.
Claim 2
Dependent Claim
129 words
In an ion beam source which includes within a housing a filament cathode, an anode spaced from the cathode and having an opening therethrough, an intermediate electrode between the anode and the cathode and having an opening therethrough in alignment with the opening in the anode, means for providing a magnetic field within said housing, and means for admitting a gas to be ionized into the housing between the anode and the intermediate electrode to create an arc discharge, the improvement comprising an outlet opening through the housing on the side of the cathode away from the anode and means for causing a flow of the ionizing gas over the cathode and out of the housing through said opening so that the gas removes impurities formed at the cathode.
Claim 3
Dependent Claim
42 words
An ion beam source in accordance with claim 1, wherein the means for causing a flow of the ionizing gas over the cathode includes a pump, a pipe connected between the pump and the outlet opening and a valve in the pipe.
Claim 4
Dependent Claim
15 words
An ion beam source in accordance with claim 2 wherein the pipe is electrically insulated.
Claim 5
Dependent Claim
19 words
An ion beam source in accordance with claim 3 wherein the pipe is made of an electrically insulating material.
Claim 6
Dependent Claim
25 words
An ion beam source in accordance with claim 4 wherein the pipe is about one inch in diameter and 8 to 10 feet in length.