Patent US4696573A successfully refreshed from Google Patents.
US4696573A
Expired / Lapsed
US
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Dual shear wavefront sensor
Assignee: Goodrich Corp
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Filing: 1985-07-03
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Granted: 1987-09-29
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Expires: 2005-07-03
Abstract
Abstract A wavefront of light is focused upon a first shearing interferometer having a relatively large shear and small dynamic range and a relatively minor portion of the light is focused upon a second shearing interferometer having a relatively small shear but large dynamic range. Owing to the limited dynamic range of the first shearing interferometer a plurality of a plurality of virtual candidate measurements are manifest which are compared with the temporally and/or spatially averaged values of each measurement produced by the second shearing interferometer and the closest match is employed to obtain a highly accurate unambiguous reading of the wavefront slope measurements.
Inventors
- 👤 Richard A. Hutchin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:15
CPC Classifications
G; G01; G01J; G01J9/00; G01J9/02; G01J9/0215
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
207 words
A method of measuring a given wavefront of light with a first shearing interferometer having a given shear and dynamic range, and with a second interferometer having a relatively small shear with respect to said given shear and having a relatively large dynamic range comprising the steps of: a. directing most of said light of said wavefront to said first interferometer and at least a portion of the remaining light of said wavefront to said second interferometer; b. utilizing said first interferometer to produce a first set of phase difference measurements having values indicative of wavefront slopes, each measurement of said first set having a plurality of virtual candidate measurements due to measurement ambiguity produced by said large shear; c. utilizing said second interferometer to produce a second set of phase difference measurements having values indicative of wavefront slopes; d. comparing each difference measurement of said second set of measurements with said virtual candidate measurements of each corresponding difference measurement of said first set; e. determining for each measurement of step d which of said candidate measurements are closest to the corresponding measurement of said second set; and f. utilizing the closest candidate measurements determined in accordance with step e to measure the shape of said wavefront.
Claim 2
Independent Claim
207 words
A method of measuring a given wavefront of light with a first shearing interferometer having a given shear and dynamic range, and with a second interferometer having a relatively small shear with respect to said given shear and having a relatively large dynamic range comprising the steps of: a. directing most of said light of said wavefront to said first interferometer and at least a portion of the remaining light of said wavefront to said second interferometer; b. utilizing said first interferometer to produce a first set of phase difference measurements having values indicative of wavefront slopes, each measurement of said first set having a plurality of virtual candidate measurements due to measurement ambiguity produced by said large shear; c. utilizing said second interferometer to produce a second set of phase difference measurements having values indicative of wavefront slopes; d. comparing each difference measurement of said second set of measurements with said virtual candidate measurements of each corresponding difference measurement of said first set; e. determining for each measurement of step d which of said candidate measurements are closest to the corresponding measurement of said second set; and f. utilizing the closest candidate measurements determined in accordance with step e to measure the shape of said wavefront.
Claim 3
Dependent Claim
102 words
The method of claim 1 wherein step e. is performed in accordance with the algorithm: M'=M 1 +2R 1 INT[(M 2 -M 1 /2R 1 ] wherein M' is the final output measurement while M 1 is the first measurement at a first matrix position of the first set of phase difference measurements; M 2 is the averaged phase difference measurement of the third set of measurements at the corresponding given matrix position; R 1 is the dynamic range of the first shearing interferometer; R 2 is the dynamic range of the second shearing interferometer and INT is the nearest integer function.
Claim 4
Dependent Claim
27 words
The method of claim 1 wherein over 80% of the light of said wavefront is directed at said first interferometer, and the remainder at said second interferometer.
Claim 5
Dependent Claim
27 words
The method of claim 2 wherein over 80% of the light of said wavefront is directed at said first interferometer, and the remainder at said second interferometer.
Claim 6
Independent Claim
228 words
A method of measuring a given wavefront of light with a first shearing interferometer having a given shear and dynamic range, and with a second interferometer having a relatively small shear with respect to said given shear and having a relatively large dynamic range comprising the steps of: a. directing most of said light of said wavefront to said first interferometer and at least a portion of the remaining light of said wavefront to said second interferometer; b. utilizing said first interferometer to produce a first set of phase difference measurements having values indicative of wavefront slopes, each measurement of said first set having a plurality of virtual candidate measurements due to measurement ambiguity produced by said large shear; c. utilizing said second interferometer to produce a second set of phase difference measurements having values indicative of wavefront slopes; d. producing a third set of phase difference measurements by spatially averaging groups of neighboring difference measurements of said second set; e. comparing each difference measurement of said third set of measurements with said virtual candidate measurements of each corresponding difference measurement of said first set; f. determining for each measurement of step e which of said candidate measurements are closest to the corresponding measurement of said second set; and g. utilizing the closest candidate measurements determined in accordance with step f to measure the shape of said wavefront.
Claim 7
Independent Claim
228 words
A method of measuring a given wavefront of light with a first shearing interferometer having a given shear and dynamic range, and with a second interferometer having a relatively small shear with respect to said given shear and having a relatively large dynamic range comprising the steps of: a. directing most of said light of said wavefront to said first interferometer and at least a portion of the remaining light of said wavefront to said second interferometer; b. utilizing said first interferometer to produce a first set of phase difference measurements having values indicative of wavefront slopes, each measurement of said first set having a plurality of virtual candidate measurements due to measurement ambiguity produced by said large shear; c. utilizing said second interferometer to produce a second set of phase difference measurements having values indicative of wavefront slopes; d. producing a third set of phase difference measurements by spatially averaging groups of neighboring difference measurements of said second set; e. comparing each difference measurement of said third set of measurements with said virtual candidate measurements of each corresponding difference measurement of said first set; f. determining for each measurement of step e which of said candidate measurements are closest to the corresponding measurement of said second set; and g. utilizing the closest candidate measurements determined in accordance with step f to measure the shape of said wavefront.
Claim 8
Dependent Claim
102 words
The method of claim 5 wherein step f is performed in accordance with the algorithm: M'=M 1 +2R 1 INT[(M 2 -M 1 )/2R 1 ] wherein M' is the final output measurement while M 1 is the first measurement at a first matrix position of the first set of phase difference measurements; M 2 is the averaged phase difference measurement of the third set of measurements at the corresponding given matrix position; R 1 is the dynamic range of the first shearing interferometer; R 2 is the dynamic range of the second shearing interferometer and INT is the nearest integer function.
Claim 9
Dependent Claim
27 words
The method of claim 5 wherein about 80% of the light of said wavefront is directed at said first interferometer, and the remainder at said second interferometer.
Claim 10
Dependent Claim
27 words
The method of claim 6 wherein over 80% of the light of said wavefront is directed at said first interferometer, and the remainder at said second interferometer.
Claim 11
Independent Claim
234 words
A method of measuring a given wavefront of light with a first shearing interferometer having a given shear and dynamic range, and with a second interferometer having a relatively small shear with respect to said given shear and having a relatively large dynamic range comprising the steps of: a. directing most of said light of said wavefront to said first interferometer and at least a portion of the remaining light of said wavefront to said second interferometer; b. utilizing said first interferometer to produce a first set of phase difference measurements having values indicative of wavefront slopes, each measurement of said first set having a plurality of virtual candidate measurements due to measurement ambiguity produced by said large shear; c. utilizing said second interferometer to sequentially produce a plurality of second sets of phase difference measurements having values indicative of wavefront slopes; d. producing a third set of phase difference measurements by temporarily averaging the difference measurements of said second sets over a given time period; e. comparing each difference measurement of said third set of measurements with said virtual candidate measurements of each corresponding difference measurement of said first set; f. determining for each measurement of step e which of said candidate measurements are closest to the corresponding measurement of said third set; and g. utilizing the closest candidate measurements determined in accordance with step f. to measure the shape of said wavefront.
Claim 12
Independent Claim
234 words
A method of measuring a given wavefront of light with a first shearing interferometer having a given shear and dynamic range, and with a second interferometer having a relatively small shear with respect to said given shear and having a relatively large dynamic range comprising the steps of: a. directing most of said light of said wavefront to said first interferometer and at least a portion of the remaining light of said wavefront to said second interferometer; b. utilizing said first interferometer to produce a first set of phase difference measurements having values indicative of wavefront slopes, each measurement of said first set having a plurality of virtual candidate measurements due to measurement ambiguity produced by said large shear; c. utilizing said second interferometer to sequentially produce a plurality of second sets of phase difference measurements having values indicative of wavefront slopes; d. producing a third set of phase difference measurements by temporarily averaging the difference measurements of said second sets over a given time period; e. comparing each difference measurement of said third set of measurements with said virtual candidate measurements of each corresponding difference measurement of said first set; f. determining for each measurement of step e which of said candidate measurements are closest to the corresponding measurement of said third set; and g. utilizing the closest candidate measurements determined in accordance with step f. to measure the shape of said wavefront.
Claim 13
Dependent Claim
102 words
The method of claim 9 wherein step f is performed in accordance with the algorithm: M'=M 1 +2R 1 INT[(M 2 -M 1 )/2R 1 ] wherein M' is the final output measurement while M 1 is the first measurement at a first matrix position of the first set of phase difference measurements; M 2 is the averaged phase difference measurement of the third set of measurements at the corresponding given matrix position; R 1 is the dynamic range of the first shearing interferometer; R 2 is the dynamic range of the second shearing interferometer and INT is the nearest integer function.
Claim 14
Dependent Claim
27 words
The method of claim 9 wherein over 80% of the light of said wavefront is directed at said first interferometer, and the remainder at said second interferometer.
Claim 15
Dependent Claim
27 words
The method of claim 10 wherein over 80% of the light of said wavefront is directed at said first interferometer, and the remainder at said second interferometer.
Claim 16
Independent Claim
283 words
A method of measuring a given wavefront of light received at a measuring aperture having a plurality of sub-apertures with a first shearing interferometer having a given shear and dynamic range, and with a second interferometer having a relatively small shear with respect to said given shear and having a relatively large dynamic range comprising the steps of: a. directing most of said light of said wavefront to said first interferometer and at least a portion of the remaining light of said wavefront to said second interferometer; b. utilizing said first interferometer to produce a first set of phase difference measurements having values indicative of wavefront slopes, arranged in a first matrix having a plurality of loops of said difference measurements, each loop corresponding to a sub-aperture and each measurement of said first set having a plurality of virtual candidate measurements due to measurement ambiguity produced by said large shear; c. utilizing said second interferometer to sequentially produce a plurality of second sets of phase difference measurements having values indicative of wavefront slopes. d. producing a third set of phase difference measurements by temporally averaging the difference measurements of said second sets over a given time period and by spatially averaging groups of neighboring difference measurements within at least one set of said second sets; e. comparing each difference measurement of said third set of measurements with said virtual candidate measurements of each corresponding difference measurement of said first set; f. determining for each measurement of step e which of said candidate measurements are closest to the corresponding measurement of said second set; and g. utilizing the closest candidate measurements determined in accordance with step f. to measure the shape of said wavefront.
Claim 17
Independent Claim
283 words
A method of measuring a given wavefront of light received at a measuring aperture having a plurality of sub-apertures with a first shearing interferometer having a given shear and dynamic range, and with a second interferometer having a relatively small shear with respect to said given shear and having a relatively large dynamic range comprising the steps of: a. directing most of said light of said wavefront to said first interferometer and at least a portion of the remaining light of said wavefront to said second interferometer; b. utilizing said first interferometer to produce a first set of phase difference measurements having values indicative of wavefront slopes, arranged in a first matrix having a plurality of loops of said difference measurements, each loop corresponding to a sub-aperture and each measurement of said first set having a plurality of virtual candidate measurements due to measurement ambiguity produced by said large shear; c. utilizing said second interferometer to sequentially produce a plurality of second sets of phase difference measurements having values indicative of wavefront slopes. d. producing a third set of phase difference measurements by temporally averaging the difference measurements of said second sets over a given time period and by spatially averaging groups of neighboring difference measurements within at least one set of said second sets; e. comparing each difference measurement of said third set of measurements with said virtual candidate measurements of each corresponding difference measurement of said first set; f. determining for each measurement of step e which of said candidate measurements are closest to the corresponding measurement of said second set; and g. utilizing the closest candidate measurements determined in accordance with step f. to measure the shape of said wavefront.
Claim 18
Dependent Claim
102 words
The method of claim 13 wherein step f. is performed in accordance with the algorithm: M'=M 1 +2R 1 INT[(M 2 -M 1 )/2R 1 ] wherein M' is the final output measurement while M 1 is the first measurement at a first matrix position of the first set of phase difference measurements; M 2 is the averaged phase difference measurement of the third set of measurements at the corresponding given matrix position; R 1 is the dynamic range of the first shearing interferometer; R 2 is the dynamic range of the second shearing interferometer and INT is the nearest integer function.
Claim 19
Dependent Claim
27 words
The method of claim 13 wherein over 80% of the light of said wavefront is directed at said first interferometer, and the remainder at said second interferometer.
Claim 20
Dependent Claim
27 words
The method of claim 14 wherein over 80% of the light of said wavefront is directed at said first interferometer, and the remainder at said second interferometer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-09-28 | 1991-03-30 | 1991-09-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-09-28 | 1995-03-30 | 1995-09-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-09-28 | 1999-03-30 | 1999-09-29 | $7700.00 | Window Closed / Lapsed |