Surface inspection apparatus

Claim 2

A surface inspection apparatus for inspecting the condition of an aspherical subject surface, comprising: emitting means for emtting a parallel light beam; a carrier frequency hologram; light dividing means for dividing the light beam emitted from the emitting means into an object light directed toward the subject surface and a reference light directed toward the hologram; an optical system for applying the object light at right angles to the subject surface and directing the applied object light toward the hologram; and selecting means for selectively extracting zeroth-order diffracted rays of the reference light passed through the hologram and Nth-order diffracted rays of the object light passed through the hologram and causing the diffracted rays to interfere with each other, said hologram being designed so that the Nth-order diffracted rays of the object light have the same wave front as the zeroth-order diffracted rays of the reference light, and having a carrier frequency f<3·Δf, where Δf represents the maximum frequency bandwidth of the transmitted rays of the object light, wherein the condition of the subject surface is judged from interference fringes of the diffracted rays which are caused to interfere with each other.

Claim 3

The inspection apparatus according to claim 1, wherein said hologram is a computer hologram so designed that the negative or positive first diffracted rays of the object light have the same wave front as the zeroth-order diffracted rays of the reference light.

Claim 4

The inspection apparatus according to claim 1, wherein said selecting means includes a converging lens for converging the diffracted rays of the reference light and the object light passed through the hologram, and a space frequency filter disposed near the focus of the converging lens and permitting selective transmission of the zeroth-order diffracted rays of the reference light and the Nth-order diffracted rays of the object light.

Claim 5

The inspection apparatus according to claim 1, wherein said light dividing means includes a translucent mirror adapted to reflect about one-half of the light beam emitted from the emitting means as the object light toward the subject surface and to transmit the remaining light beam as the reference light, and a reflecting surface for reflecting the transmitted reference light toward the translucent mirror, the reference light reflected by the reflecting surface being reflected toward the hologram by the translucent mirror.

Claim 6

The inspection apparatus according to claim 1, wherein said emitted means includes a laser oscillator, a lens for diverging the laser beam emitted from the laser oscillator, and a collimator lens for collimating the diverged laser beam.

Claim 7

The inspection apparatus according to claim 1, wherein said light dividing means includes means for adjusting the intensity of the reference light and the object light so that the intensity of the zeroth-order diffracted rays of the reference light is substantially equal to that of the Nth-order diffracted rays of the object light.

Claim 8

The inpection apparatus according to claim 6, wherein said light dividing means includes a translucent mirror for reflecting the light beam emitted from the emitting means toward the subject surface, and a reference translucent mirror disposed between the translucent mirror and the subject surface and adapted to transmit about one-half of the light beam as an object light and to reflect the remaining half as a reference light toward the hologram.

Claim 9

The inspection apparatus according to claim 7, wherein said reference translucent mirror includes a translucent mirror surface facing the subject surface, said translucent mirror surface forming said adjusting means.

Claim 10

The inspection apparatus according to claim 8, wherein the reflectivity R of said translucent mirror surface is given by ##EQU2## where K is the Nth-order diffraction efficiency of the hologram, T is the transmission factor of the hologram, r is the reflectivity of the subject surface, and a is the absorption efficiency of the translucent mirror surface.

Claim 11

The inspection apparatus according to claim 6, wherein said light dividing means includes a translucent mirror adapted to reflect about one-half of the light beam emitted from the emitting means as the object light toward the subject surface and to transmit the remaining light beam as the reference light, and a reflecting surface for reflecting the transmitted reference light toward the translucent mirror, the reference light reflected by the reflecting surface being reflected toward the hologram by the translucent mirror.

Claim 12

The inspection apparatus according to claim 10, wherein said reflecting surface constitutes said adjusting means, and the reflectivity R of the reflecting surface is given by R=(rK/T), where K is the Nth-order diffraction efficiency of the hologram, T is the transmission factor of the hologram, and r is the reflectivity of the subject surface.

Claim 13

The inspection apparatus according to claim 1, which further comprises observing means for observing the interference fringes of the Nth-order diffracted rays of the object light and the zeroth-order diffracted rays of the reference light.

Claim 14

The inspection apparatus according to claim 12, wherein said observing means includes a screen disposed on the opposite side of the selecting means to the light dividing means.

Claim 15

A surface inspection apparatus for inspecting the condition of an aspherical subject surface, comprising: emitting means for emitting a parallel light beam; a hologram; light dividing means for dividing the light beam emitted from the emitting means into an object light directed toward the subject surface and a reference light directed toward the hologram, said light dividing means including a translucent mirror for reflecting the light beam emitted from the emitting means toward the subject surface, and a reference translucent mirror disposed between the translucent mirror and the subject surface and adapted to transmit about one-half of the light beam as an object light and to reflect the remaining half as a reference light toward the hologram; an optical system for applying the object light at right angles to the subject surface and directing the applied object light toward the hologram; and selecting means for selectively extracting zeroth-order diffracted rays of the reference light passed through the hologram and Nth-order diffracted rays of the object light passed through the hologram and causing the diffracted rays to interfere with each other, said hologram being designed so that the Nth-order diffracted rays of the object light have the same wave front as the zeroth-order diffracted rays of the reference light, wherein the condition of the subject surface is judged from interference fringes of the diffracted rays which are caused to interfere with each other.

Claim 16

A surface inspection apparatus for inspecting the condition of an aspherical subject surface, comprising: emitting means for emitting a parallel light beam; a hologram; light dividing means for dividing the light beam emitted from the emitting means into an object light directed toward the subject surface and a reference light directed toward the hologram, said light dividing means including a translucent mirror for reflecting the light beam emitted from the emitting means toward the subject surface, and a reference translucent mirror disposed between the translucent mirror and the subject surface and adapted to transmit about one-half of the light beam as an object light and to reflect the remaining half as a reference light toward the hologram; an optical system for applying the object light at right angles to the subject surface and directing the applied object light toward the hologram; and selecting means for selectively extracting zeroth-order diffracted rays of the reference light passed through the hologram and Nth-order diffracted rays of the object light passed through the hologram and causing the diffracted rays to interfere with each other, said hologram being designed so that the Nth-order diffracted rays of the object light have the same wave front as the zeroth-order diffracted rays of the reference light, wherein the condition of the subject surface is judged from interference fringes of the diffracted rays which are caused to interfere with each other.

Claim 17

The inspection apparatus according to claim 14, wherein said reference translucent mirror includes a translucent mirror surface facing the subject surface.

Claim 18

The inspection apparatus according to claim 14, wherein said optical system includes a convergent lens disposed between the translucent mirror and the reference translucent mirror and adapted to apply the light beam to the subject surface and to direct the light beam reflected by the subject surface toward the hologram.

Claim 19

The inspection apparatus according to claim 16, wherein said reference translucent mirror is located on the same side as the convergent lens with respect to the focus of the converging lens.

Claim 20

The inspection apparatus according to claim 16, wherein said reference translucent mirror is located on the same side as the subject surface with respect to the focus of the convergent lens.

Claim 21

The inspection apparatus according to claim 14, wherein said optical system includes a convergent lens disposed between the translucent mirror and the reference translucent mirror and adapted to apply the light beam to the subject surface, and a reflecting surface located on the opposite side of the subject surface to the convergent lens and adapted to reflect the light beam transmitted through the subject surface toward the hologram.

Claim 22

The inspection apparatus according to claim 14, wherein said light dividing means includes means for adjusting the intensity of the reference light and the object light so that the intensity of the zeroth-order diffracted rays of the reference light is substantially equal to that of the Nth-order diffracted rays of the object light.

Claim 23

The inspection apparatus according to claim 20, wherein said light dividing means includes a translucent mirror for reflecting the light beam emitted from the emitting means toward the subject surface, and a reference translucent mirror disposed between the translucent mirror and the subject surface and adapted to transmit about one-half of the light beam as an object light and to reflect the remaining half as a reference light toward the hologram.

Claim 24

The inspection apparatus according to claim 21, wherein said reference translucent mirror includes a translucent mirror surface facing the subject surface, said translucent mirror surface forming said adjusting means.

Claim 25

The inspection apparatus according to claim 22, wherein the reflectivity R of said translucent mirror surface is given by ##EQU3## where K is the Nth-order diffraction efficiency of the hologram, T is the transmission factor of the hologram, r is the reflectivity of the subject surface, and a is the absorption efficiency of the translucent mirror surface.

Claim 26

The inspection apparatus according to claim 20, wherein said light dividing means includes a translucent mirror adapted to reflect about one-half of the light beam emitted from the emitting means as the object light toward the subject surface and to transmit the remaining light beam as the reference light, and a reflecting surface for reflecting the transmitted reference light toward the translucent mirror, the reference light reflected by the reflecting surface being reflected toward the hologram by the translucent mirror.

Claim 27

The inspection apparatus according to claim 10, wherein said reflecting surface constitutes said adjusting means, and the reflectivity R of the reflecting surface is given by R=(rK/T), where K is the Nth-order diffraction efficiency of the hologram, T is the transmission factor of the hologram, and r is the reflectivity of the subject surface.

Claim 28

The inspection apparatus according to claim 14, which further comprises observing means for observing the interference fringes of the Nth-order diffracted rays of the object light and the zeroth-order diffracted rays of the reference light.

Claim 29

The inspection apparatus according to claim 26, wherein said observing means includes a screen disposed on the opposite side of the selecting means to the light dividing means.

Claim 30

The inspection apparatus according to claim 1, wherein said light dividing means includes a translucent mirror for reflecting the light beam emitted from the emitting means toward the subject surface, and a reference translucent mirror disposed between the translucent mirror and the subject surface and adapted to transmit about one-half of the light beam as an object light and to reflect the remaining half as a reference light toward the hologram.

Claim 31

The inspection apparatus according to claim 28, wherein said reference translucent mirror includes a translucent mirror surface facing the subject surface.

Claim 32

The inspection apparatus according to claim 28, wherein said optical system includes a convergent lens disposed between the translucent mirror and the reference translucent mirror and adapted to apply the light beam to the subject surface and to direct the light beam reflected by the subject surface toward the hologram.

Claim 33

The inspection apparatus according to claim 30, wherein said reference translucent mirror is located on the same side as the convergent lens with respect to the focus of the converging lens.

Claim 34

The inspection apparatus according to claim 30, wherein said reference translucent mirror is located on the same side as the subject surface with respect to the focus of the convergent lens.

Claim 35

The inspection apparatus according to claim 28, wherein said optical system includes a convergent lens disposed between the translucent mirror and the reference translucent mirror and adapted to apply the light beam to the subject surface, and a reflecting surface located on the opposite side of the subject surface to the convergent lens and adapted to reflect the light beam transmitted through the subject surface toward the hologram.