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US4694567A
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Method for making a superconducting gradiometer having a three-dimensional structure and associated connecting lines for a device for measuring weak magnetic fields
Assignee: Siemens AG
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Filing: 1985-11-06
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Granted: 1987-09-22
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Expires: 2005-11-06
Abstract
Abstract For manufacturing a gradiometer having a three-dimensional structure for a device for measuring magnetic fields with field intensities down to below 10 -10 T, the superconducting gradiometer coils are arranged on a support body and are coupled by means of superconducting connecting lines and a coupling coil to a superconducting quantum interference element (SQUID) which is located on a substrate body of its own. These gradiometers should be capable of being linked to the respectively assigned SQUID in a simple manner. For this purpose, the gradiometer coils and at least the associated connecting lines are applied onto a common three-dimensional support body in at least one coating operation which is either preceded by a lithographic process for the fixation of the position of the corresponding conductor runs, or is followed by an etching process.
Inventors
- 👤 Gabriel M. Daalmans
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 05:59
CPC Classifications
G; G01; G01R; G01R33/00; G01R33/02; G01R33/035; G01R33/0354; G01R33/0358; H; H10; H10N; H10N60/00; H10N60/01; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49014
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
129 words
A method for manufacturing a gradiometer having a three-dimensional structure for a device for the single-or multi-channel measurement of magnetic fields with field intensities down to less than 10 -10 T and in particular, below 10 -12 T, wherein at least one superconducting gradiometer coil of predetermined dimensions is arranged a support body and connected by means of superconducting connecting lines and a coupling coil to a superconducting quantum interference element (SQUID) in a magnetically coupling manner, wherein the gradiometer coil and at least the connecting lines associated with the coil are applied as thick or thin films together and simultaneously to a common three-dimensional support body in which at least one coating operation is preceded for the position-wise fixation of the corresponding conductor runs by a lithographic process.
Claim 2
Independent Claim
129 words
A method for manufacturing a gradiometer having a three-dimensional structure for a device for the single-or multi-channel measurement of magnetic fields with field intensities down to less than 10 -10 T and in particular, below 10 -12 T, wherein at least one superconducting gradiometer coil of predetermined dimensions is arranged a support body and connected by means of superconducting connecting lines and a coupling coil to a superconducting quantum interference element (SQUID) in a magnetically coupling manner, wherein the gradiometer coil and at least the connecting lines associated with the coil are applied as thick or thin films together and simultaneously to a common three-dimensional support body in which at least one coating operation is preceded for the position-wise fixation of the corresponding conductor runs by a lithographic process.
Claim 3
Dependent Claim
32 words
A method recited in claim 1, wherein for fixing the position of the conductor runs, a flexible mask foil with cutouts corresponding to the conductor runs is applied to the support body.
Claim 4
Dependent Claim
16 words
A method recited in claim 2, wherein the mask foil is cemented onto the support body.
Claim 5
Dependent Claim
19 words
A method recited in claim 2, wherein the step of applying the mask foil comprises applying a heat-resistant material.
Claim 6
Dependent Claim
20 words
A method recited in claim 4, wherein the step of applying the mask foil comprises applying a thin polyimide foil.
Claim 7
Dependent Claim
25 words
A method recited in claim 2, wherein the mask foil is provided with slots or cuts which facilitate the application to the three-dimensional support body.
Claim 8
Dependent Claim
34 words
A method recited in claim 2, wherein except for regions having the cutouts for the conductor runs, the remaining regions of the mask foil are removed before they are applied to the support body.
Claim 9
Dependent Claim
33 words
A method recited in claim 1, wherein the support body is provided for the lithographic process with a varnish layer in which the conductor runs are fixed by means of a laser trimmer.
Claim 10
Dependent Claim
28 words
A method recited in claim 1, wherein the individual conductor runs are etched out of a vapor deposition layer applied to the support body for the etching process.
Claim 11
Dependent Claim
28 words
The method recited in claim 1, wherein the individual conductor runs are precipitated from the gaseous phase onto the support body by laser-induced heating of the superconductor material.
Claim 12
Independent Claim
131 words
A method for manufacturing a gradiometer having a three-dimensional structure for a device for the single- or multi-channel measurement of magnetic fields with field intensities down to less than 10 -10 T and in particular, below 10 -12 T, wherein at least one superconducting gradiometer coil of predetermined dimensions is arranged a support body and connected by means of superconducting connecting lines and a coupling coil to a superconducting quantum interference element (SQUID) in a magnetically coupling manner, wherein the gradiometer coil and at least the connecting lines associated with the coil are applied as thick or thin films together and simultaneously to a common three-dimensional support body in which at least one coating operation which is followed for the position-wise fixation of the corresponding conductor runs by an etching process.
Claim 13
Independent Claim
131 words
A method for manufacturing a gradiometer having a three-dimensional structure for a device for the single- or multi-channel measurement of magnetic fields with field intensities down to less than 10 -10 T and in particular, below 10 -12 T, wherein at least one superconducting gradiometer coil of predetermined dimensions is arranged a support body and connected by means of superconducting connecting lines and a coupling coil to a superconducting quantum interference element (SQUID) in a magnetically coupling manner, wherein the gradiometer coil and at least the connecting lines associated with the coil are applied as thick or thin films together and simultaneously to a common three-dimensional support body in which at least one coating operation which is followed for the position-wise fixation of the corresponding conductor runs by an etching process.
Claim 14
Dependent Claim
33 words
A method recited from claim 11, wherein for fixing the position of the conductor runs, a flexible mask foil with cut outs corresponding to the conductor runs is applied to the support body.
Claim 15
Dependent Claim
16 words
A method recited in claim 12, wherein the mask foil is cemented onto the support body.
Claim 16
Dependent Claim
19 words
A method recited in claim 13, wherein the step of applying the mask foil comprises applying a heat-resistant material.
Claim 17
Dependent Claim
20 words
A method recited in claim 14, wherein the step of applying the mask foil comprises applying a thin polyamide foil.
Claim 18
Dependent Claim
25 words
A method recited in claim 12, wherein the mask foil is provided with slots or cuts which facilitate the application to the three-dimensional support body.
Claim 19
Dependent Claim
34 words
A method recited in claim 12, wherein except for regions having the cutouts for the conductor runs, the remaining regions of the mask foil are removed before they are applied to the support body.
Claim 20
Dependent Claim
28 words
The method recited in claim 11, wherein the individual conductor runs are precipitated from the gaseous phased onto the support body by laser-induced heating of the superconducting material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-09-21 | 1991-03-23 | 1991-09-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-09-21 | 1995-03-23 | 1995-09-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-09-21 | 1999-03-23 | 1999-09-22 | $7700.00 | Window Closed / Lapsed |