Interference method and interferometer for testing the surface precision of a parabolic mirror

Claim 2

An interference method of testing the surface precision of a parabolic mirror, comprising the steps of: dividing a beam of light rays from a laser light source into two beams of light by means of a beam splitter; producing an illuminating light beam by converting one of said two beams of light into a divergent spherical light wave by means of a microscope object lens and an associated pinhole; producing a reference light beam from the other one of said two light beams; illuminating a parabolic mirror to be tested with said illuminating light beam; causing reflected light from said parabolic mirror to interfere with said reference light beam so as to thereby form interference fringes; and determining any shaping error of said parabolic mirror from said interference fringes.

Claim 3

An interference method according to claim 1, further comprising the steps of: directing said reference beam onto a hologram having a standard object light stored therein so as to regenerate said standard object light from said hologram; and causing said regenerated object light to interfere with said reflected light from said parabolic mirror.

Claim 4

An interference method as set forth in claim 1, wherein: said reference light beam is produced from said other one of said two light beams by converting said other one of said two light beams into a divergent spherical light wave by means of a microscope object lens and an associated pinhole and then converting said divergent spherical light wave into a collimated light beam by means of a collimator.

Claim 5

A method as set forth in claim 1, additionally comprising the step of: converting said divergent spherical light wave into a collimated light beam by means of a collimator.

Claim 6

An interferometer for testing the surface precision of a parabolic mirror comprising: a laser light source; a beam splitter for dividing a beam of light rays from said laser light source into two beams of light; an illuminating optical system, including a microscope object lens and a pinhole, for converting one of said two beams of light into a divergent spherical light wave; a reference optical system for converting the other one of said two beams of light into a reference beam; means for conducting said divergent spherical light wave onto said parabolic mirror so as to cause said divergent spherical light wave to reflect from said parabolic mirror; and means for causing said reflected light from said parabolic mirror to interfere with said reference light beam so as to thereby form interference fringes.

Claim 7

An interferometer for testing the surface precision of a parabolic mirror comprising: a laser light source; a beam splitter for dividing a beam of light rays from said laser light source into two beams of light; an illuminating optical system, including a microscope object lens and a pinhole, for converting one of said two beams of light into a divergent spherical light wave; a reference optical system for converting the other one of said two beams of light into a reference beam; means for conducting said divergent spherical light wave onto said parabolic mirror so as to cause said divergent spherical light wave to reflect from said parabolic mirror; and means for causing said reflected light from said parabolic mirror to interfere with said reference light beam so as to thereby form interference fringes.

Claim 8

An interferometer according to claim 5, wherein said illuminating optical system further comprises: a collimator lens for converting said divergent spherical light wave into collimated light which is caused to be reflected from said parabolic mirror.

Claim 9

An interferometer as set forth in claim 5, further comprising: a hologram, having a standard object light stored therein, disposed at the intersection of said reflected light reflected from said parabolic mirror and said reference light beam.

Claim 10

An interferometer according to claim 7, wherein said reference optical system is composed of a microscope object lens and an associated pinhole for converting said other one of said two beams of light into a divergent spherical light wave which falls upon said hologram so as to regenerate said standard object light from said hologram, and means for causing said regenerated object light to interfere with said reflected light reflected from said parabolic mirror.

Claim 11

An interferometer according to claim 7, wherein said reference optical system is composed of: a microscope object lens, an associated pinhole, and a collimator lens, for initially converting said other one of said two beams of light into a divergent spherical light wave and subsequently into collimated light, and for illuminating said hologram with said collimated light so as to regenerate said standard object light in situ within said hologram so as to interfere with said reflected light reflected from said parabolic mirror.

Claim 12

An interferometer as set forth in claim 5, wherein: said reference optical system comprises a microscope object lens and an associated pinhole, and a collimator lens, for initially converting said other one of said two beams of light into a divergent spherical light wave and subsequently into collimated light.

Claim 13

An interferometer for testing the surface precision of a parabolic mirror, comprising: a laser light source; a beam splitter for dividing a beam of light rays from said laser light source into two beams of light; an illuminating optical system, including a microscope object lens and a pinhole, for converting one of said two beams of light into a divergent spherical light wave; a reference optical system for converting the other one of said two beams of light into a reference beam; a hologram having a standard object light stored therein; means for directing said reference light beam onto said hologram so as to regenerate said standard object light from said hologram; means for conducting said divergent spherical light wave onto said parabolic mirror so as to cause said divergent spherical light wave to be reflected from said parabolic mirror; said hologram is disposed at the intersection of said reflected light reflected from said parabolic mirror and said reference light beam; and means for directing said reflected divergent spherical light wave from said parabolic mirror onto said hologram so as to interfere with said reference light beam so as to thereby form interference fringes.

Claim 14

An interferometer for testing the surface precision of a parabolic mirror, comprising: a laser light source; a beam splitter for dividing a beam of light rays from said laser light source into two beams of light; an illuminating optical system, including a microscope object lens and a pinhole, for converting one of said two beams of light into a divergent spherical light wave; a reference optical system for converting the other one of said two beams of light into a reference beam; a hologram having a standard object light stored therein; means for directing said reference light beam onto said hologram so as to regenerate said standard object light from said hologram; means for conducting said divergent spherical light wave onto said parabolic mirror so as to cause said divergent spherical light wave to be reflected from said parabolic mirror; said hologram is disposed at the intersection of said reflected light reflected from said parabolic mirror and said reference light beam; and means for directing said reflected divergent spherical light wave from said parabolic mirror onto said hologram so as to interfere with said reference light beam so as to thereby form interference fringes.

Claim 15

An interferometer according to claim 11 wherein: said illuminating optical system further comprises a collimator lens for converting said divergent spherical light wave into a collimated light beam.

Claim 16

An interferometer according to claim 11, wherein: said reference optical system is composed of a microscope object lens and an associated pinhole for converting said other one of said two beams of light into a divergent spherical light wave.

Claim 17

An interferometer according to claim 11, wherein: said reference optical system is composed of a microscope object lens, an associated pinhole, and a collimator for thereby initially converting said other one of said two beams of light into a divergent spherical light wave and subsequently converting said divergent spherical light wave into a collimated light beam.