Patent US4691109A successfully refreshed from Google Patents.
US4691109A
Expired / Lapsed
US
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Apparatus and method for producing ions
Assignee: Intersil Corp
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Filing: 1986-01-28
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Granted: 1987-09-01
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Expires: 2006-01-28
Abstract
Abstract A source of a beam of ions includes in a housing a cathode filament, an anode spaced from the cathode and housing an ion emission opening therethrough and an intermediate electrode between the cathode and anode and having an opening therethrough in alignment with the opening in the anode. An inlet opening extends through the housing into the space between the anode and the intermediate electrode to admit a flow of starting gas and the gas to be ionized into the housing. An outlet opening is through the housing adjacent the cathode and a pump is connected to the outlet opening. In the operation of the ion source a flow of the starting gas is provided through the housing and over the cathode to initiate the discharge. Then the gas to be ionized is admitted into the housing. Some of the gas is ionized to generate the desired ions and the rest of the gas is drawn out of the housing to remove impurities generated at the cathode and thereby increase the lifetime of the cathode. Once the ionizing gas is admitted into the housing, the flow of the starting gas is stopped.
Inventors
- 👤 Charles W. Magee
- 👤 Lori R. Hewitt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 14:12
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/022; H01J27/08
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
112 words
In an ion beam source which includes within a housing a filament cathode, a means for providing a magnetic filed within said housing, an anode spaced from the cathode and having an opening therethrough, and means for admitting pure helium gas to be ionized into the housing between the anode and the cathode, a means for creating an arc discharge the improvement comprising an outlet opening through the housing on the side of the cathode away from the anode, means for causing a flow of the helium gas over the cathode and out of the housing through said opening and means for providing a flow of a starting gas over the cathode.
Claim 2
Dependent Claim
112 words
In an ion beam source which includes within a housing a filament cathode, a means for providing a magnetic filed within said housing, an anode spaced from the cathode and having an opening therethrough, and means for admitting pure helium gas to be ionized into the housing between the anode and the cathode, a means for creating an arc discharge the improvement comprising an outlet opening through the housing on the side of the cathode away from the anode, means for causing a flow of the helium gas over the cathode and out of the housing through said opening and means for providing a flow of a starting gas over the cathode.
Claim 3
Dependent Claim
58 words
An ion source in accordance with claim 1 including the source of the helium gas; a source of the starting gas; means connecting each of said sources to the interior of the housing to provide a flow of the gases into the housing; and valve means for controlling the flow of each of the gases into the housing.
Claim 4
Dependent Claim
22 words
An ion source in accordance with claim 2 including a separate valve for controlling the flow of each gas into the housing.
Claim 5
Dependent Claim
19 words
An ion source in accordance with claim 1 in which the starting gas source is a source of argon.
Claim 6
Independent Claim
119 words
A method of generating ions of a material in an ion source which includes in a housing a cathode and an anode, with the anode having an opening therethrough to emit the ions, the method comprising the steps of providing a magnetic field within said housing heating the cathode, providing a potential difference between the cathode and anode to generate an electron plasma, providing a flow of a starting gas through the housing and over the filament to start an arc discharge, and providing a flow of pure helium gas through the plasma and over the cathode to generate ions of helium with some of the gas flowing out of the housing to remove impurities created at the cathode.
Claim 7
Independent Claim
119 words
A method of generating ions of a material in an ion source which includes in a housing a cathode and an anode, with the anode having an opening therethrough to emit the ions, the method comprising the steps of providing a magnetic field within said housing heating the cathode, providing a potential difference between the cathode and anode to generate an electron plasma, providing a flow of a starting gas through the housing and over the filament to start an arc discharge, and providing a flow of pure helium gas through the plasma and over the cathode to generate ions of helium with some of the gas flowing out of the housing to remove impurities created at the cathode.
Claim 8
Dependent Claim
26 words
A method in accordance with claim 5 in which after the helium gas is admitted into the plasma the flow of the starting gas is stopped.
Claim 9
Dependent Claim
26 words
A method in accordance with claim 6 in which the starting gas has an ionization probability greater than that of the helium gas and is inert.
Claim 10
Dependent Claim
14 words
A method in accordance with claim 7 in which the starting gas is argon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-08-31 | 1991-03-02 | 1991-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-08-31 | 1995-03-02 | 1995-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-08-31 | 1999-03-02 | 1999-09-01 | $7700.00 | Window Closed / Lapsed |