Fluid mass flow controller

Claim 2

A gas mass flow controller comprising: a gas control valve responsive to a control signal to vary the rate of flow of a gas therethrough; conduit means, defining a primary gas flow path, in communication with the valve; gas flow dividing means, located downstream from the valve in the primary flow path, operative to divert a portion of the gas from the primary flow path; sensor conduit means, in communication with the dividing means, defining an alternate gas flow path for receiving the diverted portion of the gas; sensing means, downstream from the dividing means, for sensing the rate of flow of the gas through the alternate flow path and for providing a sensor input signal indicative of the rate of flow of the gas; means, downstream from the sensing means, for merging the gas flowing in the alternate flow path into the gas flowing in the primary flow path; control means, responsive to the sensing means to generate the control signal, the control means including amplifier means to amplify the sensor input signal, means to receive a flow rate signal indicative of a desired rate of flow of the gas, and comparator means to compare the amplified sensor signal with the flow rate signal and to provide the control signal indicative of any difference therebetween; means to apply the control signal to the valve to maintain the flow of the gas through the primary flow path at a rate equal to the desired rate of flow as indicated by the flow rate signal; and an automatic zero recalibrator, responsive to the amplified sensor signal and to a valve shut-off signal to correct for any long term sensor drift.

Claim 3

A gas mass flow controller according to claim 1, comprising in addition means in the primary flow path, upstream from the dividing means, for reducing tubulence in the gas.

Claim 4

A gas mass flow controller comprising: a gas control valve responsive to a control signal to vary the rate of flow of a gas therethrough; conduit means, defining a primary gas flow path, in communication with the valve; gas flow dividing means, located downstream from the valve in the primary flow path, operative to divert a portion of the gas from the primary flow path; sensor conduit means, in communication with the dividing means, defining an alternate gas flow path for receiving the diverted portion of the gas; sensing means, downstream from the dividing means, for sensing the rate of flow of the gas through the alternate flow path and for providing a sensor input signal indicative of the rate of flow of the gas; means, downstream from the sensing means, for merging the gas flowing in the alternate flow path into the gas flowing in the primary flow path; control means, responsive to the sensing means to generate the control signal, the control means including amplifier means to amplify the sensor input signal, means to receive a flow rate signal indicative of a desired rate of flow of the gas, and comparator means to compare the amplified sensor signal with the flow rate signal and to provide the control signal indicative of any difference therebetween; means to apply the control signal to the valve to maintain the flow of the gas through the primary flow path at a rate equal to the desired rate of flow as indicated by the flow rate signal; and an equalizer in electrical communication with the amplifier means, responsive to the amplified sensor signal to compensate for any non-linearity of the sensing means.

Claim 5

A gas mass flow controller comprising: a gas control valve responsive to a control signal to vary the rate of flow of a gas therethrough; conduit means, defining a primary gas flow path, in communication with the valve; gas flow dividing means, located downstream from the valve in the primary flow path, operative to divert a portion of the gas from the primary flow path; sensor conduit means, in communication with the dividing means, defining an alternate gas flow path for receiving the diverted portion of the gas; sensing means, downstream from the dividing means, for sensing the rate of flow of the gas through the alternate flow path and for providing a sensor input signal indicative of the rate of flow of the gas; means, downstream from the sensing means, for merging the gas flowing in the alternate flow path into the gas flowing in the primary flow path; control means, responsive to the sensing means to generate the control signal, the control means including amplifier means to amplify the sensor input signal, means to receive a flow rate signal indicative of a desired rate of flow of the gas, and comparator means to compare the amplified sensor signal with the flow rate signal and to provide the control signal indicative of any difference therebetween; means to apply the control signal to the valve to maintain the flow of the gas through the primary flow path at a rate equal to the desired rate of flow as indicated by the flow rate signal; and an equalizer in electrical communication with the amplifier means, responsive to the amplified sensor signal to compensate for any non-linearity of the sensing means.

Claim 6

A gas mass flow controller according to claim 3 wherein the amplifier means comprises a plurality of amplifier stages and wherein the equalizer is in communication with each of a plurality of said stages.

Claim 7

A gas mass flow controller according to claim 4 and further comprising an automatic zero recalibrator, responsive to the amplified sensor signal and to a valve shut-off signal to correct for any long term sensor drift.

Claim 8

A gas mass flow controller, responsive to an externally generated flow rate signal indicative of a desired rate of flow of a gas to control the actual rate of flow of a gas in conformity with said desired rate, the controller comprising: a control valve to receive a gas, responsive to a control signal to vary the rate of flow of the gas therethrough; conduit means, defining a primary gas flow path, in communication with the valve to receive the gas therefrom; sensor conduit means, defining an alternate gas flow path, in communication with the conduit means to receive a portion of the gas flowing therethrough; sensing means, operative to sense the rate of flow of the gas through the alternate flow path and to provide a sensor input signal indicative of said rate of flow; amplifier means to amplify the sensor input signal; comparator means, operative to compare the amplified sensor signal with the flow rate signal and to provide said control signal indicative of any difference therebetween; means to apply the control signal to the valve to maintain the flow of the gas through the primary flow path at the deisred rate of flow; and an automatic zero recalibrator, responsive to the amplified sensor signal and to a valve shut-off signal to correct for any long term sonsor drift.

Claim 9

A gas mass flow controller, responsive to an externally generated flow rate signal indicative of a desired rate of flow of a gas to control the actual rate of flow of a gas in conformity with said desired rate, the controller comprising: a control valve to receive a gas, responsive to a control signal to vary the rate of flow of the gas therethrough; conduit means, defining a primary gas flow path, in communication with the valve to receive the gas therefrom; sensor conduit means, defining an alternate gas flow path, in communication with the conduit means to receive a portion of the gas flowing therethrough; sensing means, operative to sense the rate of flow of the gas through the alternate flow path and to provide a sensor input signal indicative of said rate of flow; amplifier means to amplify the sensor input signal; comparator means, operative to compare the amplified sensor signal with the flow rate signal and to provide said control signal indicative of any difference therebetween; means to apply the control signal to the valve to maintain the flow of the gas through the primary flow path at the deisred rate of flow; and an automatic zero recalibrator, responsive to the amplified sensor signal and to a valve shut-off signal to correct for any long term sonsor drift.

Claim 10

A gas mass flow controller, responsive to an externally generated flow rate signal indicative of a desired rate of flow of a gas to control the actual rate of flow of a gas in conformity with said desired rate, the controller comprising: a control valve to receive a gas, responsive to a control signal to vary the rate of flow of the gas therethrough; conduit means, defining a primary gas flow path, in communication with the valve to receive the gas therefrom; sensor conduit means, defining an alternate gas flow path, in communication with the conduit means to receive a portion of the gas flowing therethrough; sensing means, operative to sense the rate of flow of the gas through the alternate flow path and to provide a sensor input signal indicative of said rate of flow; amplifier means to amplify the sensor input signal; comparator means, operative to compare the amplified sensor signal with the flow rate signal and to provide said control signal indicative of any difference therebetween; means to apply the control signal to the valve to maintain the flow of the gas through the primary flow path at the deisred rate of flow; and an equalizer in electrical communication with the amplifier means, responsive to the amplified sensor signal to compensate for any non-linearity of the sensing means.

Claim 11

A gas mass flow controller, responsive to an externally generated flow rate signal indicative of a desired rate of flow of a gas to control the actual rate of flow of a gas in conformity with said desired rate, the controller comprising: a control valve to receive a gas, responsive to a control signal to vary the rate of flow of the gas therethrough; conduit means, defining a primary gas flow path, in communication with the valve to receive the gas therefrom; sensor conduit means, defining an alternate gas flow path, in communication with the conduit means to receive a portion of the gas flowing therethrough; sensing means, operative to sense the rate of flow of the gas through the alternate flow path and to provide a sensor input signal indicative of said rate of flow; amplifier means to amplify the sensor input signal; comparator means, operative to compare the amplified sensor signal with the flow rate signal and to provide said control signal indicative of any difference therebetween; means to apply the control signal to the valve to maintain the flow of the gas through the primary flow path at the deisred rate of flow; and an equalizer in electrical communication with the amplifier means, responsive to the amplified sensor signal to compensate for any non-linearity of the sensing means.

Claim 12

A gas mass flow controller according to claim 7 wherein the amplifier means comprises a plurality of amplifier stages and wherein the equalizer is in communication with each of a plurality of said stages.

Claim 13

A gas mass flow controller according to claim 8 and further comprising an automatic zero recalibrator, responsive to the amplified sensor signal and to a valve shut-off signal to correct for any long term sensor drift.

Claim 14

A gas mass flow controller according to claim 6 and further comprising means, downstream from the sensing means, for merging the gas flowing in the alternate flow path into the gas flowing in the primary flow path.

Claim 15

A gas mass flow controller according to claim 7 and further comprising means, downstream from the sensing means, for merging the gas flowing in the alternate flow path into the gas flowing in the primary flow path.