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US4684565A
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X-ray mirrors made from multi-layered material
Assignee: ExxonMobil Technology and Engineering Co
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Filing: 1984-11-20
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Granted: 1987-08-04
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Expires: 2004-11-20
Abstract
Abstract The present invention is an X-ray mirror including a multi-layered material in which the composition of the layers repeat, the repeat distance being between 8 and 250 A., In one embodiment, the mirror is produced by CVD. In another embodiment, the layers forming the structure are made of amorphous semiconductor or insulator material.
Inventors
- 👤 Benjamin Abeles
- 👤 Wolfgang U. Eberhardt
- 👤 J. Thomas Tiedje
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 09:23
CPC Classifications
B; B82; B82Y; B82Y10/00; G; G21; G21K; G21K1/00; G21K1/06; G21K1/062; G21K2201/00; G21K2201/06; G21K2201/061; G21K2201/067
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
38 words
An X-ray mirror comprising a multilayered material wherein the layers forming the structure are made of amorphous semiconductor or insulator material such that the composition of the layers repeat, periodically said repeat distance being between 8 and 250A.
Claim 2
Dependent Claim
38 words
An X-ray mirror comprising a multilayered material wherein the layers forming the structure are made of amorphous semiconductor or insulator material such that the composition of the layers repeat, periodically said repeat distance being between 8 and 250A.
Claim 3
Dependent Claim
13 words
The X-ray mirror of claim 1 wherein said layers are produced by CVD.
Claim 4
Dependent Claim
21 words
The X-ray mirror of claim 2 wherein said layers are formed from tetrahedrally elements or alloys containing said tetrahedrally bonded elements.
Claim 5
Dependent Claim
12 words
The X-ray mirror of claim 3 wherein said CVD is plasma assisted.
Claim 6
Dependent Claim
17 words
The X-ray mirror of claim 1 such that said multi-layered material includes a diffusion barrier between layers.
Claim 7
Dependent Claim
13 words
The X-ray mirror of claim 1 wherein layers are metals or alloys thereof.
Claim 8
Dependent Claim
20 words
The X-ray mirror of claim 6 such that each period of said multi-layered material includes a diffusion barrier between layers.
Claim 9
Dependent Claim
22 words
The X-ray mirror of claim 7 wherein said metal layers are Au and Al separated by a silicon or carbon diffusion barrier.
Claim 10
Dependent Claim
13 words
The X-ray mirror of claim 3 wherein said tetrahedrally bonded element is silicon.
Claim 11
Dependent Claim
25 words
The X-ray mirror of claim 9 wherein said alloy is an alloy silicon with an element selected from the group oxygen, nitrogen, fluorine, and carbon.
Claim 12
Dependent Claim
13 words
The X-ray mirror of claim 1 wherein said layers are substantially defect free.
Claim 13
Dependent Claim
19 words
The X-ray mirror of claim 1 wherein said layers are substantially smooth and of uniform thickness across each layer.
Claim 14
Dependent Claim
16 words
The X-ray mirror of claim 1 wherein said composition of layers repeat more than 8 times.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-08-03 | 1991-02-02 | 1991-08-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-08-03 | 1995-02-02 | 1995-08-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-08-03 | 1999-02-02 | 1999-08-04 | $7700.00 | Window Closed / Lapsed |