Vapor nozzle with gas barrier bars

Claim 2

A nozzle structure for depositing vaporized material on a relatively moving surface comprising, in combination, a frame fixed with respect to said surface, a plurality of bars fixed on said frame in parallel relation so as to closely overlie said surface, said bars having internal passages and elongated delivery openings from said passages adjacent said surface, a nozzle block having nozzle walls closely fitted between said bars and defining elongated openings facing said surface, means for delivering vaporized material to said nozzle block for depositing material on said surface from said nozzle block openings, and means for delivering inert gas to said internal passages so that inert gas barrier regions are created on the sides of the material being deposited.

Claim 3

The combination of claim 1 in which said nozzle block is relatively movable with respect to said frame so as to vary the spacing of said nozzle block openings from said surface, said nozzle walls being slidable between said bars to permit said relative movement without varying the adjacent spacing of said bar openings and said nozzle block openings.

Claim 4

The combination of claim 1 including vanes within said nozzle block paralleling said nozzle walls to help stratify the flow of material through said nozzle block openings.

Claim 5

The combination of claim 1 including means for heating said nozzle block and said bars to prevent condensation of vaporized material on the block and bars.

Claim 6

A nozzle structure for depositing vaporized material on a relatively moving surface comprising, in combination, a frame fixed with respect to said surface, a plurality of bars fixed on said frame in parallel relation so as to closely overlie said surface, means for heating said bars, said bars having internal passages and elongated delivery openings from said passages adjacent said surface, a nozzle block having nozzle walls closely fitted between said bars and defining elongated openings facing said surface, said nozzle block being relatively movable with respect to said frame so as to vary the spacing of said nozzle block openings from said surface, means for delivering vaporized material to said nozzle block for depositing material on said surface from said nozzle block openings, vanes within said nozzle block paralleling said nozzle walls to help stratify the flow of material through said nozzle block openings, means for heating said nozzle block, walls and vanes, and means for delivering inert gas to said internal passages so that inert gas barrier regions are created on the sides of the material being deposited.

Claim 7

A nozzle structure for depositing vaporized material on a relatively moving surface comprising, in combination, a frame fixed with respect to said surface, a plurality of bars fixed on said frame in parallel relation so as to closely overlie said surface, means for heating said bars, said bars having internal passages and elongated delivery openings from said passages adjacent said surface, a nozzle block having nozzle walls closely fitted between said bars and defining elongated openings facing said surface, said nozzle block being relatively movable with respect to said frame so as to vary the spacing of said nozzle block openings from said surface, means for delivering vaporized material to said nozzle block for depositing material on said surface from said nozzle block openings, vanes within said nozzle block paralleling said nozzle walls to help stratify the flow of material through said nozzle block openings, means for heating said nozzle block, walls and vanes, and means for delivering inert gas to said internal passages so that inert gas barrier regions are created on the sides of the material being deposited.

Claim 8

Apparatus for continuously producing under vacuum a monolithic multi-layer capacitor on a substrate surface comprising means for forming a layer of electrode material on a surface within a predefined electrode forming zone, means for forming a coating of dielectric material on a surface within a predefined dielectric forming zone, said means for forming a coating of dielectric material including a first nozzle closely overlying the substrate surface at said dielectric forming zone, and a pair of second nozzles adjacent either side of said first nozzle for creating an inert gas wall on either side of the dielectric forming zone, and means for repeatedly passing the substrate surface carrying said layers and coatings through the two zones in sequence so that two different portions of the surface are simultaneously within their respective zones so as to produce alternate layers and coatings of electrode and dielectric on the substrate surface.

Claim 9

Apparatus for continuously producing under vacuum a monolithic multi-layer capacitor on a substrate surface comprising means for forming a layer of electrode material on a surface within a predefined electrode forming zone, means for forming a coating of dielectric material on a surface within a predefined dielectric forming zone, said means for forming a coating of dielectric material including a first nozzle closely overlying the substrate surface at said dielectric forming zone, and a pair of second nozzles adjacent either side of said first nozzle for creating an inert gas wall on either side of the dielectric forming zone, and means for repeatedly passing the substrate surface carrying said layers and coatings through the two zones in sequence so that two different portions of the surface are simultaneously within their respective zones so as to produce alternate layers and coatings of electrode and dielectric on the substrate surface.

Claim 10

An apparatus according to claim 6 including means for stepping said first nozzle away from said substrate surface after each repeated pass so as to maintain the first nozzle close but not in contact with said coatings.

Claim 11

An apparatus according to claim 6 including vanes within said first nozzle to help stratify the flow of dielectric material through said first nozzle.

Claim 12

An apparatus according to claim 6 including means for heating said first nozzle to avoid having dielectric material stick to said first nozzle.