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US4675264A Expired / Lapsed US ⏱️ 0.0 years remaining

Electrophotographic sensitive member with amorphous Si barrier layer

Assignee: Kyocera Corp
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Filing: 1986-07-15
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Granted: 1987-06-23
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Expires: 2006-07-15
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Abstract

Abstract The invention relates to improvements in an electrophotographic sensitive member having a photoconductive layer formed with amorphous silicon produced by glow discharge decomposition or sputtering. An electrophotographic sensitive member is formed by laminating an amorphous silicon barrier layer and an amorphous photoconductive layer successively on an electrically conductive substrate, the first mentioned layer containing an impurity of Group IIIa of Periodic Table of Elements, or nitrogen and impurity of Group IIIa of same Table, and also containing oxygen within a range of 0.1 to 20.0 atomic % at the point of the layer and in a progressively decreasing pattern throughout the rest thereof. Constructed as such, the photosensitive member has an increased photosensitivity to near-infrared beams, a large charge-holding capability, and low-rate dark attenuation characteristics. In addition, it is less expensive to manufacture.

Inventors

  • 👤 Takao Kawamura
  • 👤 Hideaki Iwano
  • 👤 Naooki Miyamoto
  • 👤 Yasuo Nishiguchi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 03:10
CPC Classifications
G; G03; G03G; G03G5/00; G03G5/02; G03G5/04; G03G5/08; G03G5/082; G03G5/08214; G03G5/08235; G03G5/08242

Claims Analysis

Total Claims: 31
Claim 1
Independent Claim 151 words
An electrophotographic sensitive member comprising: an electrically conductive substrate, an amorphous silicon barrier layer and an amorphous silicon photoconductive layer, both layers being laminated on the substrate in order of mention, said amorphous silicon barrier layer containing from 50 to 500 ppm of an impurity of Group IIIa of the Periodic Table of Elements, said barrier layer containing from 10 to 40 atomic % of hydrogen, said barrier layer containing oxygen within a range of 0.1 to 20.0 atomic % at the start point of its formation and in a progressively decreasing pattern throughout the rest thereof, said barrier layer being 0.2 to 5.0 microns in thickness, and said photoconductive layer containing both hydrogen within a range of 10 to 40 atomic % and 10 -5 to 10 -2 atomic % of oxygen, wherein the thickness of the barrier layer where the oxygen content is maximal is less than 1000 Å.
Claim 2
Dependent Claim 151 words
An electrophotographic sensitive member comprising: an electrically conductive substrate, an amorphous silicon barrier layer and an amorphous silicon photoconductive layer, both layers being laminated on the substrate in order of mention, said amorphous silicon barrier layer containing from 50 to 500 ppm of an impurity of Group IIIa of the Periodic Table of Elements, said barrier layer containing from 10 to 40 atomic % of hydrogen, said barrier layer containing oxygen within a range of 0.1 to 20.0 atomic % at the start point of its formation and in a progressively decreasing pattern throughout the rest thereof, said barrier layer being 0.2 to 5.0 microns in thickness, and said photoconductive layer containing both hydrogen within a range of 10 to 40 atomic % and 10 -5 to 10 -2 atomic % of oxygen, wherein the thickness of the barrier layer where the oxygen content is maximal is less than 1000 Å.
Claim 3
Dependent Claim 25 words
An electrophotographic sensitive member as claimed in claim 1 wherein said amorphous silicon photoconductive layer contains 10 -5 to 5×10 -2 atomic % of oxygen.
Claim 4
Dependent Claim 34 words
An electrophotographic sensitive member as claimed in claim 1 wherein the oxygen content of said amorphous silicon barrier layer at the ending portion thereof is same as that of said amorphous silicon photoconductive layer.
Claim 5
Dependent Claim 23 words
An electrophotographic sensitive member as claimed in claim 1 wherein said amorphous silicon barrier layer contains 10 to 40 atomic % of hydrogen.
Claim 6
Dependent Claim 30 words
An electrophotographic sensitive member as claimed in claim 1 wherein said amorphous silicon photoconductive layer contains from 10 to 20,000 ppm of an impurity of Group IIIa of Periodic Table.
Claim 7
Dependent Claim 22 words
An electrophotographic sensitive member as claimed in claim 4 or 5 wherein said impurity of Group IIIa of Periodic Table is boron.
Claim 8
Dependent Claim 29 words
An electrophotographic sensitive member as claimed in claim 1 wherein said amorphous silicon barrier layer shows the largest oxygen content at the layer thickness of 1000 Å or less.
Claim 9
Dependent Claim 38 words
An electrophotographic sensitive member as claimed in claim 1 wherein the oxygen content of said amorphous silicon barrier layer is largest at the interface of the layer with said electrically conductive substrate, being reduced gradually from said interface.
Claim 10
Dependent Claim 35 words
An electrophotographic sensitive member as claimed in claim 1 wherein an amorphous silicon surface protective layer is laminated on said amorphous silicon photoconductive layer, said surface protective layer being 0.05 to 1.0 μm in thickness.
Claim 11
Dependent Claim 40 words
An electrophotographic sensitive member as claimed in claim 9 wherein said amorphous surface protective layer contains oxygen in a progressively increasing pattern throughout its formation and to a level of 1.0 to 60.0 atomic % at the ending portion thereof.
Claim 12
Dependent Claim 137 words
An electrophotographic sensitive member comprising an electrically conductive substrate, an amorphous silicon barrier layer and an amorphous silicon photoconductive layer, both layers being laminated on the substrate in order of mention, said amorphous silicon barrier layer containing nitrogen and 50 to 500 ppm of an impurity of Group IIIa of the Periodic Table of Elements, said barrier layer containing oxygen within a range of 0.1 to 20.0 atomic % at the start point of its formation and in a progressively decreasing pattern throughout the rest thereof, said barrier layer being from 0.2 to 5.0 μm thick, and said amorphous silicon photoconductive layer containing hydrogen within a range of 10 to 40 atomic % and 10 -5 to 10 -2 atomic % of at least either one of oxygen or nitrogen or a mixture of oxygen and nitrogen.
Claim 13
Dependent Claim 137 words
An electrophotographic sensitive member comprising an electrically conductive substrate, an amorphous silicon barrier layer and an amorphous silicon photoconductive layer, both layers being laminated on the substrate in order of mention, said amorphous silicon barrier layer containing nitrogen and 50 to 500 ppm of an impurity of Group IIIa of the Periodic Table of Elements, said barrier layer containing oxygen within a range of 0.1 to 20.0 atomic % at the start point of its formation and in a progressively decreasing pattern throughout the rest thereof, said barrier layer being from 0.2 to 5.0 μm thick, and said amorphous silicon photoconductive layer containing hydrogen within a range of 10 to 40 atomic % and 10 -5 to 10 -2 atomic % of at least either one of oxygen or nitrogen or a mixture of oxygen and nitrogen.
Claim 14
Dependent Claim 32 words
An electrophotographic sensitive member as claimed in claim 11 wherein said amorphous silicon barrier layer has a nitrogen content of 0.05 to 10.0 atomic % at the start point of the layer.
Claim 15
Dependent Claim 32 words
An electrophotographic sensitive member as claimed in claim 11 wherein said amorphous silicon photoconductive layer contains 10 -5 to 5×10 -2 atomic % of at least either one of oxygen or nitrogen.
Claim 16
Dependent Claim 36 words
An electrophotographic sensitive member as claimed in claim 11 wherein the oxygen and nitrogen contents of said amorphous silicon barrier layer at the ending portion thereof are same as those of said amorphous silicon photoconductive layer.
Claim 17
Dependent Claim 23 words
An electrophotographic sensitive member as claimed in claim 11 wherein said amorphous silicon barrier layer contains 10 to 40 atomic % of hydrogen.
Claim 18
Dependent Claim 30 words
An electrophotographic sensitive member as claimed in claim 11 wherein said amorphous silicon photoconductive layer contains 10 to 20,000 ppm of an impurity of Group IIIa of the Periodic Table.
Claim 19
Dependent Claim 22 words
An electrophotographic sensitive member as claimed in claim 15 or 16 wherein said impurity of Group IIIa of Periodic Table is boron.
Claim 20
Dependent Claim 31 words
An electrophotographic sensitive member as claimed in claim 11 wherein said amorphous silicon barrier layer shows the largest oxygen and nitrogen content at the layer thickness of 1000 Å or less.
Claim 21
Dependent Claim 40 words
An electrophotographic sensitive member as claimed in claim 11 wherein the oxygen and nitrogen content of said amorphous silicon barrier layer is largest at the interface of the layer with said electrically conductive substrate, being reduced gradually from said interface.
Claim 22
Dependent Claim 24 words
An electrophotographic sensitive member as claimed in claim 11 wherein an amorphous silicon surface protective layer is laminated on said amorphous silicon photoconductive layer.
Claim 23
Dependent Claim 34 words
An electrophotographic sensitive member as claimed in claim 20 wherein said amorphous silicon surface protective layer has its content of at least either one of oxygen or nitrogen progressively increased throughout the formation thereof.
Claim 24
Dependent Claim 124 words
An electrophotographic sensitive member comprising: an electrically conductive substrate; an amorphous silicon barrier layer laminated on the substrate, the barrier layer having a thickness ranging from 0.2 to 5.0 microns, the barrier layer containing 10 to 40 atomic % hydrogen and from 50 to 500 ppm of a Group III(a) impurity from 0.1 to 20.0 atomic percent of oxygen at the interface of the barrier layer and the substrate, the atomic percent of oxygen in the barrier layer decreasing from the interface of the barrier layer and the substrate; and, an amorphous silicon photoconductive layer laminated on the barrier layer, the photoconductive layer containing 10 to 40 atomic % of hydrogen and from 0.000001 to 0.05 atomic percent of oxygen or oxygen and nitrogen.
Claim 25
Dependent Claim 124 words
An electrophotographic sensitive member comprising: an electrically conductive substrate; an amorphous silicon barrier layer laminated on the substrate, the barrier layer having a thickness ranging from 0.2 to 5.0 microns, the barrier layer containing 10 to 40 atomic % hydrogen and from 50 to 500 ppm of a Group III(a) impurity from 0.1 to 20.0 atomic percent of oxygen at the interface of the barrier layer and the substrate, the atomic percent of oxygen in the barrier layer decreasing from the interface of the barrier layer and the substrate; and, an amorphous silicon photoconductive layer laminated on the barrier layer, the photoconductive layer containing 10 to 40 atomic % of hydrogen and from 0.000001 to 0.05 atomic percent of oxygen or oxygen and nitrogen.
Claim 26
Dependent Claim 28 words
An electrophotographic sensitive member according to claim 22 further including a protective layer laminated on the photoconductive layer said protective layer being 0.05 to 1.0 microns in thickness.
Claim 27
Dependent Claim 28 words
An electrophotographic sensitive member according to claim 23 wherein the protective layer comprises amorphous silicon and wherein the protective layer contains from 10 to 40 atomic percent hydrogen.
Claim 28
Dependent Claim 39 words
An electrophotographic sensitive member according to claim 22 wherein the photoconductive layer has a thickness ranging from 5 to 100 microns and wherein the photoconductive layer contains from 10 to 20,000 parts per million of a Group III(a) impurity.
Claim 29
Dependent Claim 50 words
An electrophotographic sensitive member according to claim 22 wherein the oxygen or oxygen plus nitrogen content in the barrier layer at a point farthest from the substrate is approximately equal to the oxygen or oxygen plus nitrogen content in the photoconductive layer at a point closest to the barrier layer.
Claim 30
Dependent Claim 51 words
An electrophotographic sensitive member according to claim 23 wherein the oxygen or oxygen plus nitrogen content in the protective layer at a point closest to the photoconductive layer is approximately equal to the oxygen or oxygen plus nitrogen content of the photoconductive layer at a point closest to the protective layer.
Claim 31
Dependent Claim 26 words
An electrophotographic sensitive member according to claim 1 wherein the thickness of the barrier layer where the oxygen content is maximal is less than 10 Å.

References Cited (Backward Citations)

US4489149A Cited
US4443529A Cited
US4547448A Cited
US4486521A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-06-22 1990-12-22 1991-06-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-06-22 1994-12-22 1995-06-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-06-22 1998-12-22 1999-06-23 $7700.00 Window Closed / Lapsed

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