US4670651A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for performing the SNMS method
Assignee: SPECS Gesellschaft fuer Oberflaechenanalytik und Computertechnologie mbH
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Filing: 1985-09-25
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Granted: 1987-06-02
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Expires: 2005-09-25
Abstract
Abstract An apparatus for the performance of the SNMS process, having a separate ion source, a sample holder, a system for the production of a radio-frequency plasma and a mass analyzer, in which the ion source and the mass analyzer are disposed side by side on the same side of the chamber provided for the radio-frequency plasma, and in which the sample mounted on the sample holder is situated within the chamber provided for the radio-frequency plasma. This apparatus can be used not only for the performance of the two kinds of SNMS operation (DMB and SBM) but also secondary ion mass spectroscopy (SIMS) under optimum spatial conditions.
Inventors
- 👤 Stefan Meier
- 👤 Karl-Heinz Muller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 05:42
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/22; G01N23/225; G01N23/2255; H; H01; H01J; H01J37/00; H01J37/252; H01J49/00; H01J49/02; H01J49/10; H01J49/14; H01J49/142; A; A61; A61B; A61B17/00; A61B2017/00004
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
66 words
Apparatus for performing the SNMS process, comprising: a separate ion source, a sample holder, means including a chamber for producing a radio-frequency plasma, and a mass analyzer, said ion source and said mass analyzer being arranged side by side on the same side of said chamber for the radio-frequency plasma, said sample holder being for mounting a sample situated within said chamber for the radio-frequency plasma.
Claim 2
Dependent Claim
66 words
Apparatus for performing the SNMS process, comprising: a separate ion source, a sample holder, means including a chamber for producing a radio-frequency plasma, and a mass analyzer, said ion source and said mass analyzer being arranged side by side on the same side of said chamber for the radio-frequency plasma, said sample holder being for mounting a sample situated within said chamber for the radio-frequency plasma.
Claim 3
Dependent Claim
24 words
Apparatus according to claim 1, including an ion lens for the setting of an energy window and placed in front of said mass analyzer.
Claim 4
Dependent Claim
19 words
Apparatus according to claim 1, including a secondary electron detector diposed beside said ion source and said mass analyzer.
Claim 5
Dependent Claim
34 words
Apparatus according to claim 1, in which said sample holder includes a displaceable sample rod which is disposed on the side of said chamber for the radio-frequency plasma that is opposite said mass analyzer.
Claim 6
Dependent Claim
27 words
Apparatus according to claim 1, in which said chamber for the radio-frequency plasma comprises an RF-permeable, highly vacuum-tight vessel which is surrounded by a one-turn RF coil.
Claim 7
Dependent Claim
66 words
Apparatus according to claim 5, in which said plasma vessel is of cylindrical configuration and has two flanges at its ends, and which includes a sample transfer system fastened to one of said flanges on the one side of said vessel and in which said mass analyzer and said ion source are fastened to the other of said flanges on the other side of said vessel.
Claim 8
Dependent Claim
15 words
Apparatus according to claim 1, in which said mass analyzer includes a quadrupole mass filter.
Claim 9
Dependent Claim
20 words
Apparatus according to claim 1, in which said ion source is a fine-focus ion source for the performance of microanalyses.
Claim 10
Dependent Claim
21 words
Apparatus according to claim 1, in which said sample holder is capable of mounting the sample tiltably on said sample holder.
References Cited (Backward Citations)
US4310759A
Cited
US4447724A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-06-01 | 1990-12-01 | 1991-06-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-06-01 | 1994-12-01 | 1995-06-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-06-01 | 1998-12-01 | 1999-06-02 | $7700.00 | Window Closed / Lapsed |