US4666552A
Expired / Lapsed
US
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Etching method for bodies of dielectric oxide ceramic
Assignee: Individual
•
Filing: 1985-09-20
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Granted: 1987-05-19
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Expires: 2005-09-20
Abstract
Abstract The etching of dielectric oxide ceramics and dielectric single crystal oxides, particularly perovskite ceramics, is executed by means of laser radiation in an atmosphere having a reducing effect.
Inventors
- 👤 Dieter Baeuerle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 10:41
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/36; B23K26/40; B23K2103/00; B23K2103/50; B23K2103/52; H; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K3/00; H05K3/0011; H05K3/0017
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
71 words
A method for etching structures in surface portions of a substrate body having a perovskite structure selected from the group consisting of dielectric oxide ceramics and dielectric single crystal oxides comprising moving such body relative to a laser processing beam impinged continuously against surface portions thereof along a controlled path while maintaining such surface portions in an atmosphere having a reducing effect for the material comprising said body at elevated temperatures.
Claim 2
Independent Claim
71 words
A method for etching structures in surface portions of a substrate body having a perovskite structure selected from the group consisting of dielectric oxide ceramics and dielectric single crystal oxides comprising moving such body relative to a laser processing beam impinged continuously against surface portions thereof along a controlled path while maintaining such surface portions in an atmosphere having a reducing effect for the material comprising said body at elevated temperatures.
Claim 3
Dependent Claim
28 words
The method of claim 1 wherein said body is selected from the group consisting of barium titanate, strontium titanate, and lead zirconate titanate, and said atmosphere contains hydrogen.
Claim 4
Dependent Claim
10 words
The method of claim 1 wherein said atmosphere contains hydrogen.
Claim 5
Dependent Claim
19 words
The method of claim 3 wherein the partial pressure of said hydrogen ranges between 0 and about 1000 HPa.
Claim 6
Dependent Claim
17 words
The method of claim 4 wherein said hydrogen partial pressure ranges from about 50 through 100 HPa.
Claim 7
Dependent Claim
15 words
The method of claim 1 wherein said body is preheated to a temperature above ambient.
Claim 8
Dependent Claim
14 words
The method of claim 1 wherein said laser processing beam comprises an argon laser.
Claim 9
Dependent Claim
14 words
The method of claim 1 wherein said laser processing beam comprises a krypton laser.
Claim 10
Dependent Claim
15 words
The method of claim 1 wherein said laser processing beam comprises a CO 2 laser.
Claim 11
Dependent Claim
14 words
The method of claim 1 wherein said laser processing beam comprises a Nd:YAG laser.
Claim 12
Dependent Claim
12 words
The method of claim 1 wherein said laser is an excimer laser.
Claim 13
Dependent Claim
14 words
The method of claim 1 wherein said atmosphere with reducing effect is a vacuum.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-05-18 | 1990-11-17 | 1991-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-05-18 | 1994-11-17 | 1995-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-05-18 | 1998-11-17 | 1999-05-19 | $7700.00 | Window Closed / Lapsed |