Patent US4666479A successfully refreshed from Google Patents.
US4666479A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor wafer container
Assignee: Tensho Electric Industries Co Ltd
•
Filing: 1985-07-10
•
Granted: 1987-05-19
•
Expires: 2005-07-10
Abstract
Abstract This invention relates to a semiconductor wafer container having an air filter for removing fine particles from air, which serves to allow air to pass through a body of the container. This causes atmospheric pressure within and without the container body to be substantially identical to each other whereby dirty air is never introduced into the container body.
Inventors
- 👤 Kikuchi Shoji
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:56
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/10; H10P72/19; H10P72/1911; H10P72/1924; H10P72/1926; Y; Y10; Y10S; Y10S55/00; Y10S55/13
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
112 words
A container for holding semiconductor wafers, comprising: a housing having walls enclosing an internal cavity for containing the semiconductor wafers, said housing including a wafer holding frame formed of synthetic resin material, for holding the semiconductor wafers, said frame being disposed inside said walls and being of sufficient rigidity to retain the shape of said housing under external stress; and means for equalizing the air pressure within said cavity with respect to the air pressure outside said container, said equalizing means including an air filter provided in said walls, said internal cavity being inside said housing and in gaseous fluid communication with the exterior of said container only through said air filter.
Claim 2
Dependent Claim
112 words
A container for holding semiconductor wafers, comprising: a housing having walls enclosing an internal cavity for containing the semiconductor wafers, said housing including a wafer holding frame formed of synthetic resin material, for holding the semiconductor wafers, said frame being disposed inside said walls and being of sufficient rigidity to retain the shape of said housing under external stress; and means for equalizing the air pressure within said cavity with respect to the air pressure outside said container, said equalizing means including an air filter provided in said walls, said internal cavity being inside said housing and in gaseous fluid communication with the exterior of said container only through said air filter.
Claim 3
Dependent Claim
20 words
A container as set forth in claim 1, wherein said air filter comprises a porous film of foamed synthetic resin.
Claim 4
Dependent Claim
44 words
A container as set forth in claim 1, wherein said air filter comprises a plurality of porous films of foamed synthetic resin superposed above one another in a slightly spaced manner and said porous films having openings of different diameter in a stepped manner.
Claim 5
Dependent Claim
22 words
A container as set forth in claim 1, wherein said air filter comprises non-woven fabric formed of compressed fibers of fine diameter.
Claim 6
Dependent Claim
32 words
A container as set forth in claim 1, wherein said air filter comprises a composite of porous film of foamed synthetic resin and non-woven fabric formed of compressed fibers of fine diameter.
Claim 7
Dependent Claim
44 words
A container as set forth in claim 1, wherein said air filter comprises a composite of porous film of foamed synthetic resin, non-woven fabric formed of compressed fibers of fine diameter and porous solid material mounted on said porous film and said non-woven fabric.
Claim 8
Dependent Claim
28 words
A container as set forth in claim 1, wherein said air filter comprises a composite of porous film of foamed synthetic resin and fabric which is superposed thereon.
Claim 9
Dependent Claim
39 words
A container as set forth in claim 1, wherein said air filter comprises a composite of porous film of foamed synthetic resin, fabric which is superposed thereon and porous solid material mounted on said porous film and said fabric.
Claim 10
Dependent Claim
26 words
A container as set forth in claim 1, wherein said air filter comprises a reinforced frame having a grid, and filter material mounted on said grid.
Claim 11
Dependent Claim
27 words
A container as set forth in claim 1, wherein said air filter comprises a reinforced frame having two grids, and filter material mounted between said two grids.
Claim 12
Dependent Claim
23 words
A container as set forth in claim 1, wherein said air filter includes filter material treated so as to have static electricity proofness.
Claim 13
Dependent Claim
20 words
A container as set forth in claim 1, wherein said air filter includes filter material treated in a water-proof manner.
Claim 14
Dependent Claim
52 words
A container as in claim 1, wherein said housing includes a housing body having said wafer holding frame therein and having an opening for inserting and removing the semiconductor wafers into and from said slits, and a cover removable mounted on said housing body so as to air tightly cover said opening.
Claim 15
Dependent Claim
16 words
A container as in claim 1, wherein said frame is formed integrally with said housing body.
Claim 16
Dependent Claim
45 words
A container as in claim 1, wherein said housing further comprises a wafer holding frame formed of said synthetic resin material, for holding the semiconductor wafers, said frame being disposed inside said walls and being of sufficient rigidity to retain the shape of said housing.
Claim 17
Dependent Claim
30 words
A container as in claim 1, wherein said housing further comprising a bag forming said walls, said bag enclosing said frame, said air filter forming a part of said bag.
Claim 18
Dependent Claim
20 words
A container as in claim 1, wherein said frame has a plurality of slits for holding the semiconductor wafers therein.
Claim 19
Dependent Claim
16 words
A container as in claim 17, wherein said frame is formed integrally with said housing body.
References Cited (Backward Citations)
US2735964A
Cited
US3069831A
Cited
US3494113A
Cited
US3950155A
Cited
US4093437A
Cited
US4322385A
Cited
US4350507A
Cited
US4487606A
Cited
US4594082A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-05-18 | 1990-11-17 | 1991-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-05-18 | 1994-11-17 | 1995-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-05-18 | 1998-11-17 | 1999-05-19 | $7700.00 | Window Closed / Lapsed |