Patent US2038889A successfully refreshed from Google Patents.
Patent US4659936A successfully refreshed from Google Patents.
US4659936A
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US
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Line width measuring device and method
Assignee: Dainippon Screen Manufacturing Co Ltd
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Filing: 1985-11-26
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Granted: 1987-04-21
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Expires: 2005-11-26
Abstract
Abstract A line width measuring device for measuring the line width in an extremely fine pattern formed on a photo-mask or wafer employs a photo-electric converter, including a one-dimensional image sensor array, to convert a magnified image of the pattern into serial output signals storable in digitized form. Compensation and averaging of the stored image element information data are performed in known manner and the results are used to detect pattern edges and hence the line width. In one embodiment the one-dimensional image sensor array can be deviated along the array's axis within the inter-element pitch of the array to enhance the precision of line width measurement.
Inventors
- 👤 Atsushi Kikkawa
- 👤 Noriyuki Kondo
- 👤 Atsushi Tamada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 14:38
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/04; G01B11/00; G01B11/02; G01B11/024
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
118 words
A line width measuring device, for measuring the line width of a line in a pattern on a specimen, comprising: a magnifying optical system through which said line pattern of the specimen to be examined is projected under predetermined magnification; a photo-electric conversion means for converting the image of said pattern projected under magnification, said photo-electric conversion means comprising a one dimensional image sensor array and a P/S conversion circuit for outputting serial output signals; an A/D converter for A/D converting of the signals outputted by said photo-electric conversion means; a signal processing means for computing the line width of line pattern according to the output signal from said A/D converter; and means for outputting the computed result.
Claim 2
Dependent Claim
118 words
A line width measuring device, for measuring the line width of a line in a pattern on a specimen, comprising: a magnifying optical system through which said line pattern of the specimen to be examined is projected under predetermined magnification; a photo-electric conversion means for converting the image of said pattern projected under magnification, said photo-electric conversion means comprising a one dimensional image sensor array and a P/S conversion circuit for outputting serial output signals; an A/D converter for A/D converting of the signals outputted by said photo-electric conversion means; a signal processing means for computing the line width of line pattern according to the output signal from said A/D converter; and means for outputting the computed result.
Claim 3
Dependent Claim
23 words
A line width measuring device as recited in claim 1, wherein: said A/D converter has a resolution of more than 2 8 .
Claim 4
Dependent Claim
125 words
A line width measuring device as recited in claim 1, wherein; said signal processing means comprises a central processing unit (CPU); address designating means for designating addresses for data; memory means in which sensitivity information, image information and interim information are stored in addresses corresponding to individual elements of the one dimensional image sensor array; image element information compensation means for compensating the image element information according to the sensitivity information of each of said elements; averaging means for averaging of said compensated image element information data; edge detecting means for cutting said averaged compensated data at a predetermined level for thereby detecting the pattern edge from the corresponding address numbers; and line width computing means for computing the line width from the pattern edges.
Claim 5
Dependent Claim
36 words
A line width measuring device as recited in claim 1 wherein: said one dimensional image sensor array is provided with a deviating means for minutely moving said sensor array in the direction of the array's axis.
Claim 6
Dependent Claim
46 words
A line width measuring device as recited in claim 4 wherein said deviating means comprises a piezoelectric element and a piezoelectric element control circuit and is arranged so that said one dimensional image sensor array can be minutely deviated within the inter-element pitch of said array.
Claim 7
Independent Claim
63 words
A method for measuring individual line widths of lines forming a fine pattern, comprising the steps of: optically magnifying an image of the pattern to a predetermined magnification; impinging said magnified image onto a one dimensional image sensor array and developing therefrom serial output signals; converting said output signals into corresponding digitized signals; and computing the line width by processsing said digitized signals.
Claim 8
Independent Claim
63 words
A method for measuring individual line widths of lines forming a fine pattern, comprising the steps of: optically magnifying an image of the pattern to a predetermined magnification; impinging said magnified image onto a one dimensional image sensor array and developing therefrom serial output signals; converting said output signals into corresponding digitized signals; and computing the line width by processsing said digitized signals.
Claim 9
Dependent Claim
30 words
A method for measuring individual line widths according to claim 6, comprising the further step of: compensating for variations among the individual elements of said one dimensional image secmsor array.
Claim 10
Dependent Claim
51 words
A method for measuring individual line widths according to claim 7, comprising the further step of: averaging a predetermined number of outputs from a predetermined number of individual adjacent elements of said one dimensional image sensor array to produce an averaged value for a particular one of said individual adjacent elements.
Claim 11
Dependent Claim
47 words
A method for measuring individual line widths according to claim 8, comprising the further step of: detecting an edge of a line by comparing said averaged values to determine a predetermined level of difference between values corresponding to adjacent elements in said one dimensional image sensor array.
Claim 12
Dependent Claim
28 words
A method for measuring individual line widths according to claim 6, comprising the further step of: moving said one dimensional image sensor array by a small predetermined amount.
Claim 13
Dependent Claim
22 words
A method for measuring individual line widths according to claim 7, wherein: said movement is obtained by application of a piezoelectric force.
Claim 14
Dependent Claim
25 words
A method for measuring individual line widths according to claim 7, wherein: said movement is obtained by application of a force exerted by a wedge.
References Cited (Backward Citations)
US4385837A
Cited
US4585947A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-04-20 | 1990-10-20 | 1991-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-04-20 | 1994-10-20 | 1995-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-04-20 | 1998-10-20 | 1999-04-21 | $7700.00 | Window Closed / Lapsed |